OBIS 8F XP Upgrade Presentation Feb 24-14

On-Board® IS 8F XP Upgrade
© 2014 Brooks Automation, Inc. • Proprietary Information
Brooks On-Board® IS 8F XP Upgrade (PVD)
- Demands for Longer Time Between Tool PM
Regenerations Must Synchronize with Tool Maintenance Cycles
Cryopump Regeneration Interval must be ≥ Tool PM
Typical Cryopump Time Between Regeneration
On-Board® IS XP Time Between Regeneration
Time Interval Between Tool Shield / Target or Source Changes
Operating Time Between Tool Maintenance Cycles
© 2014 Brooks Automation, Inc. • Proprietary Information
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Brooks On-Board® IS 8F XP Upgrade (PVD)
- PVD Solution Aligned with Process Trends
Optimized for Mixed Gas Processes
Increased Capacity for a wide range of process flow conditions
More Consistent Vacuum Performance Between Regenerations
Process Transparent Pumping Speeds
Greater than 1000 Atm liter capacity through a wide range of
applications
Demonstrated greater than 2X improvement in all
cases as compared with standard On-Board® IS 8F
Wide process applicability
Low to high flow –100 to 230 SCCM
N2 lean to rich – 30% to 70% mixtures
© 2014 Brooks Automation, Inc. • Proprietary Information
3
Brooks On-Board® IS 8F XP Upgrade (PVD)
- Consistent and Repeatable Vacuum Performance
On-Board IS 8F XP Delivers
Increased Process Gas Capacity for Mixed gas Sputter Recipes
Increased Productivity between Regenerations
Process Transparent Pumping Performance
Increased Tool Availability & Uptime
Available as an Upgrade of existing On
On--Board IS 8F
© 2014 Brooks Automation, Inc. • Proprietary Information
4
Brooks On-Board® IS 8F XP Upgrade (PVD)
- Performance
Ar/N2 Mixed Gas Capacity
( N2 < 50%, 120 sccm / 230 sccm)
Pressure (Torr) - 5 Sec Recovery
1.0E-03
1.0E-04
1.0E-05
Base Pressure: 1x10-6 Torr
1.0E-06
1.0E-07
1.0E-08
0
200
400
600
800
1000
1200
1400
1600
Capacity (STD Liters)
On-Board IS 8F (230 sccm)
© 2014 Brooks Automation, Inc. • Proprietary Information
On-Board IS 8F XP (230 sccm)
5
On-Board IS 8F XP (120 sccm)
1800
Brooks On-Board® IS 8F XP Upgrade (PVD)
- Performance
On-Board IS 8F XP with Sputter Plate
Gas Mix
Pumping Speed (L/s)
Hydrogen
800
Air
330
Water
4,000
Argon
275
Nitrogen
330
On-Board IS 8F XP Capacity (atm-L)
Hydrogen
12
Argon (only)
1,770
flow < 125 sccm (with recovery to 1.0x10-6 in 5 sec)
Nitrogen (only)
1,380
flow < 175 sccm (with recovery to 1.0x10-6 in 5 sec)
© 2014 Brooks Automation, Inc. • Proprietary Information
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Brooks On-Board® IS 8F XP Upgrade (PVD)
- Performance Comparison
Product
Power
Voltage
Frequency
Phase
Current
Size
Weight
Performance
Pumpin Speed (L/s)
Hydrogen
Air
Water
Argon
Nitrogen
Gas Capacity
Ar (Only)
N2 (Only)
On-Board IS-8F
On-Board IS-8F XP
8185095G001(Sput) 8185095G002(Chevron) 8185162G001(Sput)
8185117G002(Chevron)
180-253VAC
180-253VAC
180-253VAC
180-253VAC
50/60Hz
50/60Hz
50/60Hz
50/60Hz
1
1
1
1
<5AMP
<5AMP
<5AMP
<5AMP
See I/I drawing
See I/I drawing
See I/I drawing
See I/I drawing
30.4kg
30.4kg
30.4kg
30.4kg
800L/sec
330L/sec
4000L/sec
275L/sec
330L/sec
2200L/sec
1500L/sec
4000L/sec
1200L/sec
1500L/sec
1000 atm-L
700 atm-L
1000atm-L
700 atm-L
Notes: * Pressure recovery to 1.0x10-6 Torr in 5 sec
© 2014 Brooks Automation, Inc. • Proprietary Information
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800L/sec
330L/sec
4000L/sec
275L/sec
330L/sec
1770*atm-L (see graph A)
1380*atm-L (see graph B)
2200L/sec
1500L/sec
4000L/sec
1200L/sec
1500L/sec
1500 atm-L
1000 atm-L

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