PSROC 2015 Annual Meeting - AVS Taiwan Chapter Session Topic

PSROC 2015 Annual Meeting - AVS Taiwan Chapter Session
Topic:New Developments in Atomic Layer Deposition Technology
Date: Jan. 29, 2015 (Thu)
Location:R104, Delta Building, National Tsing Hua University
13:30 – 14:00
14:00 – 14:10
14:10 – 15:00
Opening Ceremony
Chair: Prof. Li-Chyong Chen
Atomic Layer Deposition: From Fundamentals to
Prof. Stacey Bent
Dept. o f Chemical Engineering
15:00 – 15:30
Stanford University, USA
Pushing the ultimate CMOS and beyond
Prof. Ming-Hwei Hong
Dept. of Physics, National Taiwan University
15:30 – 16:00
Fabricating TiO 2 Nanotubes for Improved
Photocatalysis Performance by Atomic Layer
Prof. Tsong-Pyng Perng
Dept. of Materials Science and Engineering
National Tsing Hua University
16:00 – 16:30
16:30 – 17:00
Chair: Dr. Jiann-Shiun Kao
Applications of atomic layer deposition on the
high-K\metal gate stack, solar cells, and
Prof. Miin-Jang Chen
Dept. of Materials Science
National Taiwan University
17:00 – 17:30
and Engineering
Metal and Nitride Films Prepared by Using Atomic
Layer Deposition
Dr. Chi-Chung Kei
Advanced Semiconductor Equipment Division
Instrument Technology Research Center, NARLabs