Vent Gas Recovery Compressors in Solar Grade Polysilicon production plant using CVD technology • Reliable and safe. Our experience is the basis for our compressors for mixtures of Hydrogen, Hydrochloric Acid, Di-/Tri -Chlorosilanes and Silicon Tetrachloride. • Easy to maintain. The design facilitates maintenance by the end user • Safe and clean. All compressor components in contact with the process gas are cleaned and pickled for this specific application. They are assembled in special assembly rooms, free of dust and other contaminants. • Flexible solutions. Large single compressors can be substituted by a number of smaller compressors running in parallel • Adaptable to the various requirements of small, medium and large industries. • Solar Grade Polysilicon Technical Standard Process data Molecular weight Capacity Nm3/h Suction pressure min. - maxbar (a) Delivery pressure bar (a) Compressor model 4-6 3 500 4-6 15 - 17 MS2/2267-A1 4-6 5 000 4-6 15 - 17 MS2/2267-A1 4-6 6 500 4-6 15 - 17 MS3/3267-A1 4-6 8 000 4-6 15 - 17 1 HPX 2 4-6 10 000 4-6 15 - 17 1 HD 2 4-6 15 000 4-6 15 - 17 1 HD 2 4-6 20 000 4-6 15 - 17 1 HD 4 Process data Molecular weight Capacity Nm3/h Suction pressure min. - maxbar (a) Delivery pressure bar (a) Compressor model 10 - 20 250 1-2 10 - 13 TS2/220-A2 10 - 20 500 1-2 10 - 13 WS2/400-A2 10 - 20 750 1-2 10 - 13 WS2/580-A2 10 - 20 1 000 1-2 10 - 13 MS2/1412-A2 10 - 20 1 250 1-2 10 - 13 MS2/1412-A2 10 - 20 1 800 1-2 10 - 13 MS3/2442-A2 10 - 20 2 500 1-2 10 - 13 MS3/2412-A2 10 - 20 3 600 1-2 10 - 13 2 HD 2 10 - 20 5 000 1-2 10 - 13 3 HD 4 The compressors listed are just our most requested models: other models are available upon request. www.siadmi.com Industries SIAD’s certified standard for the polysilicon sector specifies: • Double purging, at the distance piece (Nitrogen) and main rod seal packing (Hydrogen), to ensure zero contamination of the process by external agents. • Compressor valve disks radiused for optimised flow, to prevent valve blocking by silanes, and also providing the energy required to drive the gas through the valve. • Thermoplastic disks, rather than metal plates, for the compressor valves: thermoplastic disks, due to their flexibility, conform better to the seat of the valve thus providing an excellent hermetic seal. • Pressure measurement at the face membrane rather than in the tubing, to prevent tube blockage by the silanes. International manufacturing and safety standards • • Reciprocating compressors have the fundamental task of recompressing to medium/high pressures vent gas mixtures downstream of process reactors. The compressed gas is sent to gas recovery plants , so that the major H2 components (Hydrogen, HCl, Silanes and Silicon Tetrachloride), once distilled, can be returned to the process, thus increasing the efficiency of the plant by reducing its gas consumption. Find out more about our range of services at www.siadmi.com HCl PROCESS REACTOR MGSI Standard API618 Fifth Edition Design specifications of all major licensees worldwide of the vent gas recovery process Polysilicon HCl H2 TCS GAS RECOVERY Integrated Technical Services • Technical Assistance Service on the phone number: +39 335 1421103 • Network of Authorised Assistance Centres throughout the world • Authentic, ready-to-use spare parts from stock • Global Service contracts • Predictive maintenance For further information: [email protected] • Mechanalysis © 2010 SIAD Macchine Impianti S.p.A. Società unipersonale soggetta a direzione e coordinamento di SIAD S.p.A. All rights reserved. The information contained herein is offered for use by technically qualified personnel at their discretion and risk without warranty of any kind. We regularly update our data, for updated data please visit our web site www.siadmi.com Printed in Italy 158uk07/10 SIAD Macchine Impianti S.p.A. Società unipersonale soggetta a direzione e coordinamento di SIAD S.p.A. www.siadmi.com Via Canovine, 2/4 24126 Bergamo ITALY Tel. +39 035 327611 [email protected] www.siadmi.com Fax +39 035 316131 Share Capital euro 5.000.000 paid up - V.A.T. and Fiscal Number: IT 00228420162 Capitale Sociale euro 5.000.000 i.v. - P.IVA, Codice Fiscale e Reg. Imprese Bergamo: IT 00228420162 R.E.A. BG-72619 - Export: BG 006107