データシート MAG500/MPG500

Gemini MxG50x
INFICON Gemini投ኻኍኪእዊዐ䦮䴉岗ቒᇬሼቜ቉ቑ䦮䴉岗䂻䞷抣⚠ሴ
ቑ⃊┪完❐ቊሼ᧤䔈峀䟂嵚₼᧥ᇭ⮶㺦⦶ሮቬ1x10 – 9 mbar ት岗䂻ቊ
ሰቮቫሩ቎ᇬGemini投ኻኍኪእዊዐ䦮䴉኏ዙንቒቇቑኘዐኒዙኔኖኣ
ኽት♿ቑ⺞⨚孔函቎俟⚗ሺቡሼᇭ䔈峀ት♦ሴቂ怔⇝䭐㺦䆑拙ኲኀዙወ
ኦ岼岗ቒᇬቿኴ዇኎ዙኔዄዐቑ⏷ሲ㠿ሺሧ乓⦁ት栚ሰቡሼᇭቀቑ䕻
呹ቑℳ㙪♾厌ቍኤዂቿወኞዀዐክዙኘዐኒዙዃከአእቒኌ዇ዙከዐኍ
ኒኁኌወት挎ሴ቉ᇬኾዐኣኧዐኖት䂪ቬሺቡሼᇭቀሺ቉ᇬGeminiትቀ
ቑ䲽櫭ቊ㦏ብ㇆┪ቊ俛䂗䤓ቍ䦮䴉岗቎ሺቡሼᇭ
Gemini⑆棿㰄ቒᇬ⸛⏷቎倀⚗ሺቂኤንኜወ榊⷟㳮⣷ቊᇬ䴅㰄ቑ㩣慮
㊶ትኔኖኣኽ倀⚗቎㙟∪ሺቡሼᇭኇኴኔዄዐቑGemini⑆棿㰄ቋ኱዆ከ
ቑ俓ቢ⚗ቲሾቊᇬピㄒሧ乓⦁ቑቿኴ዇኎ዙኔዄዐቊᇬኔዙኽዉኖቍ䲊
嫛ᇬ≰櫋㊶ᇬ⸮䞷㊶ቋ㩣慮㊶ት㙟∪ሺቡሼᇭ
⇑䁡
„
♂ሺሧ䜿⬒ₚቊብ栆⺎✌ት⸮䚍
„
䭐㺦䆑拙ኲኀዙወኦቒ䤉䞮ሺቡሾቶ
„
ኾዐኣኧዐኖኲ዇ዙℳ㙪♾厌ቍኁዐኒዙእ
„
怔⺞⨚岼岗
„
≰櫋㊶ቑ浧ሧሼቓቧሧ䍈䋺
„
功叟歮㊶቎⎹ቯቂኲኀዙኦኖወዙ
„
指㔭♾厌ቍ䂻⸩◧⇜
1
Gemini MxG50x
ṽ㦀
ኜኁኴ
䂻⸩ኔኖኣኽ
MAG50x
MPG50x
Cold cathode ionization
measurement system
(according to the inverted
magnetron principle)
Pirani and cold cathode
ionization measurement
system (according to the
inverted magnetron principle)
䂻⸩乓⦁᧤䴉㺦ᇬ䴡侯᧥
mbar
™೜೚ಹ™೜²
™೜೚… 1000
䂻⸩乓⦁᧤䴉㺦ᇬ䴡侯᧥
Torr
™೜{೔ಹ™೜³)
™೜{೔… 760)
位ㄵ᧤䴡侯᧥
1×10-8 … 1×10-2 mbar
% of reading
30
30
1×10-2 … 100 mbar
% of reading
-
15
ᨺmbar
% of reading
-
50
1×10-8 … 1×10-2 mbar
% of reading
5
-
1×10-8 … 100 mbar
% of reading
-
5
any
any
10 (limited to inert gases
<50°C)
10 (limited to inert gases
<50°C)
+5 ... +55
+5 ... +55
<150
<150
␜䚍㊶(N2)
♥Ⅷሴ㡈⚠
峀⹈⦶┪
bar (absolute)
峀⹈䂸ㄵ
∎䞷䂸ㄵ⛷⦁
°C
኶ዙኌቿኃእኲ዆ዐን቎ርሧ °C
቉
≬ⷧ
°C
-40 ... +70
-40 ... +70
ኲኀ዆ኾዐእ䂸ㄵ
°C
-
120
1×10-7 … 1×10-2 mbar
%
<95 (non-condensing)
<95 (non-condensing)
1×10-8 … 1×10-2 mbar
%
<70 (non-condensing)
<70 (non-condensing)
+14.5 ... +30
+14.5 ... +30
<1
<1
W
<2
<2
AT
<1
<1
㄃㄂⧖ᇬ㡴栢ቑ䦇⺍䄎ㄵ
∪俵榊⦶
኏ዙን⇜函
V (dc)
∪俵榊⦶
዇አኴወ
V (p-p)
∪俵榊⦶
榊┪䀗彊摞
∪俵榊⦶
㘴倩ሼቮኯዂዙኗ
榊⦶乓⦁
2
Gemini MxG50x
ṽ㦀
ኜኁኴ
MAG50x
MPG50x
V
0 ... +10.5
0 ... +10.5
3MAx-00x-0x0N
V
+1.5 ... +8.5
-
3MBx-00x-0x0P
V
-
+1.398 ... +8.598
3MAx-00x-0x0Q
V
+0.667 ... +10
-
3MAx-00x-0x0N
volts per decade
1 (logarithmic)
-
3MBx-00x-0x0P
volts per decade
-
0.6 (logarithmic)
3MAx-00x-0x0Q
volts per decade
1.33 (logaritmic)
-
<+0.5
09.5 ... +10.5
2x10
2x10
>10 (short circuit-proof)
>10 (short circuit-proof)
~1
~1
<10
<10
100
85
ቿኧዊኍ⒉┪
䂻⸩乓⦁
榊⦶⺍䂸ㄵ
ኅ዆ዙ≰⚆
ኅ዆ዙ≰⚆
V
ኅ዆ዙ≰⚆
⒉┪ኁዐ኱ዙኝዐኖ
വ
ኅ዆ዙ≰⚆
弯嘆ኁዐ኱ዙኝዐኖ
Nവ
ኖኣአኴ㉫䷣㣑栢
p = 10-8 mbar
p > 10-6 mbar
኏ዙን巧⒴
ms
ms
Nവ
ኖኣዙኜኖ኱ዐ
኱዆ከ⺑䞷኿ዙኦ
V
-
0 (low)
⑆棿㰄䍈䋺
V
+15 ... +30
-
኱዆ከ⑆棿㰄宖⚗኿ዙኦ
V
-
+15 ... +30 (high)
3Mxx-00x-000x
FCC68, 8-pin, female
FCC68, 8-pin, female
3Mxx-00x-010x
D-sub, 9-pin, male
D-sub, 9-pin, male
8-pin, shielded
8-pin, shielded
榊㺦䤓㘴倩
ኘዐኒዙ኎ዙኳወ
3Mxx-00x-000x
኎ዙኳወ栆
3
Gemini MxG50x
ṽ㦀
ኜኁኴ
MAG50x
MPG50x
50 m ኎ዙኳወ
m
< 50 (8x0.14 mm²)
< 50 (8x0.14 mm²)
75 m ኎ዙኳወ
m
< 75 (8x0.25 mm²)
< 75 (8x0.25 mm²)
100 m ኎ዙኳወ
m
< 100 (8x0.34 mm²)
< 100 (8x0.34 mm²)
300 m ኎ዙኳወ
m
< 300 (8x1.00 mm²)
< 300 (8x1.00 mm²)
╤⇫榊⦶
kV
<3.3
<3.3
浧╤⇫榊㿐
µA
<500
<500
⇝╤⇫榊㿐
µA
<100
<100
3Mx0-00x-0x0x
Ni alloy, AIೣO೤glass,
stainless steels
W, Ni alloy, AIೣO೤glass,
stainless steels
3Mx3-00x-0x0x
Ni alloy, AIೣO೤bstainless
steels
Ni alloy, AIೣO೤bstainless
steels
22.8
22.8
<280
<280
䦮䴉䕅㏚቎ቍቆቂ䓸役
␔捷⇢䳜
cm³
摜摞
DN 25 ISO-KF
g
DN 40 ISO-KF
g
<320
<320
DN 40 CF-F & CF-R
g
<570
<570
IP 40
IP 40
EMC (EN 61000-6-2, EN
61000-6-3), EN 61010-1 &
RoHS
EMC (EN 61000-6-2, EN
61000-6-3), EN 61010-1 &
RoHS
none
none
❐役≬帆ቑ䲚ㄵ
㲨䄥
CE 拸⚗
≬⸗
榊⷟捷❐ቍሺᇭ
榊䄟孔函ቑ㦏⺞榊⦶ቒᇬኘዐኒዙ኎ዙኳወቑ栆ሸ቎㹣
√ሺ቉⬦┯ሸሾ቉ሲቃሸሧᇭ
⑆棿㰄䍈䋺ᇭ
4
Gemini MxG50x
䝇䝨䜰悐⑩
MAG50x
MPG50x
䂻⸩ኞዀዐክዙDN 25 ISO-KF
308-736
308-736
䂻⸩ኞዀዐክዙDN 40 CF-F
308-738
308-738
䂻⸩ኞዀዐክዙDN 40 ISO-KF
308-737
308-737
棿㰄ኞዀዐክዙ
308-677
308-677
MAG50x
MPG50x
211-098
211-098
䜰䜽䝉䝃䝸
Centering ring with fine filter DN 25 KF
⮠㱽
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墥⑩⎹ᶲ䛾䝥䝻䜾䝷䝮䜢䵂埴䛩䜛䛯䜑ˣṽ㦀䛿忂䞍䛺䛟⢱㚜䛥䜜䜎䛩ˤ
RateWatche䛿INFICON䛾⓮㧁䛷䛩ˤ䛭䛾Ṿ䛩䜉䛶䛾⓮㧁䛿ˣ䛭䜜䛮䜜䛾㇨㚱侭䛾屯䓋䛸䛺䜚䜎䛩ˤ
(2014-03)
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