Prof. Joachim Oberhammer RF to THz microsystems at KTH ABSTRACT: This talk gives an overview of recent RF to millimeter-wave micro-electromechanical systems (MEMS) developed at KTH Royal Institute of Technology in Stockholm, Sweden. The key enabling fabrication technology for the presented devices is 3-dimensional micromachining of silicon. Silicon is used both as a highly reliable mechanical material for integrated MEMS-reconfigurability, and as a low-loss dielectric material at microwave frequencies. Devices presented in this talk include: (1) W-band phase-shifters based on tuning a transmission line by moveable silicon-dielectric blocks; (2) MEMS-tuneable W-band high-impedance surfaces with applications for car radar, leaky-wave antennas, tuneable backshorts; (3) different devices realized in an SOI RF MEMS fabrication process, with the device reconfigurability implemented by moving the sidewalls of 3D-micromachined coplanar transmission lines: zero-power consumption interlocking switches, high-Q tuneable capacitors, and large bandwidth high-directivity couplers; (4) V-band waveguide switches with high on/off ratio by a MEMS-reconfigurable surface, and MEMS-tuneable waveguide irises for switched filters. Besides RF characterization, reliability data to 1 billion cycles, linearity and high power robustness is shown for most devices. The talk also gives an outline of current and future activities, which is to create micro-electromechanical systems at (sub-)THz frequencies. Since 2009, the work which will be presented has been awarded with 6 Best Paper Awards (of which 5 at IEEE conferences), 4 IEEE Graduate Fellowships, and an ERC Consolidator Grant. CV: Assoc. Prof. Joachim Oberhammer, born in Italy in 1976, received his M.Sc. degree in electrical engineering from Graz University of Technology, Austria, in 2000, and his Ph.D. degree from KTH Royal Institute of Technology in Stockholm, Sweden, in 2004. After a post-doctoral research fellowship at Nanyang Technological University, Singapore, he returned to KTH for building up a research team in radio-frequency micro-electromechanical systems (MEMS). He was a post-doctoral fellow at Kyoto University, Japan, in 2008, and a guest researcher at the NASA-Jet Propulsion Laboratory in Pasadena, CA, in 2014. Since 2010, Dr. Oberhammer is an Associate Professor at KTH, continuing his work on microwave microsystems. He is author and co-author of more than 100 reviewed research papers and holds 4 patents. In 2004, 2007, and 2008 he got an award by the Ericsson Research Foundation, a grant by the Swedish Innovation Bridge, and a scholarship by the Japanese Society for the Promotion of Science, respectively. The research work he is heading received six best paper awards (IEEE European Microwave Integrated Circuit Conference in 2009; IEEE Asia-Pacific Microwave Conference 2010; IEEE Antenna and Propagation Symposium 2012; European Antenna and Propagation Conference 2013 (IEEE); Micromechanics and Microsystems Conference 2013; IEEE Micro Electro Mechanical Systems 2014), and four IEEE Graduate Fellowship Awards (by MTT-S in 2010, 2011, 2014, and by AP-S in 2012). He served as TPRC member of IEEE Transducers 2009 and 2015, IEEE International Microwave Symposium since 2010, and IEEE Micro Electro Mechanical Systems 2011 and 2012. Dr Oberhammer is Steering Group member of the IEEE MTT-S and AP-S Chapters Sweden since 2009. In 2013, he received an ERC Consolidator Grant by the European Research Council.