SOP For ABM UV Flood Light Source

SOP For ABM UV Flood Light
Source
PQMS3-MCN-SOP-0001-V1
Date of Next
Review
21/11/2015
Position
Signed:
Date:
Prepared by: Ricky Tjeung
Process Engineer
R.T
21/11/2014
Authorised by: Dan Smith
Process Engineer
D.S
21/11/2014
CSIRO Research
Associate
K.P
21/11/2014
DOCUMENT AUTHORISATION
rd
3 party Authorisation: Karolina Petkovic Duran
Contents
EMERGENCY SHUTDOWN PROCEDURES.................................................................................. 2
1. Introduction ............................................................................................................................... 3
2. Purpose .................................................................................................................................... 3
3. Scope ....................................................................................................................................... 3
4. Competency.............................................................................................................................. 3
5. Key Definitions .......................................................................................................................... 3
6. Authorisation/Pre-requisites ..................................................................................................... 3
7. Health and Safety ..................................................................................................................... 4
8. Personal Protective Equipment (PPE) ..................................................................................... 4
9. User Etiquette ........................................................................................................................... 4
10. Before You Start Working ......................................................................................................... 4
11. Emergency Procedures ........................................................................................................... 5
12. After HOurs Access .................................................................................................................. 5
13. Clean up/Shutdown Procedures ............................................................................................... 5
14. Waste Disposal ......................................................................................................................... 5
15. Data Transfer and Storage ....................................................................................................... 5
16. Location and Availablity of Manuals, Supporting Information and Analysis Software.............. 5
17. References ............................................................................................................................... 5
18. Contacts .................................................................................................................................... 5
19. Basic Operations of ABM UV Flood Light Source ................................................................. 6
19.1.
Turning on the machine ................................................................................................ 6
19.2.
Loading Substrate......................................................................................................... 6
19.3.
Performing exposure .................................................................................................... 8
19.4.
Shutdown Procedure .................................................................................................... 8
20. Appendix ................................................................................................................................... 9
20.1.
Instrument Specific Risks and Hazards ........................................................................ 9
21. Document History/Control Information ................................................................................... 10
SOP for ABM UV Flood Light Source
Date of issue: 21/11/2014
PQMS3-MCN-SOP- 0001-V1
Printed copies of this document are uncontrolled copies.
Page 1 of 10
EMERGENCY SHUTDOWN PROCEDURES
Only to be used in case of Emergency and only if safe to do so!!!
Follow all MCN and Monash Emergency Procedures!!
SHUT DOWN PROCEDURES
If there is no EMO on ABM UV Flood Light,
Press EMO at the end of the aisle near the
EXIT door
For Water Leaks - Turn off all water valves
In Chase 7
Contacts
Instrument manager
OHS Representative
Name: Dr Ricky Tjeung
Name: Paul Spizzirri
Tel: 9902 9659
Tel: 9902 9653
Email: [email protected]
Email: [email protected]
SOP for ABM UV Flood Light Source
Date of issue: 21/11/2014
PQMS3-MCN-SOP- 0001-V1
Printed copies of this document are uncontrolled copies.
Page 2 of 10
1.
INTRODUCTION
This document has the details covering safe operation of the ABM UV Flood Light
Source. The UV flood light source can be used to expose a photoresist coated wafer with
UV light. The system has no pattern alignment facility so is only for single layer
applications that need no alignment.
2.
PURPOSE
This document is meant ONLY to be a guide for trained users and will cover most items a
user should know to safely and effectively operate ABM UV Flood Light Source for
standard application. If anything is not clear or understood, the user should contact the
MCN Process Engineer who has responsibility for the equipment or document. (See
section 18). Health and safety considerations for this equipment are detailed in Section 7.
In addition, readers of this document are expected to have obtained a basic level of
familiarity with the principles of photolithography prior to training.
3.
SCOPE
The following SOP should be carried out on the ABM UV Flood light Source and the
sample preparation tables in bay 6, class 100 of the cleanroom.
This procedure applies to all technical MCN personnel and users of the ABM UV Flood
Light Source within the MCN Cleanrooms. This document should not be used outside
the constraints of abovementioned location for any purpose.
4.
COMPETENCY
Competency is acquired through training by a certified MCN trainer for this specific
equipment. A training assessment, checklist and signoff will occur after training has been
satisfactorily completed.
5.
KEY DEFINITIONS
Photolithographic mask, UV exposure dose, photoresist.
6.
AUTHORISATION/PRE-REQUISITES
All users must have been trained by an MCN staff member and obtained certification for
the ABM UV Flood Light Source on the ACLS booking system. Unauthorized use of this
tool is PROHIBITED. The following training/induction modules must be completed prior to
the use of this instrument;
 MCN Site induction
 Setup an online ACLS account
 MCN Dangerous Goods Waste Management Training
 MCN Local Area Induction
 ABM UV Flood Light Source training from an authorized MCN staff
 Book the ABM UV Flood Light Source prior to use
(http://vera169.its.monash.edu.au/)
SOP for ABM UV Flood Light Source
Date of issue: 21/11/2014
PQMS3-MCN-SOP- 0001-V1
Printed copies of this document are uncontrolled copies.
Page 3 of 10
7.
HEALTH AND SAFETY
HAZARDS
DESCRIPTION
RISK
(H/M/L)
RISK MITIGATION
UV Hazards
The instrument has a UV
light source exposure risk
M
Training is undertaken
prior to use.
UV Shield must be close
during exposure.
Ensure equipment is
maintained.
UV Safety glasses
provided.
SOP next to instrument.
Mechanical/Physical
Hazards
Pinch Point during mask
and sample loading
process
L
Training is undertaken
prior to use of Mask
Aligner.
Electrical Hazards
220 V electrical Hazard
L
Training is undertaken
prior to use of Mask
Aligner.
Annual maintenance plus
Regular electrical testing
and tagging.
SOP next to instrument
8.
PERSONAL PROTECTIVE EQUIPMENT (PPE)
General clean room attire including lab gowns, hood, over boots, facemasks, nitrile gloves
and safety glasses
9.
USER ETIQUETTE
Please follow MCN’s General Conduct Policy at all times and always uphold high safety
and cleanliness standards at your workstations.
It is the responsibility of each user to communicate with the next scheduled user should a
booking run overtime.
10.
BEFORE YOU START WORKING
Please ensure the instrument is booked on the ACLS booking system prior to use
Please ensure that the logbook and all pertinent information has been filled in for the
session
Check that the equipment it empty and idle prior to beginning work on the equipment.
If the equipment is tagged out, do not begin work. Do not remove any signs saying not to
use the equipment. Please ensure you have the correct substrate coated with
photosensitive layer.
SOP for ABM UV Flood Light Source
Date of issue: 21/11/2014
PQMS3-MCN-SOP- 0001-V1
Printed copies of this document are uncontrolled copies.
Page 4 of 10
11.
EMERGENCY PROCEDURES
In a general emergency not related to ABM UV Flood Light Source, follow standard
evacuation procedures or Safety Warden Instructions. No shutdown is needed.
For ABM UV Flood light Source related emergency, please press the EMO button at the
end of the aisle (Refer to page 2)
Please contact the Instrument Manager/Facility Manager IMMEDIATELY (See section18
for contact details)
12.
AFTER HOURS ACCESS
Standard hours of operation are from 9:00 a.m. to 5:00 p.m., including equipment
shutdown, associated sample handling and storage, as well as de-gowning. Refer to the
“MCN after hours operation” procedure.
After hours policy and application form can be found in MCN website:
http://nanomelbourne.com/assets/out-of-hours-policy.pdf
http://nanomelbourne.com/assets/after-hours-request-form.pdf
13.
CLEAN UP/SHUTDOWN PROCEDURES
See section 19
14.
WASTE DISPOSAL
N/A
15.
DATA TRANSFER AND STORAGE
N/A
16.
LOCATION AND AVAILABLITY OF MANUALS, SUPPORTING
INFORMATION AND ANALYSIS SOFTWARE
Hard copy of the SOP is available at the equipment. Electronic version is available at
ACLS online booking system.
17.
REFERENCES
Cross reference external and internal links
18.
CONTACTS
PRIMARY CONTACT
SECONDARY CONTACT
FACILITY MANAGER
Ricky Tjeung
Dan Smith
Paul Spizzirri
T: 9902 9659
T: 9902 4377
T: 9902 9653
M: 0407 203 145
SOP for ABM UV Flood Light Source
Date of issue: 21/11/2014
PQMS3-MCN-SOP- 0001-V1
Printed copies of this document are uncontrolled copies.
Page 5 of 10
19.
BASIC OPERATIONS OF ABM UV FLOOD LIGHT SOURCE
19.1.
Turning On The Machine
Ignition Switch
Power Switch
Figure 1: UV Lamp Power Supply
1. Switch on Power button.
2. Press and hold ignition switch for five seconds.
3. Wait 20 mins before performing any exposure to allow the UV lamp reaching its full
intensity.
4. Change the chuck, either for 4” or 6” wafer as required.
Note -- Do not modify any settings on the power supply.
Manual mode operation is NOT allowed
19.2.
Loading Substrate (refer to figure 2)
1. Open drawer at the front of main unit.
2. Place substrate on chuck with side coated with photoresist facing upwards.
3. Enable substrate vacuum.
4. Place mask on top of wafer making sure that mask covers vacuum shroud.
5. Enable mask vacuum.
SOP for ABM UV Flood Light Source
Date of issue: 21/11/2014
PQMS3-MCN-SOP- 0001-V1
Printed copies of this document are uncontrolled copies.
Page 6 of 10
Open drawer on main unit showing
substrate chuck.
Vacuum controller for mask
Substrate vacuum controller
Figure 2: Loading Substrate
SOP for ABM UV Flood Light Source
Date of issue: 21/11/2014
PQMS3-MCN-SOP- 0001-V1
Printed copies of this document are uncontrolled copies.
Page 7 of 10
19.3.
Performing Exposure (Refer to figure 3)
1. Switch on green power button
2. Set exposure time
I.
Lamp intensity is calibrated monthly and marked on the front of the tool.
3. Press auto expose. Exposure will take place for the period set in the timer.
4. Switch off the green power button on exposure control unit
5. Switch off mask and substrate vacuum.
6. Remove mask and substrate
Figure 3: Exposure control box
19.4.
Shutdown Procedure
1. Switch off UV lamp controller power.
SOP for ABM UV Flood Light Source
Date of issue: 21/11/2014
PQMS3-MCN-SOP- 0001-V1
Printed copies of this document are uncontrolled copies.
Page 8 of 10
20.
APPENDIX
20.1.
Instrument Specific Risks and Hazards
1. The equipment represents state-of-the-art technology and operationally reliable. The
user may however be exposed to hazards if it is used improperly or for other than its
intended purpose.
2. If the equipment is used for any other than its intended purpose, all liability will be on the
user.
3. Any use by unauthorized personnel or careless handling may increase the potential
danger and result in access suspension.
4. All unauthorized modifications and alterations affecting the safety are prohibited!
5. Always wear gloves and safety glasses during operating with the system.
6. DO NOT proceed with processing in the face of an “UNKNOWN ERROR”. Contact the
instrument manager immediately.
7. UV light source is in use, caution must be adhered when working with the system; do
NOT look at the UV light during exposure; UV safety goggle must be worn during
exposure.
8. Caution must be adhered when opening the drawer, pull it slowly until it reach the
sample loading position; do NOT use large amount of force to pull the drawer, as it might
break various connections.
9. Any unrecognized errors and alarms MUST be reported to an MCN staff member,
immediately.
10. Do NOT modify any settings on the power supply.
11. Do NOT attempt to fix the instrument related issues.
12. Do NOT adjust any mechanical devices within this instrument.
13. Do remember to shut down the instrument after usage by following the instructions (6.
Shutdown procedure) closely.
14. The instrument should always be kept clean. Any spills or wafer breakages should be
cleaned up and MUST be reported to an MCN staff member, immediately.
15. All waste must be disposed of properly in the correct bins provided. Please contact an
MCN staff member if you have queries regarding disposal of specific, hazardous
materials.
SOP for ABM UV Flood Light Source
Date of issue: 21/11/2014
PQMS3-MCN-SOP- 0001-V1
Printed copies of this document are uncontrolled copies.
Page 9 of 10
21.
DOCUMENT HISTORY/CONTROL INFORMATION
DOCUMENT HISTORY
PQMS3-MCN-SOP-0001-V1
Version
no.
Date of
Issue
Reviewed by:
name
Amendments
1
31/07/2014
Dr Ricky Tjeung
Updated to new PQMS format
SOP for ABM UV Flood Light Source
Date of issue: 21/11/2014
PQMS3-MCN-SOP- 0001-V1
Printed copies of this document are uncontrolled copies.
Page 10 of 10

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