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QSIL introduces:
December 2014
an electrically fused quartz of outstanding purity
with a “flame-fused bubble content”
ilmasil PQ
ilmasil PQ is an electrically fused, clear quartz, manufactured by fusing high purity
quartz sand using QSIL’s propritary plasma melting process. With a sum of 5 ppm for all typical trace
elements the purity of ilmasil PQ falls below the values of highest purity level of any fused quartz
materials manufactured from natural sand. Its outstanding bubble content together with the low OHcontent make ilmasil PQ a perfect choice for sensitive semiconductor applications. Same as other ilmasil
fused quartz grades, ilmasil PQ is available in hollow cylinder form. This near net shape makes it a perfect
starting material for the fabrication of rings, flanges and other rotation-symmetric parts.
Standard grade
electrically fused quartz
Ilmasil PQ
Purity
Typical Trace Elements (ppm by weight oxide)
Element
Al
Ca
Cr
Cu
Fe
K
Li
Mn
Na
Ni
Ti
Zr
OH-
ilmasil® PQ
4
0,1
<0,01
0,01
0,1
0,05
0,5
<0,01
0,1
0,01
0,1
<0,02
30
ilmasil® PL
8
0,7
< 0,05
< 0,03
0,2
0,2
0,2
< 0,01
0,2
< 0,01
1,4
1
30
ilmasil® PI
8
0,8
< 0,05
< 0,03
0,3
0,4
0,2
<0,01
1,0
< 0,01
1,4
1,3
30
ilmasil® PN
15
0,8
<0,05
<0,03
0,3
0,7
0,5
0,05
1,0
<0,02
1,5
1,5
30
Bubble Content
ilmasil PQ
ilmasil PL
ilmasil PI
ilmasil PN
TBCS1
TBCS1
TBCS1
TBCS1
in mm² / 100 cm³
in mm² / 100 cm³
in mm² / 100 cm³
in mm² / 100 cm³
1,0
5,5
5,5
7,5
Number
per 1000 cm³
Number
per 1000 cm³
Number
per 1000 cm³
Number
per 1000 cm³
2
1
-
3
1
0,1
-
3
1
0,1
-
3
1
0,1
-
Bubble size
∅ mm
< 0.3
0.3 – 0.5
> 0.5 – 1
>1–2
>2
1TBCS:
Total Bubble Cross Section: The sum of all cross sectional area in specified glass volume
Thermal Properties
Annealing Point in °C
ilmasil PQ
1210
ilmasil PL
1213
ilmasil PI
1180
ilmasil PN
1204
1100
1060
1048
1054
1715
1730
1730
1730
1700 – 2100
1700 – 2100
1700 – 2100
1700 – 2100
1100
1300
1100
1300
1100
1300
1100
1300
(lg η (in dPas) = 13.0)
Strain Point in °C
(lg η (in dPas) = 14.5)
Softening Point in °C
(lg η (in dPas) = 7.6)
Processing Range in °C
(lg η (in dPas) = 5 - 8 )
Max. Usable Temperature °C
Long term
Short term
Viscosity
at 1280 °C
lg η ≈ 11.8 dPa s
QSIL GmbH Quarzschmelze Ilmenau
for USA: QSIL Corp.
Gewerbering 8
98704 Langewiesen - Germany
45461 Fremont Blvd. Unit 6
Fremont, CA 94538
contact person:
contact person:
Stefan Voigt
PHONE:
FAX:
E-Mail:
+49 3677 641541
+49 3677 641542
[email protected]
Tobias Jecht
PHONE:
FAX:
E-Mail:
+1 510 657 7094
+1 510 657 3970
[email protected]

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