水晶振動子を用いたワイドレンジ荷重センサによるマルチ生体信号計測

水晶振動子を用いたワイドレンジ荷重センサによる
マルチ生体信号計測
○学室崎裕一正新井史人
名古屋大学大学院工学研究科マイクロ・ナノシステム工学専攻
f : Frequency shift
P
Wide-measurement-range load sensors are
desirable in many fields
f =
Fq
P
A
Fq : Force applied to QCR
Sensor sensitivity
Where
Retention A
mechanism
0.3 mN
Stiffness
(Sensor output)
S0 : Stress sensitivity (Constant)

S0

Fq
P
P : Force applied to sensor
 : Area of cross section
 : Transmission efficiency
of force
0.12 mN
60 N

0.06 mN
31 N

10-6
Preloading is needed
150 N

Frequency
[MHz]
Background
10-3
1
Measurement force [N]
16.155
16.150
16.145
0
10
Load [N]
10
Load [N]
Miniaturization is difficult
Result of loading test
Fabricated sensor
Frequency [MHz]
15.7650
Silicon
5 mm
Wiring
16.160
Preloading
Experiment
Bonding area
Quartz Crystal
16.165
0
103
Compact sensor is desired
Concept: Packaging
16.156
16.152
16.148
16.144
16.140
16.136
15.7600
15.7550
15.7500
y = 0.000347 x + 15.745859
R² = 0.998225
15.7450
15.7400
0
Theoretical Maximum load : 130 N
10
20
30
Load [N]
40
50
Detection of biosignals
Quartz Crystal
(a) Cr/Au sputtering
Silicon
(e) Photoresist (OFPR) pattering
(b) Sheet resist laminating
(f) Etching Si (DRIE)
(c) Sheet resist patterning
(g) Photoresist (SU-8 )patterning
(d) Etching Quartz Crystal
(Sand blasting)
(h) Etching Silicon (DRIE)
Frequency [MHz]
Parts breakdown of packaged force sensor
15.7490
15.7485
15.7480
15.7475
15.7470
15.7465
15.7460
15.7455
15.7450
Held breath
~3500 Hz
Lay down
0
10
20 Time [s] 30
40
50
Frequency [MHz]
15.7461
(i) Packaging
Reference
15.7457
20
25
30
35
Time [s]
40
45
50
Conclusions
0.8
max : 45 [MPa]
15.7458
15
1.0
1/n
140
120
100
80
60
40
20
0
[MPa]
15.7459
15.7456
Fabrication process of force sensor
10 N
15.7460
0.5
0.3
0.0
0
5
10
15
Number of leaf springs
20
• Sensor volume was reduced from 226 mm2 to 24.6 mm2 (Volume ratio 1/10)
• The sensitivity of fabricated sensor was 347 Hz/N (theoretical maximum load is 130 N).
• Multiple biological signals (respiration, heartbeat, and posture) were detected in the bed.
 Yuichi Murozaki, et al, “Multiple Biosignals Detection by Wide-range Load Sensor Using Quartz Crystal Resonator”, 1P1X03, Robomech2014
Contact person： Yuichi Murozaki
E-mail: [email protected],
URL: http://www.biorobotics.mech.nagoya-u.ac.jp/
TEL: 052-789-5026, FAX : 052-789-5027
Acknowledgements：
本研究はJST(A-STEP)および独立行政法人科学技術
振興機構ＣＯＩプログラムの支援をうけて行われたもので
す．

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