State of the art RF generators – cost-efficient adaptation to your systems Speaker: Speaker: Andreea Vasiliu Tobias Keller Productmanager RFsystems Business Manager STATE OF THE ART RF GENERATORS, Tobias Keller 1 About SPM • SPM is a private and independent company based in Liechtenstein. • We specialise in providing services and spares for the semiconductor industry and offering sputtering target materials and services. • We are regarded as an innovative partner due to close collaboration with customers on: – Cost reduction – Design improvement for process efficiency – Development of independent solutions • Company headquarters in Liechtenstein We welcome the opportunity to introduce our products and innovations to you. All information on this presentation is confidental. Copyright © 2012 SPM AG, Benderer Strasse 29, FL-9494 Schaan. All rights reserved. History of SPM Spare parts for the Semiconductor manufacturing industry Start PVD Coating Industry 1997 1997 Ceramic and quartz spare parts 2008 Silicon sputtering targets sold mostly to Bondshops around the world 2010 Built up our own local bondshop Ceramic Heaters 2013 Present 2013 Orings from Innores Process control system from Nova-Fabrica All information on this presentation is confidental. Copyright © 2012 SPM AG, Benderer Strasse 29, FL-9494 Schaan. All rights reserved. What is our customer’s concern? Efficiency How can we achieve all this? Quality Higher yield Cost reduction All information on this presentation is confidental. Copyright © 2012 SPM AG, Benderer Strasse 29, FL-9494 Schaan. All rights reserved. Tune UP! All information on this presentation is confidental. Copyright © 2012 SPM AG, Benderer Strasse 29, FL-9494 Schaan. All rights reserved. Tune up your tool! Electrodes QCM Thin film measurement sensor Heaters /ESCs FFKM Seals End Point detection All information on this presentation is confidental. Copyright © 2012 SPM AG, Benderer Strasse 29, FL-9494 Schaan. All rights reserved. Our Mission Active and reactive relationship with endusers and suppliers Sales people with good understanding of your needs, and techical degree Understand the qualification process and provide all necessary support together with our expert supplier All information on this presentation is confidental. Copyright © 2012 SPM AG, Benderer Strasse 29, FL-9494 Schaan. All rights reserved. TRUMPF Hüttinger GmbH + Co. KG and SPM STATE OF THE ART RF GENERATORS cost-efficient adaptation to your systems Tobias Keller Freiburg STATE OF THE ART RF GENERATORS, Tobias Keller 8 STATE OF THE ART RF GENERATORS Do you buy secondary equipment on e-bay? Don’t you look for better more reliable equipment? Who can help you-experienced and competent? STATE OF THE ART RF GENERATORS, Tobias Keller 9 Our company FAMILY COMPANY STATE OF THE ART RF GENERATORS, Tobias Keller 10 A strong team Our management Standing: Dr. phil. Nicola Leibinger-Kammüller Dr.-Ing. E.h. Peter Leibinger Dr. rer. pol. Lars Grünert Sitting: Dr.-Ing. Mathias Kammüller Dipl.-Ök. Harald Völker Dr. rer. soc. Gerhard Rübling Chairman of the Supervisory Board: Dr. Jürgen Hambrecht [not in the picture] STATE OF THE ART RF GENERATORS, Tobias Keller 11 About us Business divisions Innovation and quality Service and locations STATE OF THE ART RF GENERATORS, Tobias Keller SYNCHRO World Class in all Processes SYNCHRO is the TRUMPF production system. Thanks to synchronized flow production the needed material is located at the right place at the right time. STATE OF THE ART RF GENERATORS, Tobias Keller 13 What is our customers concern? Tool time STATE OF THE ART RF GENERATORS, Tobias Keller 14 Tools Maximizing Lifecycle Solutions Problem Statement • Obsolescence is a growing problem for 6” & 8” customers • Capabilities may be limited by the existing system • Risk to manufacturing operations and product line sustainability Approach • Provide technical support to address obsolescence impact to customer operations • Integrate 300mm & 450mm proven hardware and solutions in legacy systems • Provide product performance same or better than existing equipment • Establish alternative supply paths for obsolete equipment STATE OF THE ART RF GENERATORS, Tobias Keller 15 STATE OF THE ART RF GENERATORS Do you buy secondary equipment on e-bay? STATE OF THE ART RF GENERATORS, Tobias Keller 16 TruPlasma RF – 13MHz line of products Power Range from 3kW – 24kW Other Features: Interface: RS232, A/D, ECAT Standard pulsing (*simmer mode) 3kW CEX Auto frequency tuning Advanced Arc management 6kW Half rack Analog scaling Single faced Complete water-cooled 208VAC (*200-480V) 12kW 24kW Single faced Complete water-cooled Compact in size Wide AC input 200-480V Air and water-cooled Compact in size 208V or 480V options STATE OF THE ART RF GENERATORS, Tobias Keller 17 TruPlasma RF Superior Performance Best in class efficiency gain 15-20% Advanced ArcManagement Efficiency Comparision 0,9 0,8 0,7 0,6 0,5 0,4 Apex Supplier 1 0,3 Sure Power Supplier 2 0,2 Paramount3 Supplier TRUMPF SSM3000 0,1 0 0 500 1000 1500 2000 2500 3000 Output Power, W Unique coupling technology allows true 50 output characteristic Resulting to: 1) Cable length insensitive, 2) Superior stable plasma performance STATE OF THE ART RF GENERATORS, Tobias Keller 18 TruPlasma RF series 1000 Reference case Results from qualification: Reference TruPlasma RF 1003 TruPlasma RF 1003 Reference Excellent RF stability for all process settings Low reflected power STATE OF THE ART RF GENERATORS, Tobias Keller Nitride etch: Comparison of • RF-forward (225W) • RF-reflected Silicon etch: Comparison of • RF-forward (400W) • RF-reflected STATE OF THE ART RF GENERATORS Don’t you look for better more reliable equipment? STATE OF THE ART RF GENERATORS, Tobias Keller 20 Return on investment: ROI Fast payback • Increase yield with new advanced features e.g. ArcManagement • Less wafer loss • Prevent repair cost (better MTBF) • Tool downtime + maintenance labor • Production backlog caused by down equipment • Safe 15-20% energy cost due to better efficiency • Warehouse costs for multiple types of backup generators Reference customer: Using new state of the art RF-Power supply with new Advanced ArcManagement 1 day = 300 Euro 40 weeks = 60.000 Euro STATE OF THE ART RF GENERATORS, Tobias Keller 21 Power Supplies for Plasma Excitation RF 7000 RF 3000 TruPlasma RF RF 1000 TruPlasma MF 1 - 3 kW 6 - 12 kW 24 kW 30 – 50 kW MF 3000 MF 7000 New 10 – 40 kW TruPlasma DC DC-Puls / DC-Bias Bipolar 4000 New 4000 New 50 – 200 kW Highpulse 4000 DC 3000 Arc series 3000 9kW-12kW STATE OF THE ART RF GENERATORS, Tobias Keller 10 kW-40kW 10 kW-60kW 10 kW-240kW 22 STATE OF THE ART RF GENERATORS Who can help you-experienced and competent? STATE OF THE ART RF GENERATORS, Tobias Keller 23 STATE OF THE ART RF GENERATORS, Tobias Keller
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