株式会社堀場エステック製マスフローコントローラ

VeQRR2_0080-00077
201５年 1 月 22 日
お客様各位
キヤノンアネルバ株式会社
品質保証部
株式会社堀場エステック製マスフローコントローラ SEC-E400J シリーズの
生産終了と保守終了期限のお知らせ
拝啓
貴社益々ご隆昌のこととお慶び申し上げます。また平素は格別のご愛顧を賜り、厚く
御礼申し上げます。
さて、弊社製装置に搭載しております、株式会社堀場エステック製マスフローコントローラ
SEC-E400J シリーズの生産終了と保守終了期限についてお知らせいたします。
弊社では、今後とも製品の信頼性向上に努める所存でございますので、変わらぬご愛顧のほ
どお願い申し上げます。
敬具
記
生産終了品
株式会社堀場エステック製
マスフローコントローラ SEC-E400J シリーズ
生産中止品の詳細は、別紙「生産中止対象機種と代替品(後継機種)」でご確認ください。
生産終了日：2015 年 03 月 31 日
保守終了日：2020 年 03 月 31 日
代替品
同社製マスフローコントローラ SEC-N100 シリーズ
代替品の詳細は、別紙「生産中止対象機種と代替品(後継機種)」をご確認ください。
ご不明な点は、お近くの営業拠点またはサービス拠点へご連絡ください。
http://www.canon-anelva.co.jp/contacts/index.html
以上
※
保守部品の在庫状況によっては、保守終了日前であっても修理できない場合がありますことをご了承ください。
SC856
別紙
生産中止対象機種と代替品(後継機種)
生産中止対象機種
SEC-E440J,,1000SCCM,4CR,,Ar,
SEC-E440J,,1000SCCM,4CR,,N2,
SEC-E440J,,1000SCCM,4CR,,O2,
SEC-E440J,,100SCCM,4CR,,10%SiH4/Ar,
SEC-E440J,,100SCCM,4CR,,5%O2/Ar,
SEC-E440J,,100SCCM,4CR,,5%O2/Ar,
SEC-E440J,,100SCCM,4CR,,Ar,
SEC-E440J,,100SCCM,4CR,,BCl3,
SEC-E440J,,100SCCM,4CR,,C2H4,
SEC-E440J,,100SCCM,4CR,,C4F6,
SEC-E440J,,100SCCM,4CR,,C4F8,
SEC-E440J,,100SCCM,4CR,,CF4,
SEC-E440J,,100SCCM,4CR,,CH3OH,
SEC-E440J,,100SCCM,4CR,,CHF3,
SEC-E440J,,100SCCM,4CR,,Cl2,
SEC-E440J,,100SCCM,4CR,,CO,
SEC-E440J,,100SCCM,4CR,,H2,
SEC-E440J,,100SCCM,4CR,,He,
SEC-E440J,,100SCCM,4CR,,Kr,
SEC-E440J,,100SCCM,4CR,,N2,
SEC-E440J,,100SCCM,4CR,,NH3,
SEC-E440J,,100SCCM,4CR,,NH3,
SEC-E440J,,100SCCM,4CR,,O2,
SEC-E440J,,100SCCM,4CR,,SF6,
SEC-E440J,,100SCCM,4CR,,SO2,
SEC-E440J,,100SCCM,4CR,,Xe,
SEC-E440J,,10SCCM,4CR,,Ar,
SEC-E440J,,10SCCM,4CR,,N2,
SEC-E440J,,10SCCM,4CR,,O2,
SEC-E440J,,10SLM,4CR,,N2,
SEC-E440J,,150SCCM,4CR,,Ar,
SEC-E440J,,1SLM,4CR,,Ar,
SEC-E440J,,1SLM,4CR,,C2H4,
SEC-E440J,,1SLM,4CR,,He,
SEC-E440J,,1SLM,4CR,,N2,
SEC-E440J,,1SLM,4CR,,O2,
SEC-E440J,,200SCCM,4CR,,1.3-C4H6,
SEC-E440J,,200SCCM,4CR,,Ar,
SEC-E440J,,200SCCM,4CR,,C2H4,
SEC-E440J,,200SCCM,4CR,,CF4,
SEC-E440J,,200SCCM,4CR,,CH3OH,
SEC-E440J,,200SCCM,4CR,,CHF3,
SEC-E440J,,200SCCM,4CR,,CO,
SEC-E440J,,200SCCM,4CR,,H2,
SEC-E440J,,200SCCM,4CR,,Kr,
SEC-E440J,,200SCCM,4CR,,N2,
SEC-E440J,,200SCCM,4CR,,Ne,
SEC-E440J,,200SCCM,4CR,,NH3,
SEC-E440J,,200SCCM,4CR,,O2,
SEC-E440J,,200SCCM,4CR,,SF6,
SEC-E440J,,200SCCM,4CR,,Xe,
SEC-E440J,,20SCCM,4CR,,5%O2/Ar,
SEC-E440J,,20SCCM,4CR,,Ar,
SEC-E440J,,20SCCM,4CR,,He,
SEC-E440J,,20SCCM,4CR,,Kr,
SEC-E440J,,20SCCM,4CR,,N2,
SEC-E440J,,20SCCM,4CR,,O2,
SEC-E440J,,20SCCM,4CR,,SF6,
SEC-E440J,,20SCCM,4CR,,SO2,
SEC-E440J,,20SCCM,4CR,,Xe,
SEC-E440J,,2SLM,4CR,,Ar,
SEC-E440J,,2SLM,4CR,,NH3,
SEC-E440J,,2SLM,4CR,,O2,
N番
N63596741
N63596739
N63593751
N63586502
N63595644
N63578543
N63593517
N63595515
N63596997
N63587776
N63594872
N63592862
N63596480
N63596856
N63594602
N63594561
N63593543
N63595175
N63595230
N63593531
N63594602
N63594573
N63593555
N63596193
N63586318
N63595383
N63594690
N63593866
N63595008
N63586540
N63578775
N63594743
N63586708
N63587714
N63596143
N63596791
N63596820
N63593529
N63594793
N63594884
N63588316
N63596727
N63594688
N63593567
N63596117
N63593579
N63578373
N63594676
N63593581
N63587623
N63595424
N63578543
N63594418
N63500027
N63595125
N63593854
N63593907
N63596569
N63578385
N63592927
N63594755
N63596765
N63595395
代替品(後継機種)
SEC-N112MGM,CT1,,MR.MG-04,1000SCCM,4CRL,Ar,
SEC-N112MGM,CT1,,MR.MG-04,1000SCCM,4CRL,N2,
SEC-N112MGM,CT1,,MR.MG-04,1000SCCM,4CRL,O2,
SEC-N112MGM,CT1,,MR.MG-04,1000SCCM,4CRL,O2,
SEC-N112MGM,CT1,,MR.MG-02,100SCCM,4CRL,5%O2/Ar,
SEC-N112MGM,CT1,,MR.MG-02,100SCCM,4CRL,5%O2/Ar,
SEC-N112MGM,CT1,,MR.MG-02,100SCCM,4CRL,Ar,
SEC-N112MGM,CT1,,MR.MG-04,100SCCM,4CRL,BCl3,
SEC-N112MGM,CT1,,MR.MG-03,100SCCM,4CRL,C2H4,
SEC-N112MGM,CT1,,MR.MG-04,100SCCM,4CRL,C4F6,
SEC-N112MGM,CT1,,MR.MG-05,100SCCM,4CRL,C4F8,
SEC-N112MGM,CT1,,MR.MG-03,100SCCM,4CRL,CF4,
対応不可：推奨機種SEC-Z512KXCT1,,100SCCM,4CRL,SUC,CH3OH,
SEC-N112MGM,CT1,,MR.MG-03,100SCCM,4CRL,CHF3,
SEC-N112MGM,CT1,,MR.MG-3.5,100SCCM,4CRL,Cl2,
SEC-N112MGM,CT1,,MR.MG-02,100SCCM,4CRL,CO,
SEC-N112MGM,CT1,,MR.MG-02,100SCCM,4CRL,H2,
SEC-N112MGM,CT1,,MR.MG-02,100SCCM,4CRL,He,
SEC-N112MGM,CT1,,MR.MG-03,100SCCM,4CRL,Kr,
SEC-N112MGM,CT1,,MR.MG-02,100SCCM,4CRL,N2,
SEC-N112MGM,CT1,,MR.MG-03,100SCCM,4CRL,NH3,
SEC-N112MGM,CT1,,MR.MG-03,100SCCM,4CRL,NH3,
SEC-N112MGM,CT1,,MR.MG-02,100SCCM,4CRL,O2,
SEC-N112MGM,CT1,,MR.MG-03,100SCCM,4CRL,SF6,
SEC-N112MGM,CT1,,MR.MG-3.5,100SCCM,4CRL,SO2,
SEC-N112MGM,CT1,,MR.MG-03,100SCCM,4CRL,Xe,
SEC-N112MGM,CT1,,MR.MG-R01,10SCCM,4CRL,Ar,
SEC-N112MGM,CT1,,MR.MG-R01,10SCCM,4CRL,H2,
SEC-N112MGM,CT1,,MR.MG-R01,10SCCM,4CRL,O2,
SEC-N112MGM,CT1,,MR.MG-06,10SLM,4CRL,N2,
SEC-N112MGM,CT1,,MR.MG-03,150SCCM,4CRL,Ar,
SEC-N112MGM,CT1,,MR.MG-04,1SLM,4CRL,Ar,
SEC-N112MGM,CT1,,MR.MG-05,1SLM,4CRL,C2H4,
SEC-N112MGM,CT1,,MR.MG-04,1SLM,4CRL,He,
SEC-N112MGM,CT1,,MR.MG-04,1SLM,4CRL,N2,
SEC-N112MGM,CT1,,MR.MG-04,1SLM,4CRL,O2,
SEC-N112MGM,CT1,,MR.MG-04,200SCCM,4CRL,1,3-C4H6,
SEC-N112MGM,CT1,,MR.MG-03,200SCCM,4CRL,Ar,
SEC-N112MGM,CT1,,MR.MG-04,200SCCM,4CRL,C2H4,
SEC-N112MGM,CT1,,MR.MG-03,200SCCM,4CRL,Ar,
対応不可：推奨機種SEC-Z512KXCT1,,200SCCM,4CRL,SUC,CH3OH,
SEC-N112MGM,CT1,,MR.MG-04,200SCCM,4CRL,CHF3,
SEC-N112MGM,CT1,,MR.MG-03,200SCCM,4CRL,CO,
SEC-N112MGM,CT1,,MR.MG-03,200SCCM,4CRL,H2,
SEC-N112MGM,CT1,,MR.MG-3.5,200SCCM,4CRL,Kr,
SEC-N112MGM,CT1,,MR.MG-03,200SCCM,4CRL,N2,
SEC-N112MGM,CT1,,MR.MG-03,200SCCM,4CRL,Ne,
SEC-N112MGM,CT1,,MR.MG-03,200SCCM,4CRL,NH3,
SEC-N112MGM,CT1,,MR.MG-03,200SCCM,4CRL,O2,
SEC-N112MGM,CT1,,MR.MG-04,200SCCM,4CRL,SF6,
SEC-N112MGM,CT1,,MR.MG-3.5,200SCCM,4CRL,Xe,
SEC-N112MGM,CT1,,MR.MG-01,20SCCM,4CRL,5%O2/Ar,
SEC-N112MGM,CT1,,MR.MG-01,20SCCM,4CRL,Ar,
SEC-N112MGM,CT1,,MR.MG-01,20SCCM,4CRL,He,
SEC-N112MGM,CT1,,MR.MG-1.5,20SCCM,4CRL,Kr,
SEC-N112MGM,CT1,,MR.MG-01,20SCCM,4CRL,N2,
SEC-N112MGM,CT1,,MR.MG-01,20SCCM,4CRL,O2,
SEC-N112MGM,CT1,,MR.MG-02,20SCCM,4CRL,SF6,
SEC-N112MGM,CT1,,MR.MG-2.5,20SCCM,4CRL,SO2,
SEC-N112MGM,CT1,,MR.MG-1.5,20SCCM,4CRL,Xe,
SEC-N112MGM,CT1,,MR.MG-05,2SLM,4CRL,O2,
SEC-N112MGM,CT1,,MR.MG-05,2SLM,4CRL,NH3,
SEC-N112MGM,CT1,,MR.MG-05,2SLM,4CRL,O2,
別紙
生産中止対象機種と代替品(後継機種)
生産中止対象機種
SEC-E440J,,300SCCM,4CR,,Ar,
SEC-E440J,,300SCCM,4CR,,C2H4,
SEC-E440J,,300SCCM,4CR,,H2,
SEC-E440J,,300SCCM,4CR,,N2,
SEC-E440J,,30SCCM,4CR,,N2,
SEC-E440J,,30SCCM,4CR,,O2,
SEC-E440J,,30SCCM,4CR,,SiH4,
SEC-E440J,,3SLM,4CR,,Ar,
SEC-E440J,,400SCCM,4CR,,Ar,
SEC-E440J,,500SCCM,4CR,,Ar,
SEC-E440J,,500SCCM,4CR,,C2H4,
SEC-E440J,,500SCCM,4CR,,H2,
SEC-E440J,,500SCCM,4CR,,He,
SEC-E440J,,500SCCM,4CR,,Kr,
SEC-E440J,,500SCCM,4CR,,N2,
SEC-E440J,,500SCCM,4CR,,N2O,
SEC-E440J,,500SCCM,4CR,,Ne,
SEC-E440J,,500SCCM,4CR,,NF3,
SEC-E440J,,500SCCM,4CR,,NH3,
SEC-E440J,,500SCCM,4CR,,O2,
SEC-E440J,,500SCCM,4CR,,Xe,
SEC-E440J,,500SCCM,4IS,,NH3,
SEC-E440J,,50SCCM,4CR,,10%O2/Ar,
SEC-E440J,,50SCCM,4CR,,Ar,
SEC-E440J,,50SCCM,4CR,,BCl3,
SEC-E440J,,50SCCM,4CR,,C4F8,
SEC-E440J,,50SCCM,4CR,,CF4,
SEC-E440J,,50SCCM,4CR,,CH4,
SEC-E440J,,50SCCM,4CR,,Cl2,
SEC-E440J,,50SCCM,4CR,,He,
SEC-E440J,,50SCCM,4CR,,Kr,
SEC-E440J,,50SCCM,4CR,,N2,
SEC-E440J,,50SCCM,4CR,,NH3,
SEC-E440J,,50SCCM,4CR,,O2,
SEC-E440J,,50SCCM,4CR,,SiH4,
SEC-E440J,,50SCCM,4CR,,Xe,
SEC-E440J,,5SLM,4CR,,Ar,
SEC-E440J-000019,,100SCCM,4CR,,O2,
SEC-E440J-000105,,200SCCM,4CR,,Ar,
SEC-E440J-000194
SEC-E440J-000223,,50SCCM,4CR,,O2,
SEC-E440J-000267,,200SCCM,4CR,,O2,
N番
N63594420
N63594731
N63596208
N63594781
N63596090
N63595620
N63500584
N63594767
N63595187
N63593593
N63596313
N63593608
N63586734
N63500546
N63593610
N63587702
N63578438
N63596777
N63595113
N63594626
N63500534
N63595113
N63578531
N63593646
N63596868
N63587477
N63587661
N63500273
N63595084
N63595096
N63596002
N63593658
N63594585
N63593799
N63595101
N63587609
N63595694
N63593555
N63593529
N63593593
N63593799
N63593581
代替品(後継機種)
SEC-N112MGM,CT1,,MR.MG-03,300SCCM,4CRL,Ar,
SEC-N112MGM,CT1,,MR.MG-04,300SCCM,4CRL,C2H4,
SEC-N112MGM,CT1,,MR.MG-03,300SCCM,4CRL,H2,
SEC-N112MGM,CT1,,MR.MG-03,300SCCM,4CRL,N2,
SEC-N112MGM,CT1,,MR.MG-01,30SCCM,4CRL,N2,
SEC-N112MGM,CT1,,MR.MG-01,30SCCM,4CRL,O2,
SEC-N112MGM,CT1,,MR.MG-02,30SCCM,4CRL,SiH4,
SEC-N112MGM,CT1,,MR.MG-05,3SLM,4CRL,Ar,
SEC-N112MGM,CT1,,MR.MG-04,400SCCM,4CRL,Ar,
SEC-N112MGM,CT1,,MR.MG-04,500SCCM,4CRL,Ar,
SEC-N112MGM,CT1,,MR.MG-04,500SCCM,4CRL,C2H4,
SEC-N112MGM,CT1,,MR.MG-04,500SCCM,4CRL,H2,
SEC-N112MGM,CT1,,MR.MG-04,500SCCM,4CRL,He,
SEC-N112MGM,CT1,,MR.MG-4.5,500SCCM,4CRL,Kr,
SEC-N112MGM,CT1,,MR.MG-04,500SCCM,4CRL,N2,
SEC-N112MGM,CT1,,MR.MG-04,500SCCM,4CRL,N2O,
SEC-N112MGM,CT1,,MR.MG-04,500SCCM,4CRL,Ne,
SEC-N112MGM,CT1,,MR.MG-04,500SCCM,4CRL,NF3,
SEC-N112MGM,CT1,,MR.MG-04,500SCCM,4CRL,NH3,
SEC-N112MGM,CT1,,MR.MG-04,500SCCM,4CRL,O2,
SEC-N112MGM,CT1,,MR.MG-4.5,500SCCM,4CRL,Xe,
SEC-N112MGM,CT1,,MR.MG-04,500SCCM,4CRL,NH3,※継手1/4VCRです
SEC-N112MGM,CT1,,MR.MG-02,50SCCM,4CRL,10%O2/Ar,
SEC-N112MGM,CT1,,MR.MG-02,50SCCM,4CRL,Ar,
SEC-N112MGM,CT1,,MR.MG-3.5,50SCCM,4CRL,BCl3,
SEC-N112MGM,CT1,,MR.MG-04,50SCCM,4CRL,C4F8,
SEC-N112MGM,CT1,,MR.MG-02,50SCCM,4CRL,CF4,
SEC-N112MGM,CT1,,MR.MG-02,50SCCM,4CRL,CH4,
SEC-N112MGM,CT1,,MR.MG-03,50SCCM,4CRL,Cl2,
SEC-N112MGM,CT1,,MR.MG-02,50SCCM,4CRL,He,
SEC-N112MGM,CT1,,MR.MG-2.5,50SCCM,4CRL,Kr,
SEC-N112MGM,CT1,,MR.MG-02,50SCCM,4CRL,N2,
SEC-N112MGM,CT1,,MR.MG-02,50SCCM,4CRL,NH3,
SEC-N112MGM,CT1,,MR.MG-02,50SCCM,4CRL,O2,
SEC-N112MGM,CT1,,MR.MG-02,50SCCM,4CRL,SiH4,
SEC-N112MGM,CT1,,MR.MG-2.5,50SCCM,4CRL,Xe,
SEC-N112MGM,CT1,,MR.MG-06,5SLM,4CRL,Ar,
SEC-N112MGM,CT1,,MR.MG-02,100SCCM,4CRL,O2,
SEC-N112MGM,CT1,,MR.MG-03,200SCCM,4CRL,Ar,
SEC-N112MGM,CT1,,MR.MG-04,500SCCM,4CRL,Ar,
SEC-N112MGM,CT1,,MR.MG-02,50SCCM,4CRL,O2,
SEC-N112MGM,CT1,,MR.MG-03,200SCCM,4CRL,O2,

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