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High Performance X-Ray Zone Plates
and Calibration Standards
A N T ZON E P L A TE GE N E R A TO R S O FT WA R E
A N T N A N O FA B R IC A T I ON TE C H N OL OGIE S
State-of-the-art nanofabrication facilities
allow us to provide innovative solutions to
produce the highest quality x-ray optics for
current and future advances in x-ray
microscopy.
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An advanced zone plate generator tool for
windows can be used to output zone plate
designs for viewing and calculations.
Please visit our website to download the
free software.
NINT Building
11421 Saskatchewan Drive NW
Edmonton, AB T6G 2M9
Canada
Phone: +1 (780) 628-5830
www.appliednt.com
Sales enquiries: [email protected]
General enquiries: [email protected]
proven performance
high-efficiency
full spectral range
www.appliednt.com
technology
High
Performance
X-Ray Zone Plates
Advanced
Solutions
SOFT TO HARD X-RAY OPTICS AND CALIBRATIO N STANDARDS
ZONE PLATE SOLUTIONS: RESOLUTION AND ENERGIES
Part #
Outer zone
width (nm)
Gold absorber
thickness (nm)
Diameter (µm)
(Common Sizes)
Recommended energy
range (keV)
ZPHRS15
15
80
250
0.1 to 0.8
ZPHRS18
18
200
200
0.1 to 1.5
ZPMK25
25
400
50, 85
0.1 to 4
ZPMRP50 (new)
50
1000
50, 85
0.2 to 12
ZPMCH50
50
750
180, 250
0.2 to 10
ZPMC50
50
600
180, 250, 900
0.2 to 5
ZPMLG250 (new)
<250
5000
50, 65
10 to 45
ZPMLG500
500
5000
50
10 to 45
HIGH RESOLUTION
HIGH EFFICIENCY
We offer high resolution optics for x-ray focusing down to
The absorber thickness of each zone plate is tailored to
15 nm. Our optics have demonstrated an imaging perfor-
maximize the focusing efficiency in a particular range of x-
mance exceeding 90% of the theoretical Rayleigh resolu-
ray energies. With high aspect ratio features, imaging can
tion. This performance is achieved using a state-of-the-art
be done faster and with higher contrast. The use of ultra-
electron beam patterning system and design software that
thin low-stress membranes also maximizes x-ray transmis-
defines the features of the zone plate with nanometer pre-
sion through our optics.
cision.
Side view of ANT Fresnel zone plate with gold
central stop and outer blocker options. Central
stop and outer blocker thickness are available up
to 4 microns.
Our optics are fabricated on low-stress, freestanding Si3N4 membranes that are 100 nm
thin. Standard Si frame sizes are 3×3 mm and
10×10 mm.
CALIBRATION STANDARDS
CENTRAL STOP
Central stop and outer blocker options significantly
improve zone plate imaging, especially at high energies.
Various thicknesses up to 4 micrometers in thickness are
available for the central stop for all zone plates.
We also offer X-ray, DUV, and visible light calibration
standards, x-ray pinholes, Zernike rings, and coded
apertures with comparable specifications to our zone plates.
We also offer customized solutions manufactured to your
specifications. Please contact us for more information.
W E P R O VI D E :
• X-RAY FOCUSING OPTICS (FRESNEL ZONE PLATES)
• CALIBRATION STANDARDS, AND OTHER OPTICAL COMPONENTS FOR X-RAY, DUV, AND OPTICAL SYSTEMS
Our zone plate fabrication process enables the
fabrication of high aspect ratio features, with
thicknesses up to 5 µm (left) and 20:1 aspect
ratio with features down to 50 nm (right)
providing superior x-ray focusing efficiency.

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