超伝導加速空洞の表面処理

 ◊☻ࡢ㝿ࠊ᭷ẘ࡞஧㓟໬❅⣲࢞ࢫ12ࢆⓎ⏕
㉸ఏᑟຍ㏿✵Ὕࡢ⾲㠃ฎ⌮
ࡍࡿࠋࡇࡢ࢞ࢫࡣ㝖ཤࡀ㞴ࡋ࠸ࠋ
ࡣࡌࡵ࡟
ࢽ࢜ࣈ〇㉸ఏᑟຍ㏿✵Ὕࡣ〇㐀ᚋࠊຍ㏿ᛶ⬟ྥ
ୖࡢࡓࡵ࡟⾲㠃ࢆ㙾㠃࡟㏆࠸≧ែ࡟ࡲ࡛◊☻ࡍ
ࡿᚲせࡀ࠶ࡿࠋ◊☻᪉ἲ࡜ࡋ࡚ࡣࠊࣂࣞࣝ◊☻ἲ
&%3ࠊ໬Ꮫ◊☻ἲ%&3ࠊ㟁ゎ◊☻ἲ(3ࡀ୍
⯡ⓗ࡛࠶ࡿࡀࠊ㏆ᖺࠊ㟁ゎ◊☻ἲࡀ୺ὶ࡜࡞ࡗ࡚
࠸ࡿࠋ>@
ࡇࡇ࡛ࡣࠊ໬Ꮫ◊☻ἲ࡜㟁ゎ◊☻ἲ࡟ࡘ࠸࡚ゎ
)LJ%&3 ᾮ࡜◊☻㏿ᗘ
ㄝࡍࡿࠋ≉࡟㟁ゎ◊☻ἲ࡟ࡘ࠸࡚ࡣ .(. ᶵᵓෆ
࡛⾜ࢃࢀ࡚࠸ࡿฎ⌮ἲ࡟ࡘ࠸࡚⤂௓ࡍࡿࠋ
໬Ꮫ◊☻ἲ㸦%&3㸧
໬Ꮫ◊☻ࡢཎ⌮
໬Ꮫ◊☻࡜ࡣࢽ࢜ࣈ⾲㠃ࢆ◪㓟+12࡛㓟໬
ࡋࠊ㓟໬ࢽ࢜ࣈ1E2⭷ࢆࣇࢵ໬Ỉ⣲㓟+)࡛
⁐ゎࡋ⾲㠃ࢆ◊☻ࡋ࡚࠸ࡃ᪉ἲ࡛࠶ࡿࠋ◊☻㏿ᗘ
ࢆᢚ࠼ࡿ┠ⓗ࡛⦆⾪๣࡜ࡋ࡚ࣜࣥ㓟ࢆຍ࠼ࡓ໬
Ꮫ◊☻%&3%XIIHUHG&KHPLFDO3ROLVKLQJࡀ୍
⯡ⓗ࡛࠶ࡿࠋ%&3 ᾮࡣ ◪㓟㸸ࣇࢵ໬Ỉ
⣲㓟㸸ࣜࣥ㓟ࡢᐜ✚ẚ࡛ ࠶ࡿ࠸ࡣ )LJ%&3 ᚋࡢ 1E ⾲㠃
ࡢ㓄ྜẚࡢࡶࡢࡀከࡃ౑⏝ࡉࢀ࡚࠸ࡿࠋࡇࡢ %&3
ᾮࢆ✵Ὕෆ࡟ὶࡋ⁀㎸ࡴ᪉ἲ࡟ࡼࡾࠊ✵Ὕෆ㠃ࢆ
◊☻ࡋ࡚࠸ࡿࠋ
㓟໬ࢽ࢜ࣈࡢࣇࢵ໬Ỉ⣲㓟࡟ࡼࡿ⁐ゎ཯ᛂᘧ
ࡣ௨ୗࡢࡼ࠺࡟⪃࠼ࡽࢀ࡚࠸ࡿࠋ
㟁ゎ◊☻ἲ㸦(3㸧
㟁ゎ◊☻ࡢཎ⌮
1E2+) Ѝ +1E2) 㸩 +2
㟁ゎ◊☻࡜ࡣࢽ࢜ࣈ✵Ὕᮏయࢆ㝧ᴟࠊ✵Ὕෆ࡟
໬Ꮫ◊☻ࡢ㛗ᡤ࡜▷ᡤ
ᤄධࡋࡓ⣧࢔࣑ࣝࢽ࣒࢘㟁ᴟࢆ㝜ᴟ࡜ࡋࠊ㟁ゎᾮ
㸦㛗ᡤ㸧
ࢆ௓ࡋ࡚┤ὶ㟁ὶࢆὶࡍࡇ࡜࡟ࡼࡾࠊࢽ࢜ࣈ⾲㠃
◊☻㏿ᗘࡀ㏿࠸ࠋ
ࡀ㓟໬ࡉࢀ㓟໬ࢽ࢜ࣈ1E2࡜࡞ࡾࠊࡇࡢ⭷ࢆ
◊☻㏿ᗘࢆᢚ࠼ࡿࡓࡵࣜࣥ㓟ࡢ๭ྜࢆቑࡸࡋ
ࣇࢵ໬Ỉ⣲㓟࡛⁐ゎࡋ⾲㠃ࢆ◊☻ࡋ࡚࠸ࡃ᪉ἲ
࡚౑⏝ࡍࡿࠋ)LJXUH
࡛࠶ࡿࠋࡇࢀࡀ㟁ゎ◊☻(3(OHFWUR3ROLVKLQJ
⿦⨨ࡀ⡆༢࡛࠶ࡿࠋ
࡜࿧ࡤࢀ࡚࠸ࡿࠋ㟁ᅽ್ࡣ 㹼9ࠊ㟁ὶᐦᗘࡣࠊ
㸦▷ᡤ㸧
㹼P$FP ⛬ᗘ࡛࠶ࡿࠋ㟁ゎᾮࡣ ◲㓟
◊☻㏿ᗘࡸ◊☻㔞ࡢไᚚࡀ㞴ࡋ࠸ࠋ
+62࡜ ࣇࢵ໬Ỉ⣲㓟+)ࡢᐜ✚ẚ ࡢ
཯ᛂ⇕࡟ࡼࡾᾮ ࡀୖ᪼ࡋࠊ◊☻㏿ᗘࡀᛴ⃭࡟
ୖ᪼ࡍࡿࡓࡵᾮ ࡢ⟶⌮ࡀ㔜せ࡜࡞ࡿࠋ
ΰྜ⁐ᾮࡀ⏝࠸ࡽࢀࡿࠋ⁐ゎ཯ᛂᘧࡣ %&3 ࡜ྠ
ࡌ࡛࠶ࡿࡀࠊ཯ᛂࡀ㐜࠸࡜⪃࠼ࡽࢀ࡚࠸ࡿࠋ
⾲㠃࡟⢏⏺ࡢพฝࡀ⌧ࢀࡿࠋ)LJXUH
㸵㸫 㟁ゎ◊☻⿦⨨
㟁ゎ◊☻ࡣᶓᆺ (3 ⿦⨨࡛⾜ࢃࢀࡿࡢࡀ୍⯡ⓗ
࡛࠶ࡿࠋ
㸦)LJXUH㸧㏆ᖺ࡟ࡣ⦪ᆺ (3 ⿦⨨ࡶ◊✲
ࡉࢀ࡚࠸ࡿࠋ>@
㟁ゎᾮࡣ✵Ὕෆ࡟ᤄධࡋࡓ⣧࢔࣑ࣝࢽ࣒࢘㟁
ᴟෆࢆ㏻ࡾ✵Ὕෆ࡟౪⤥ࡉࢀࠊ✵Ὕෆࡢ⣙ ࢆ
‶ࡓࡋࠊ୧➃࠿ࡽ࣮࢜ࣂ࣮ࣇ࣮ࣟࡋ࡚ࣜࢨ࣮ࣈᵴ
࡬ᡠࡉࢀࡿࠋ
㸦)LJXUH㸧
ࢽ࢜ࣈ✵Ὕ㸦㝧ᴟ㸧࡜࢔࣑ࣝ㟁ᴟ㸦㝜ᴟ㸧࡟┤
ὶ㟁ᅽࢆ࠿ࡅࠊ㟁ὶࢆὶࡍࡇ࡜࡟ࡼࡾ✵Ὕෆ㒊ࡀ
◊☻ࡉࢀࡿࠋࡇࡢ᫬ࠊ✵Ὕࢆప㏿USP࡛ᅇ㌿ࡉ
ࡏ࡚✵Ὕෆ㠃඲యࢆ◊☻ࡋ࡚࠸ࡃࠋ
㟁ὶ್ࠊ㟁ᅽ್ࠊ✚⟬㟁ὶ್ࠊ✵Ὕෆ ᗘ➼ࡣ
ࣟࢠࣥࢢࢹ࣮ࢱ࡜ࡋ࡚グ㘓ࡉࢀࡿࠋ
㸦)LJXUH㸧
㟁ὶࡣ✵Ὕෆ ᗘ࡟኱ࡁࡃᕥྑࡉࢀࡿࡓࡵࠊ✵
Ὕෆࡢ ᗘኚ໬ࢆぢ࡞ࡀࡽ㟁ᅽࢆኚ໬ࡉࡏࠊ㟁ὶ
ࢆ୍ᐃ࡟ಖࡘࡇ࡜ࡀ኱ษ࡛࠶ࡿࠋࡲࡓࠊ✵Ὕࢆ෭
༷ࡋ ᗘୖ᪼ࢆᢚ࠼ࡿࡇ࡜ࡶຠᯝⓗ࡛࠶ࡿࠋ
)LJ(3 ࡟࠾ࡅࡿ㟁ὶ್ࠊ㟁ὶᐦᗘࠊ✚⟬㟁
ὶ್ࡢኚ໬
)LJ(3 ࡟࠾ࡅࡿ㟁ᅽࠊ◊☻㔞ࠊ✵Ὕෆ ᗘ
ࡢኚ໬
㟁ゎ◊☻ࡢ㛗ᡤ࡜▷ᡤ
)LJ ᶓᆺ (3 ⿦⨨࡟⿦╔ࡋࡓ FHOO ✵Ὕ
)LJ ᶓᆺ (3 ⿦⨨ෆࡢ (3 ᾮࣇ࣮ࣟᅗ
㸦㛗ᡤ㸧
◊☻㔞ࡸ◊☻㏿ᗘࡢไᚚࡀᐜ࡛᫆࠶ࡿࠋ
◊☻㔞ࡣ✚⟬㟁ὶ್࡟ẚ౛ࡋࠊ◊☻㏿ᗘࡣ㟁ὶ
ᐦᗘ࡟㛵ಀࡋ࡚࠸ࡿࡇ࡜࠿ࡽࠊࡇࢀࡽࡢไᚚࡀᐜ
࡛᫆࠶ࡾ෌⌧ᛶࡀ㧗࠸ࠋ
㟁ゎ◊☻ࡋࡓ 1E ⾲㠃ࡣ㙾㠃ᛶࡀඃࢀࡿࠋ
⢏⏺ࡢพฝࡀ⌧ࢀ࡞࠸ࠋ
㸦)LJXUH㸧ࡇࢀࡣ✵Ὕ
ᛶ⬟࡟኱ࡁ࡞ᙳ㡪ࢆཬࡰࡍࠋ
㸦▷ᡤ㸧
⿦⨨ࡀ኱᥃࠿ࡾ࡟࡞ࡿࡓࡵࠊタഛࢥࢫࢺࡀ࠿࠿
ࡿࠋ
%&3 ࡟ẚ㍑ࡋ࡚◊☻㏿ᗘࡀ㐜࠸ࠋ
㸦⣙ ȣPPLQE\P$FPDW.(.67) 㸧
㝜ᴟ࡛◲㓟ࡢ㑏ඖ࡟ࡼࡾỈ⣲ࡀⓎ⏕ࡍࡿࠋ
ࡇࢀࡣࢽ࢜ࣈࡢỈ⣲྾ⶶࡢཎᅉ࡜࡞ࡿࠋࡲࡓࠊ
Ỉ⣲⇿Ⓨࡢ༴㝤ᛶࡀ࠶ࡾ༑ศ࡞ὀពࡀᚲせ࡛࠶
㸵㸫 ࡿࠋ㝜ᴟ࡛Ⓨ⏕ࡋࡓỈ⣲࢞ࢫࡣ㝜ᴟୖ㒊ࢆそ࠺࢝
ࢯ࣮ࢻࣂࢵࢢ࡜࿧ࡤࢀࡿࢸࣇࣟࣥ〇ࡢᕸ࡛ᤕ㞟
ࡉࢀࠊ✵Ὕእ࡟᤼Ẽࡉࢀࡿࠋ
㸦)LJXUH㸧
㝜 ᴟ ࡛ ◲ 㓟 ࡀ 㑏 ඖ ࡉ ࢀ ◲ 㯤 ࢆ ⏕ ᡂ ࡍ ࡿ ࠋ
㸦)LJXUH㸧
ࡇࡢ◲㯤ࡀࢽ࢜ࣈ⾲㠃࡟௜╔ࡋ࡚ởᰁࡢཎᅉ
࡜࡞ࡿࡇ࡜ࡀ࠶ࡿࠋ
(3 ᚋࡢὙίฎ⌮
㉸㡢ἼὙί
(3 ࡟ࡼࡾ⾲㠃◊☻ࡉࢀࡓ✵Ὕࡣࠊࡉࡽ࡟Ὑ๣
ࡸ࢔ࣝࢥ࣮ࣝࢆධࢀ㉸㡢ἼὙίࢆ⾜࠺ሙྜࡀ࠶
ࡿࠋࡇࢀࡣ୺࡟◲㯤ࡢὙίࢆ┠ⓗ࡜ࡋ࡚࠸ࡿࠋ
㸦)LJXUH㸧
)LJ(3 ᚋࡢ 1E ⾲㠃
)LJ ✵ὝෆࡢὙ๣࡟ࡼࡿ㉸㡢ἼὙί
㉸⣧Ỉ㧗ᅽὙί㸦+35㸧
)LJFHOO ⏝ࡢ࢔࣑ࣝ㟁ᴟ࡜࢝ࢯ࣮ࢻࣂࢵࢢ
)LJ(3 ᾮ୰࡛⏕ᡂࡋࡓ◲㯤ࡢ⤖ᬗ
%&3 ࠶ࡿ࠸ࡣ (3 ࡛⾲㠃ฎ⌮ࡉࢀࡓ✵Ὕࡣࠊ⤌
ࡳ ❧ ࡚ ๓ ࡢ ᭱ ⤊ Ὑ ί ࡟ +LJK 3UHVVXUH 5LQVH
㸦+35㸧࡜࿧ࡤࢀࡿ㉸⣧Ỉ࡟ࡼࡿ㧗ᅽὙίࢆ⾜࠺ࠋ
+35 ࡣ 㹼03D ࡢ㧗ᅽ㉸⣧Ỉࢆ✵Ὕෆ㒊࡟
ᄇ㟝ࡋࠊ✵Ὕࢆᅇ㌿ࠊୖୗࡉࡏ 㹼 ᫬㛫Ὑίࡍ
ࡿࠋ㸦)LJXUH㸧ࡇࢀ࡟ࡼࡾ✵Ὕෆ⾲㠃ࡣ᏶඲࡟
Ύί໬ࡉࢀࡿࠋ+35 ᚋࡢ✵Ὕࡣࢡ࣮࣮࣒ࣜࣥࣝෆ
࡛⤌ࡳ❧࡚ᕤ⛬࡟ධࡿࠋࡑࡢࡓࡵࠊ+35 ࡣࢡ࣮ࣜ
࣮࣒ࣥࣝෆࠊ࠶ࡿ࠸ࡣࠊࢡ࣮࣮࣒ࣜࣥࣝ࡟㐃⤖ࡋ
࡚タ⨨ࡉࢀࡿࠋ
㸵㸫 )LJ ✵Ὕࡢ +35
%&3 ࡸ (3 ࡟࠾ࡅࡿὀពⅬ
%&3 ࡸ (3 ࡛ࡣ◪㓟ࡸ◲㓟ࠊࣇࢵ໬Ỉ⣲㓟࡜࠸
࠺ẘ࣭๻≀⸆ရࢆከ㔞࡟౑⏝ࡍࡿࠋ≉࡟ࣇࢵ໬Ỉ
⣲㓟ࡣ≉ᐃ໬Ꮫ≀㉁➨ 㢮≀㉁࡟ࡶᣦᐃࡉࢀࠊࡑ
ࡢ౑⏝ἲࡸಖ⟶ἲ࡟ࡣ≉࡟ὀពࡀᚲせ࡛࠶ࡿࠋ౑
⏝ࡸಖ⟶ࠊᗫᲠ࡟㝿ࡋ࡚ࡣࠊ⸆ရࡢ 0DWHULDO
6DIHW\'DWD6KHHW㸦06'6㸧ࢆཧ⪃࡟ࠊ㐺ษ࠿ࡘ
Ᏻ඲࡞᪉ἲ࡛ྲྀࡾᢅࢃ࡞ࡅࢀࡤ࡞ࡽ࡞࠸ࠋ
ཧ ⪃ ᩥ ⊩ >@ 5)6XSHUFRQGXFWLYLW\9ROXPHϩ 6FLHQFH7HFKQRORJ\DQ$SSOLFDWLRQ
+DVVDQ3DGDPVHH
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