࠙◊✲㒊ࠚ ◊ ✲ ㄢ 㢟 ྡ ࢞ࣛࢫୖ࠾ࡅࡿ㧗ရ㉁ Ge ᒙࡢᏛẼ┦ᡂ㛗 ◊✲௦⾲⪅ྡ ⟃ἼᏛ࣭ᩘ⌮≀㉁⣔࣭㒔⏥ ⸅ ◊✲ศᢸ⪅ྡ ⟃ἼᏛ࣭ᩘ⌮≀㉁⛉Ꮫ◊✲⛉࣭⏣ ㄹᖹ 㸯㸬ࡣࡌࡵ ኴ㝧㟁ụࡢ᭱㧗ຠ⋡ࢆ᭦᪂ࡋ⥆ࡅࡿࢱࣥࢹ࣒ᆺኴ㝧㟁ụࡢపࢥࢫࢺྥࡅࠊ㧗౯࡞ࣂࣝࢡ༢⤖ᬗ Ge ᇶᯈࢆࠊᏳ౯࡞ Ge ⷧ⭷㸭࢞ࣛࢫᇶᯈᵓ㐀⨨ࡍࡿ◊✲ࡀ⾜ࢃࢀ࡚࠸ࡲࡍࠋሗ࿌⪅ࡣࠕAl ㄏ㉳ᡂ㛗ἲࠖ ࠸࠺ᡭἲࢆ⏝࠸ࠊ ࢞ࣛࢫᇶᯈୖ(111)㠃㓄ྥ(99%)ࡋࡓ⢏ᚄ(~100 µm)ࡢ Ge ᒙ(50 nm)ࢆప ᙧᡂ(325Υ) ࡍࡿ⊂⮬ᢏ⾡ࢆಖ᭷ࡋ࡚࠸ࡲࡍ[Appl. Phys. Lett. 101, 072106 (2012)]ࠋᮏ Ge ᒙࢆࢸࣥࣉ࣮ࣞࢺࡋ࡚ග྾ᒙ (~2 µm)ࢆᏛẼ┦ᡂ㛗ࡍࢀࡤࠊࢱࣥࢹ࣒ᆺኴ㝧㟁ụࡢⰋዲ࡞࣎ࢺ࣒ᒙ࡞ࡿࡇࡀᮇᚅࡉࢀࡲࡍࠋ 㸰㸬◊✲⤒㐣 ᮏ◊✲࡛ࡣࠊAl ㄏ㉳ᡂ㛗᮲௳ࡢ᭱㐺(Ge-Al ΰᬗࣛࣥࢻᒙࡢ㝖ཤ)ࢆ⾜ࡗࡓୖ࡛ࠊᐇ㝿ᏛẼ┦ ᡂ㛗ࢆ⾜ࡗ࡚ Al ㄏ㉳ᡂ㛗 Ge ᒙࡢࢸࣥࣉ࣮ࣞࢺࡋ࡚ࡢ᭷ຠᛶࢆᐇドࡍࡿඹࠊኴ㝧㟁ụ≉ᛶࡢホ౯ ᚲ㡲࡞ࡿୗ㒊㟁ᴟ(ୗᆅᑟ㟁⭷)ࢆᙧᡂࡍࡿᢏ⾡ࢆ◊✲ࡋࡲࡋࡓࠋࡉࡽࠊᏳ౯࣭㍍㔞࣭ࣇࣞ࢟ࢩࣈࣝ࡞ࣉ ࣛࢫࢳࢵࢡ(㌾ ᗘ㸸~200 °C)ᇶᯈࡢᒎ㛤ࢆ┠ᣦࡋࠊAl ㄏ㉳ᡂ㛗 ᗘࡢᴟప ࢆ᳨ウࡋࡲࡋࡓࠋ 㸱㸬◊✲ᡂᯝ (1) Al ㄏ㉳ᡂ㛗࠾ࡅࡿ Ge/Al ⭷ཌẚࡢ᭱㐺[ESC J. Solid State Sci. Tech. 2, Q195 (2013)]ࠊ࠾ࡼࡧᡂ㛗 Ge ᒙ ࡢ⾲㠃ࢡ࣮ࣜࢽࣥࢢ(㑅ᢥᛶ࢙࢘ࢵࢺ࢚ࢵࢳࣥࢢ)[Crystal Growth & Design, 13, 3908 (2013)]ࡢᢏ⾡ࢆ☜❧ࡋࠊᡂ 㛗 Ge ᒙ⾲㠃ṧᏑࡍࡿ Ge-Al ΰᬗࣛࣥࢻᒙࢆ㝖ཤࡋࡲࡋࡓࠋ ᮏ Al ㄏ㉳ᡂ㛗 Ge ᒙ(50 nm)ࢆࢸࣥࣉ࣮ࣞࢺࡍࡿࡇ࡛ࠊග྾ Ge ᒙ(300 nm)ࢆᏛẼ┦࢚ࣆࢱ࢟ ࢩࣕࣝᡂ㛗ࡍࡿࡇᡂຌࡋࡲࡋࡓ[J. Crystal Growth 372, 189 (2013)]ࠋࡇࢀࡣࠊAl ㄏ㉳ᡂ㛗 Ge ᒙࡀᴟࡵ࡚ ࡁ࡞⤖ᬗ⢏ᚄ(~100 µm)ࢆ᭷ࡍࡿࡇ㉳ᅉࡋ࡚࠾ࡾࠊࣂࣝࢡ༢⤖ᬗ୪ࡢ≉ᛶࢆⷧ⭷࡛ᐇ⌧ࡍࡿྍ⬟ᛶࢆ♧ ࡍᡂᯝ࡛ࡍࠋ (2) ࢞ࣛࢫᇶᯈࢆᏛⓗᏳᐃ࡞ᑟ㟁⭷(ITO, AZO, TiN)࡛⿕そࡋࠊࡑࡢୖ࡛ Al ㄏ㉳ᡂ㛗ࢆ⾜ࡗࡓ⤖ᯝࠊᡂ 㛗 Ge ᒙࡢ⤖ᬗᛶ(⢏ᚄ࣭᪉)ࡀୗᆅᑟ㟁⭷ࡢ✀㢮ࡼࡗ࡚ⓗኚࡍࡿࡇࡀุ᫂ࡋࡲࡋࡓ[Jpn. J. Appl. Phys. 53, 04EH01 (2014)]ࠋᮏ⌧㇟ࡣࠊGe ࡢ᰾Ⓨ⏕ࡀୗᆅᑟ㟁⭷ୖ࡛㉳ࡁ࡚࠸ࡿࡇࢆ♧၀ࡋ࡚࠸ࡲࡍࠋ ሗ࿌⪅ࡣୗᆅᑟ㟁⭷ࡢ⤖ᬗᛶ╔║ࡋࠊ㐺ṇࡍࡿࡇࡼࡗ࡚ࠊᡂ㛗 Ge ᒙࡢ(111)ඃඛ㓄ྥ⢏ ᚄࡀྍ⬟࡞ࡿࡇࢆ᫂ࡽࡋࠊ≉ᚤ⤖ᬗ TiN ᑟ㟁⭷ࢆ⏝࠸ࡓ㝿࢞ࣛࢫୖྠ➼ࡢ⤖ᬗᛶࡀᚓࡽ ࢀࡿࡇࢆぢฟࡋࡲࡋࡓ[CrystEngComm 16, 2578 (2014)]ࠋ (3) Al ㄏ㉳ᡂ㛗ࡣࠊձGe ཎᏊࡀ AlOx ⏺㠃ᒙࢆ㏻㐣ࡋࠊAl ୰ᣑᩓࡍࡿࠋղGe ⃰ᗘࡀ Al ୰ࡢᅛ⁐㝈ࢆ㉸ ࠼࡚㐣㣬≧ែ࡞ࡿࠋճ㐣࡞ Ge ཎᏊࡀ⤖ᬗ≧ែ࡛ᯒฟࡍࡿࠋࡢ㐣⛬࡛ㄏ㉳ࡉࢀࡲࡍࠋሗ࿌⪅ࡣࠕAl ୰ Ge ཎᏊࢆ࠶ࡽࡌࡵࢻ࣮ࣆࣥࢢࡋ࡚࠾ࡁࠊ㐣㣬࡞ࡿࡲ࡛ࡢ㛫ࢆ▷⦰ࡍࡿࡇࠖ࠾ࡼࡧࠕ⏺㠃ᒙ ࢆ Ge ᣑᩓࡢࡼࡾ㏿࠸ᮦᩱኚ᭦ࡍࡿࡇࠖࡼࡾࠊᡂ㛗 ᗘࢆపῶࡍࡿࡇࢆ᳨ウࡋࡲࡋࡓࠋ ࡑࡢ⤖ᯝࠊAl ୰ࡢ Ge ཎᏊࡢึᮇࢻ࣮ࣆࣥࢢࡼࡾ᰾Ⓨ⏕㛫ࢆ▷⦰࡛ࡁࡿࡇ[This Solid Films (in press)]ࠊࡲࡓ Ge/Al ⏺㠃ࢆ GeOx ᒙࡍࡿࡇ࡛ Ge ࡢᣑᩓࠊࡍ࡞ࢃࡕ᰾Ⓨ⏕᰾ᡂ㛗ࡢ୧᪉ࢆྥୖ࡛ࡁࡿࡇ [Jpn. J. Appl. Phys. 53, 04EH03 (2014)]ࢆ᫂ࡽࡋࡲࡋࡓࠋ୧♫ࡢᡭἲࢆ㔜␚ࡍࡿࡇࡼࡗ࡚ࠊ180 °C ࡶࡢ ప ࠾࠸࡚ࠊGe ⷧ⭷ኴ㝧㟁ụࡋ࡚༑ศ࡞⤖ᬗ⢏ᚄ(ᖹᆒ 12 µm)ࢆ᭷ࡍࡿ(111)㓄ྥ Ge ᒙࢆᙧᡂࡋࡲࡋࡓ [Appl. Phys. Lett. 104, 022106 (2014)]ࠋᡂ㛗 ᗘࠊ⤖ᬗ⢏ᚄࠊ㓄ྥᛶࡢほⅬࡽࠊᚑ᮶ࡢ⤖ᬗᡂ㛗ᡭἲࢆ㥙ࡍ ࡿᡂᯝ࡛࠶ࡾࠊ㛵㐃◊✲ࢆᩘ௳ࡢᏛ㈹(2013 ᖺ⛅ ᛂ≀⌮Ꮫㅮ₇ዡບ㈹ࠊASCO-NANOMAT Best Oral Presentation Award ➼)ᖐ⤖ࡋ࡚࠸ࡲࡍࠋ 㸲㸬ࡲ ࡵ Al ㄏ㉳ᡂ㛗 Ge ᒙࢆᇶ┙ࡋࡓග྾ Ge ᒙࡢගᏛ≉ᛶホ౯ྥࡅࠊᡂ㛗᮲௳ࡢ㐺ṇࠊᏛẼ┦࢚ࣆ ࢱ࢟ࢩࣕࣝᡂ㛗ࡢᐇドࠊୗ㒊㟁ᴟୖࡢ Ge ᙧᡂ➼ࡢᇶ┙◊✲ࢆᵓ⠏ࡍࡿඹࠊࡼࡾᏳ౯࡞ࣉࣛࢫࢳࢵࢡᇶ ᯈࡢᒎ㛤ࢆ᥎㐍ࡋࡲࡋࡓࠋᚋࠊࣉࣛࢫࢳࢵࢡࢆᇶᯈࡋࡓࢱࣥࢹ࣒ᆺኴ㝧㟁ụࡢ㠉᪂ᵓ㐀ࡢᐇ⌧ࢆ ┠ᣦࡋࠊศගឤᗘ ᐃࢆ୰ᚰࡋࡓගᏛⓗ≉ᛶࡢホ౯ࢆ㐍ࡵ࡚࠸ࡁࡲࡍࠋ ᮏඹྠ◊✲ࢆࡈᨭ࠸ࡓࡔࡁࡲࡋࡓᮾᏛ㔠ᒓ◊✲ᡤࡢ㛵ಀྛ῝ࡃឤㅰ⏦ࡋୖࡆࡲࡍࠋ － 189 －
© Copyright 2024 ExpyDoc
