MST Baden-Württemberg, Stuttgart, 27.04.2015 Mikrosystemtechnik Mik t t h ik – Enabler E bl für fü das d Internet-der-Dinge I t t d Di Markus Sonnemann, Robert Bosch GmbH Automotive Electronics 1 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. MST – Enabler für das Internet-der-Dinge B Bosch h – the th MEMS Pi Pioneer St t off MEMS production Start d ti in i 1995 More than 5 billion MEMS sensors produced More than 1,000 MEMS patents 100% in-house from MEMS design to manufacturing Bosch is #1 MEMS sensor supplier worldwide Automotive Electronics 2 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. MST – Enabler für das Internet-der-Dinge MEMS technology t h l – the th B Bosch h process Thick epitaxy p y “epi-poly” DRIE Etching g of sacrificial layers y Deep reactive ion etching Epi-poly Epi-Poly Oxid Oxid Silizium Silicon APSM System y integration g Advanced porous silicon membrane SMI540 porous Si ASIC n+ Gyro 10,3 mm 10,3 mm Accelerometer 1 axis gyro + 2 axis accelerometer Automotive Electronics 3 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. MST – Enabler für das Internet-der-Dinge W f Fab Wafer F b Reutlingen R tli Employees 2 758 Production area 34 300 sqm Minifactories Wafer fab fab, sensor frontend frontend, sensor backend backend, test center Products IC,, power p S/C / (chip ( p and packaged), p g ), sensors (packaged, customer specific mold package) 150 mm module 200 mm module 4 100 sqm 1 500 wafer starts/day Technologies: h l BCD1, 2, 3, 3s, 4, 4s CMOS, Bipolar, PSC bipolar, MOS Pressure sensors Inertial sensors Process: ≥ 0.5 μm 4 600 sqm 1000 wafer starts/day Technologies: h l BCD4, 4s, 6, 6sCu Advanced CMOS, HVCMOS Pressure sensors Inertial sensors Process ≥ 0.18 μm Automotive Electronics 4 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. MST – Enabler für das Internet-der-Dinge P d t portfolio Product tf li MEMS for f automotive t ti Acceleration sensors Angular rate sensors Combined i inertial i l sensors Pressure sensors Mass flow sensors C Central/peripheral t l/ i h l acceleration sensor for occupant protection R Rollover ll sensor for occupant protection C Combined bi d iinertial ti l sensor (3-axis) (yaw rate and acceleration sensor) for VDC and RoSe L Low pressure sensor for engine control M Mass fl flow sensor for engine management Low-g acceleration sensors for VDC, RoSe and active suspension and 3D for non-safety Mid-pressure sensor for transmission control Yaw rate sensor for VDC and 3D for non-safety Combined inertial sensor (6-axis) (yaw rate and acceleration sensor) for navigation and non-safety applications Pressure sensor for occupant protection High pressure sensor for engine and brake systems Automotive Electronics 5 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. MST – Enabler für das Internet-der-Dinge M More th than 50 MEMS sensors iin one car 1 Mass flow sensor [Combustion] 1 Barometric air pressure sensor [BAP] 1 Pressure sensor [Particle filter] 2 Pressure sensors [Boost pressure, oil] 1 High pressure sensor [Common Rail] 1 Pressure sensor [Tank pressure] 1 Pressure sensor [Start/stop function] 2 Acceleration sensors [Active engine mounting] 1 Acceleration sensor [Onboard diagnosis] 16 Sen nsors Comfort 2 Pressure sensors [Automatic transmission] 5 Acceleration sensors [active suspension] 1 Pressure sensor, 1 Humidity sensor, 2 Thermopiles [Air conditioning] 1 Angular rate sensor, 1 Acceleration sensor [Navigation] 2 microphones [telephone] 1 Bolometer Array [Night vision] (Seldom: 16 Pressure sensors (up to 8 per seat)) Safety 25 Se ensors 11 Se ensors Engine Management e.g. Diesel 2 High-g acceleration sensors (for airbag), 1 Angular rate sensor + 1 Low-g acceleration sensor (for roll-over sensing), 1 Acceleration sensor (Structure-borne sound sensor) [Airbag-ECU] 4 Acceleration sensors, 2 Pressure sensors [Peripheral airbag sensors] 2 Pressure sensors [Pedestrian safety] 1 Angular rate sensor, 1 Low-g acceleration sensor, 1 High pressure sensor [ESP (incl. ACC)] 1 Angular rate sensor [Active steering] 1 Acceleration sensor [eCall] 1 Acceleration sensor [Car alarm] 4 Pressure sensors [TPMS] [ ] 1 Pressure sensor [Occupant detection] 1 Pressure sensor [BrakeBooster] More than 50 MEMS sensors in one car today y Automotive Electronics 6 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. MST – Enabler für das Internet-der-Dinge Di Disruptive ti changes h in i the th MEMS market… k t Digital g microphone Gyroscope Multi-sensor package Magnetic sensor Accelerometer Pressure sensor Automotive Electronics 7 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. MST – Enabler für das Internet-der-Dinge S Smartphone t h tipping-point… ti i i t Rome,, Via Della Conciliazione 2005 Rome,, Via Della Conciliazione 2013 Source: dpa/ap Worldwide smartphone market 20141): 1.3 bn shipments estimated ~7-8 billion sensors2) Automotive Electronics 8 1) IDC Worldwide Mobile Phone Tracker, 3Q 2014 2) IHS Technology, MEMS Market Tracker Consumer and Mobile 2H 2013 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. MST – Enabler für das Internet-der-Dinge MEMS penetrate t t the th markets k t Internet of Things (IoT) 3rd wave Consumer Electronics 2nd wave Automotive 1st wave 1990 2000 2010 2020 Automotive Electronics 9 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. MST – Enabler für das Internet-der-Dinge M More use cases th than portrait t it / landscape… l d Navigation a gat o Outdoor GPS Indoor Step St countt + heading Localization Improve with pressure Context Co te t User s context User’s In a meeting Outside Sitting and eating Watching W t hi TV Activity recognition Fitness t ess Step counter Fitness level Calorie monitoring Sports S t ttrainer i Swimming Running Snowboarding Climbing Wellness/stress e ess/st ess Wellbeing Sleep monitoring Activity Socializing Stress monitoring Speaker Assistant Stress level Automotive Electronics 10 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. … MST – Enabler für das Internet-der-Dinge MEMS sensors – a multitude ltit d off markets k t Automotive Safety Systems Motor Management g Consumer Electronics Mobile Home Appliances Imaging Health & Fitness Industrial & Logistics Smart Systems Internet of Things Automotive Electronics 11 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. MST – Enabler für das Internet-der-Dinge S Smart t systems t require i new competences t μC firmware design SW algorithms* algorithms (gesture, well-being, …) low power p μC μ core design g FPGA as tool77 wireless connectivity (for 2nd generation) ASIC design, g , SystemC y models advanced packaging (SiP | WLCSP) MEMS design/technology (SiP | WLCSP) Software and advanced packaging are gaining weight, “SW is the new ASIC” Automotive Electronics 12 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. MST – Enabler für das Internet-der-Dinge E Example l iindoor d navigation i ti – Inertial I ti l sensor Sensors & Functions Low power consumption Acceleration Gyroscope Geomagnetic sensor Applications • Step counter & dynamic orientation sensor indoor • Path integration • Pedestrian dead reckoning Benefits • Navigation in shopping malls, public areas, parking decks, etc. Automotive Electronics 13 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. MST – Enabler für das Internet-der-Dinge BMI160 iinertial ti l measurementt unit it The 6-axis sensor integrates g a 3-axis accelerometer and an ultra-low power 3-axis gyroscope into a single package & = Developed specifically to support the demands of next generation applications such as indoor navigation, augmented reality and immersive gaming BMI160 with <1mA in full-operation mode for true always-on applications Automotive Electronics 14 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. MST – Enabler für das Internet-der-Dinge BNO055 intelligent i t lli t absolute b l t orientation i t ti sensor Ab l t Orientation Absolute O i t ti Sensor S System in Package (SiP) approach • 3-axis accelerometer 3-axis axis gyroscope •3 • 3-axis geomagnetic sensor • 32 bit μC running BSX3.0 FusionLib software • 5.2 x 3.8 mm² footprint Augmented g Reality Gaming g Activity y monitoring Navigation g Context awareness Power management Home automation Logistics g BNO055 plus a RF interface (WiFi, BT, etc.) is a key block of IoT based sensing Automotive Electronics 15 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. MST – Enabler für das Internet-der-Dinge C Connected t d smartt home h Automotive Electronics 16 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. MST – Enabler für das Internet-der-Dinge E Example l smartt home h – Intrusion I t i sensor Sensors & Functions Acceleration Battery life time: up to two years (10.000 closing cycles l assumed) d) Gyroscope Geomagnetic sensor Wireless data transmission Buzzer Applications • Home safety monitoring • Energy efficiency management • Ambient Assisted Living Benefits • • • • Easy and fast installation Multiple event detection Flexible usage for doors and windows Extendibility to many different use cases Automotive Electronics 17 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. MST – Enabler für das Internet-der-Dinge N New: G Gas Sensor S BME680 BMP280 Sensing our world Quantify yourself Well-being recommendations Personalized environment Sport & fitness monitoring BME280 Personalized control Environmental monitoring Personal weather forecast Home automation + BME680 BME680 + Environmental measurement Pressure Humidity Temperature Gas (VOC, CO2 alcohol) World´s first environmental sensor combining pressure, humidity, temperature & indoor air quality Automotive Electronics 18 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. MST – Enabler für das Internet-der-Dinge N New: G Gas Sensor S BME680 Use cases Home automation control for personalized HVAC management M Manual l ventilation til ti window i d open/close / l VOC detection (Volatile Organic Compounds) Indoor/outdoor detection to trigger GPS Leakage detection, e.g. gas supply in stoves Smoke detection H Human recognition iti iindoor d 3.0 mm 3 0 mm 3.0 Equips mobile devices and wearables with indoor air quality measurement Automotive Electronics 19 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. MST – Enabler für das Internet-der-Dinge P d t portfolio Product tf li MEMS ffor C Consumer El Electronics t i 3-axis sensors Accelerometer Gyroscope Magnetometer 6-axis sensors eCompass IMU 9-axis sensors Absolute Orientation Sensor Application Specific Sensor Nodes (ASSNs, incl. μC) environmental Barometric Pressure Sensor Integrated Environmental Unit microphones Analog and digital MEMS microphones (Akustica) High quality voice input for mobile devices Sensor data-fusion software ties everything together Automotive Electronics 20 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. MST – Enabler für das Internet-der-Dinge Th Three pillars ill off MEMS @ Bosch B h Bosch: B h No. 1 global supplier of MEMS sensors A MEMS pioneer i with ith More than 20 years of experience p More than 5 billion MEMS sensors produced More than 1.000 patents in the MEMS sensor area Automotive Electronics 21 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. MST – Enabler für das Internet-der-Dinge B h – ffrom MEMS tto smartt sensors & solutions l ti Bosch Bosch: One source for MEMS, MEMS sensors, sensors actuators and solutions Automotive Electronics Bosch Sensortec Bosch Connected Devices & Solutions Akustica CE & Industrial Acceleration Accelerometers Angular g rate Geomagnetic g sensors Pressure Gyroscopes Mass flow sensors Pressure sensors Humidity sensors Combo sensors ASSNs MEMS microphones Automotive Electronics 22 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. Smart sensor / actuator nodes Embedded SW & Algorithms Customized IoT sensors & actuators solutions MST – Enabler für das Internet-der-Dinge E bl ffor IIoT Enabler T – MEMS technology t h l innovation i ti Size / power Integration / μC + SW New measurants Continuing C ti i shrinking h i ki off sensor footprint / size and power consumption (e.g. accelerometer) IIntegration t ti off multi-axis lti i sensors + μC + SW in combo package (e.g. motion / orientation) Ri / emergence off novell Rise sensor clusters (e.g. environmental cluster T, p, H, …) MEMS technology is “ready” for IoT Automotive Electronics 23 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. MST Baden-Württemberg, Stuttgart, 27.04.2015 Danke! Mikrosystemtechnik – Enabler für das Internet-der-Dinge Automotive Electronics 24 Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights.
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