HIGH PRECISION ± 10 ° INCLINATION SENSOR 1 2 Contact Features Application Fraunhofer Institute for Electronic ▪▪ Single crystal silicon based ▪▪ ASTROSE® project – sensor network for Nano Systems ENAS ▪▪ 2-axis inclination measurement (x and y) Technologie-Campus 3 ▪▪ Ultra low cross axis sensitivity due to 09126 Chemnitz | Germany ▪▪ Leveling instruments HARMS technology ▪▪ Over damped frequency response ▪▪ Platform control and stabilization Contact person ▪▪ Low noise Dr. Steffen Kurth ▪▪ Excellent stability over temperature Phone: +49 371 45001-255 ▪▪ Excellent reliability against overload Email: [email protected] ▪▪ No sticking due to entire dry processing Center for Microtechnologies (ZfM) Description at Chemnitz University of Technology Measurement range Reichenhainer Str. 70 09126 Chemnitz | Germany Contact person Dr. Andreas Bertz Phone: +49 371 531-33129 Email: [email protected] Photo credits: Fraunhofer ENAS, ZfM All information contained in this datasheet is preliminary and subject to change. Furthermore, the described systems, materials and processes are not commercial products. condition monitoring of power lines ▪▪ Geoengineering Typical Unit ± 10 ° 35 Hz Capacitive sensitivity 4.0 fF/mg Full scale capacitive sensitivity ± 700 fF Frequency response Condition - 3 dB Noise performance MEMS element 3.9 μg/√Hz Resolution measured in combination with 12 bit readout circuit < 0.01 ° Non-linearity 0.5 % Cross-axis sensivity 700 to 1 Sensivity temperature dependency without temperature compensation 0 ... 120 ppm/K Dimensions LxW 5 x 3.5 mm