Le nanotecnologie: dal Laboratorio al Mercato Fabrizio Pirri Politecnico di Torino Istituto Italiano di Tecnologia Materials & Processes for micro nanotechnologies Laboratory http://www.polito.it/micronanotech Mission • fundamental research on materials and processes for micro- and nano-technologies • design and fabrication of MEMS and nanostructures • technological transfer • education IIT - Italian Institute of Technology @ POLITO Center for Space Human Robotics Robotics Smart Materials Energy The LABS have the aim to develop the robotics concept and related technologies for the space utilization and to foster all related spin-offs for terrestrial applications. The activities are focused on the development of micro and nanotechnologies for sensors and actuators. The goal is to give a technological answer to the demand for portable, alternative energy sources in space human robotics applications, also exploitable in very important industrial areas such as automation and robotics, portable electronics and automotive. Smart EVA Glove, Human Gesture Recognition Systems, Distributed sensors for humanoid robots. Moreover, basic investigations on processes and integration technologies are included. CLEAN ROOMS @ Lab http://www.chilab.polito.it Class 100 [15 m2] Class 1000 [45 m2] Class 10.000 [90 m2] Total area 150 m2 CLEAN ROOMS @ TechFab http://www.techfabmnt.it Total area 430 m2 Bio-Lab Class 100 Class 1000 FABRICATION FACILITIES Thin Films growth technologies - Metal evaporation systems: thermal + electron gun - Magnetron sputtering - Plasma Enhanced Chemical Vapor Deposition (PECVD) - Low Pressure CVD (LPCVD) - Silicon oxidation - Rapid Thermal Annealing - Electroplating - FIB assisted deposition Optical Lithography (Front/back side align.) Laser Direct Writing Lithography E-beam/AFM/STM Lithography Etching: - Wet - Dry (plasma, RIE, ICP-DRIE (Bosch® & Cryo)) - Powder Blasting Polymer machining: - Hot Embossing - µ-Stereo Lithography (coming soon) - µ-Injection Moulding - Polymer 3D Ink-Jet Printing - Elastomers casting in-situ µ-Electro-Discharge Machinining Laser Machining & Laser Sintering Focused Ion Beam (FIB) Milling Anodic Bonding Low and Atm. Pressure Plasma Polymerization CHARACTERIZATION FACILITIES Microscopies Spectroscopies Profilometer Optical FE-SEM + EDX AFM / STM SNOM TEM/STEM Fluorescence UV-Vis Micro-FTIR Micro Raman XRD XPS Contact Angle Electrical & Piezo characterizations www.politronica.eu http://shr.iit.it/ www.micro-la.com www.polito.it/micronanotech www.trustech.it Customers & Partners of the Network TECHNOLOGICAL TRANSFER Ab Initio Materials Deposition Synthesis Processes Simulation MEMS/NEMS Technology FEM: CoventorwareTM ComsolTM ZEMAXTM Characterization: Morphological Analytical Prototyping Technology Transfer MEMS Processing & Structures Set-up of different technological processes and fabrication of microstructures and suspended microstructures (cantilevers and arrays of cantilevers, microbridges, membranes, …) through Bulk Micromachining … … and Surface Micromachining CANTILEVER BASED PRESSURE SENSOR FOR VACUUM APPLICATIONS Electrostatic actuation & capacitive readout integration Piezoelectric MICRORELAY for Industrial Automation HIGH TEMPERATURE/POWER MICROELECTRONICS: SiC-BASED DIODES 4H-SiC Schottky diodes 4H-SiC n- Epi 4H-SiC n+ Substrate TO 220 assembly ZnO Nanostructures based Gas Sensor Lab On Chip: our Philosophy Passive Market Application Low Cost (Materials & Fabrication) Simple Layout Automation Cantilever: In-Vacuum vs In-Liquid Measurements • Pumping system • Dip-and-Dry position sensitive detector • Highest sensitivity (pg, single cell) • Quantification • On-line, In-situ • Rapid • Lowest resolution • Calibration needed Miniaturised Systems for Metallic Heavy Ions Detection in Water Miniaturised Systems for Metallic Heavy Ions Detection in Water Ink Jet flexible electronics RFID antenne sensori Rapid Prototyping CNC, tabletop, vertical machining center Ideal research tool for machining on several materials (plastics, metals, …) Accuracy: Positioning 10 um CNC Milling Repeatibility 5 um Resolution 0,5 um Polymeric 3D printing Benchman VMC4000 Direct Metal Laser Sintering This machine sinters metal powder into a solid part by locally melting it with a focused laser beam. The parts are built up additively layer by layer. Even complex geometries are created directly from 3D CAD data, in a few hours and without any tooling. It is a net-shape process, producing parts with good surface quality and mechanical properties. Micro ElectroDischarge Machining Rapid Prototyping & Systems The term “temporary tamponades" indicates a group of substances that are injected into the vitreous chamber in order to replace the corpus vitreum and to promote the adhesion of the retina. They are often described by the term, fully equivalent, of "vitreous substitutes". The vitreous substitutes may be temporary (buffering gases like SF6) or permanent (silicone oil). Test of new ophthalmic tamponades Pressione Bulbo Sensore 1 Sensore 2 Sensore 3 300 250 200 150 Pressione [mbar] 100 50 0 0 20 40 60 80 -50 Tempo [s] 100 120 140 160 Rapid Prototyping Anthropologic Applications Polymeric 3D printing Grazie per l’attenzione Fabrizio Pirri – [email protected] http://www.polito.it/micronanotech http://shr.iit.it
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