Our profile

NanoLab@TU/e facilities
Some Highlights
Bert Koopmans
Managing Director: dr. Huub Ambrosius
Scientific Director: prof.dr.ir. Erwin Kessels
Our profile
NanoLab@TU/e
Expert technologies
Fabrication of III-V semiconductor
and photonic devices
Deposition of organic, magnetic, and
electronic nanostructured materials
• Strong in functional materials for devices
• Strong in photonic integration technology
• Bridging Science and Technology
• Covering full chain of knowledge
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TU/e: Strong in collaboration with industry
World-leading in joint publications
Philips Research, ASML, IBM, Siemens, Intel, NXP,
Hitachi, Tyco Electronics, NXP, ASM, Océ, FEI, DSM,
Alcatel-Thales, Oxford Instruments, Fuji-Film, Levitech,
Solay Tec, Tempress Systems, Roth & Rau, Coriant,
Fraunhofer, Smart Photonics, Effect photonics, Oclaro,
Genexis, PTG, Technobis, VTEC, etc., etc.
BRAINPORT
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State of the art cleanroom…
800 m 2
Class 1000 – 10,000
Epitaxial Growth (MBE and MOVPE)
Lithography (EBL, ASML DUV scanner and stepper)
Deposition (Metals, dielectrics)
Etching (dry etchers including ICP and wet etch benches)
Atomic Layer Deposition
Characterisation (FIB SEM, SEMs, XRD, XPS)
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… But more than a cleanroom
Dual-beam (SEM – FIB) technology
Advanced Scanning-Probe Microscopy
OLED – OPVC depo facility
Suite of electron microscopies
Nanofilm deposition + in-situ NanoLab (NanoAccess)
National Atom Probe Facility
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Highlight: MPW Advanced Photonic ICs
Lithography
& Etching
MOCVD reactor
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Highlight: NanoWires
Photovoltaics
MOVPE
>12% efficiency
Growth mechanism
Majorana physics
Science 336, 1003 (2012)
Thermoelectrics
LEDs
Nature 456, 369 (2008)
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Highlight: Spintronics & NanoMagnetism
Magnetic engineering
Dual-beam SEM/FIB
Pt , Al, Al2O3
CoFeB
Pt
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Highlight: Nanopillar laser
You’ll see it in the cleanroom
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