1.46 THz RTD oscillators with strong back injection from collector Michael Feiginov, Hidetoshi Kanaya, Safumi Suzuki, and Masahiro Asada Tokyo Institute of Technology, Meguro, Tokyo 152-8552, Japan R ESONANT-tunneling diodes (RTDs) are the highestfrequency active semiconductor electronic devices, which exist nowadays. The output power of RTD oscillators is already close to the level required for practical THz applications. RTD oscillators can facilitate sub-THz data transmission, they are also the most compact roomtemperature THz sources and they require low input dc power. All these factors make RTD oscillators unique technology of choice for real-world THz applications. Nevertheless, the parameters of RTD oscillators still need to be improved and understanding of their limitations stays as unresolved problem. It has been shown in the past [1] that the rate of the transient process inside RTDs are fundamentally not limited by the tunnel electron lifetime () in the quantum well (QW) between the RTD barriers, the rate is determined by a certain relaxation time (rel) instead. However, it has been also demonstrated that the RTDs with heavily doped collector, where the depletion region on the collector side is reduced or eliminated, should allow one to achieve negative differential conductance (NDC) at frequencies >>1 and rel>>1 [2]. In the present work we study an ultimate limit of this concept, when the collector is heavily doped and the collector depletion region is fully eliminated. Emitter QW 3.0 1.39 THz, 0.75 W (a) 3.0 2.5 1.46 THz, 0.36 W (b) 2.5 2.0 1.5 1.0 Spectral density, a.u. I. INTRODUCTION even dominant) role in our RTDs. The ratio of the collectorQW and emitterQW injection currents is between 2 (in the positive differential-conductance region) and 0.3-0.7 (in the NDC region). Our RTDs exhibit well pronounced region with NDC, where the peak-to-valley current ratio is close to 2. The RTDs also demonstrate excellent high-frequency performance. Our theoretical analysis shows that rel and in our RTDs is around 30 fs. That indicates that our RTDs still operate in the quasi-static regime (<<1 and rel<<1) even at THz frequencies. Additionally, the transit time through the collector depletion region is fully eliminated in our structures and that also improves their performance at THz frequencies. We integrate our RTDs with slot-antenna resonators, see details in [3]. Depending on the RTD area and antenna dimensions, such oscillators operate at different frequencies. The highest frequency we have achieved is 1.46 THz, see Fig.2. This is the highest published frequency for RTD oscillators nowadays. The 1.46 THz oscillator was operating close to the onset of Spectral density, a.u. Abstract—We are studying resonant-tunneling diodes (RTDs) with strong back injection of electrons from collector into quantum well. Such RTDs exhibit large negative differential conductance and they operate up to 1.46 THz in oscillators. 2.0 1.5 ~10 GHz 1.0 ~25 GHz 0.5 Collector 0.5 0.0 1.35 1.40 1.45 Frequency, THz 1.0 0.0 0.0 j, eV E2 0.5 Quasi-Fermi levels E1 0.0 -10 -5 0 5 10 15 0.4 0.6 0.8 1.0 1.55 1.2 1.4 1.6 Frequency, THz Fig. 2. (a) The emission spectra of two highest-frequency RTD oscillators with the slot antenna length of 12 µm (green) and 16 µm (blue). (b) The inset shows the emission spectra in more details. Quasi-Fermi level -15 0.2 1.50 20 z, nm Fig. 1. Band diagram of our RTDs in the NDC region at 0.2 V. II. RESULTS AND DISCUSSION Heavy collector doping brings our RTDs to operation in a very unusual regime, when the bottom of the ground QW subband is close to and even bellow collector quasi-Fermi level in the whole range of the RTD operating voltages. The band diagram of our RTD in the NDC region of the I-V curve is illustrated in Fig.1. The electron back injection from collector plays essential (and in a wide range of applied biases the oscillations, therefore its emission line was relatively broad (~25 GHz, see Fig.2(b)). The spectra of all our lowerfrequency oscillators had the line width around ~10 GHz, which is close to the resolution limit of our measurement instrumentation. Fig.3 shows the output power of RTD oscillators with different areas of the diodes. We have fabricated two types of oscillators with the slot-antenna length of 12 µm and 16 µm. Fig.4 shows the oscillation frequencies of oscillators with different RTD areas. We also show the corresponding theoretical curves in the figure. We can see that for the same RTD area, the oscillation frequencies of 16 µm antennas are lower than those of 12 µm ones. This is due to the higher 100 1.4 12 m antenna Oscillation frequency, THz Output power, W 16 m antennas 10 12 m antennas 1 1.2 1.0 0.8 16 m antenna 0.6 0.4 0.1 0.4 0.6 0.8 1.0 1.2 1.4 1.6 Frequency, THz Fig. 3. An estimate for the emitted output power of our oscillators with different RTD areas (the measured output power is corrected for the reflection at the lens interfaces and for the spillover of the emitted power). inductance of longer antennas (because of the high capacitive load of RTDs, the oscillators are similar to LC resonant circuits). However, the higher operation frequency has been achieved with longer antenna due to better balance between RTD capacitance and antenna inductance, which leads to higher resonator Q factor at the specific oscillation frequency. We can notice in Fig.3 that the 16 µm antennas provide higher output power. This is due to higher emission efficiency of the longer antennas and larger RTD area at a given oscillation frequency. One can notice in Fig.4 that the theoretical curves deviate from the measured data in two ways. First, the theoretical curves predict oscillation up to lower frequencies than what we measure in experiment. This is probably due to the theoretical model [1,2], which we use for calculation of the RTD capacitance. The RTD capacitance is strongly affected by the space-charge effects, which are responsible for significant increase of capacitance in the NDC region at the frequencies in the range rel<<1 or rel~1. Presently, our model does not take the back injection from collector into account. Therefore, the model is probably overestimates RTD capacitance and, as a consequence, underestimates RTD oscillation frequencies. Second, theoretical curves predict lower (than experimentally observed) oscillation frequencies for the RTDs with larger areas. This is probably due to linear nature of our model [1,2]. When the RTD area is small, the oscillation amplitude (and the output power) is also small. The linear RTD model describes ac RTD characteristics and the oscillation frequencies of oscillators reasonably well in this regime. However, for the RTDs with larger areas, the oscillation amplitude (and the output power) becomes large and the linear ac RTD model gives a more rough approximation for the RTD characteristics. That probably leads to underestimation of the oscillation frequencies of our oscillators with larger-area RTDs. 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 2 RTD area, m Fig. 4. Measured (points) and calculated (lines) oscillation frequencies of 12 µm (green) and 16 µm (blue) slot antennas. III. SUMMARY Our RTDs with heavily doped collector and strong back injection from collector into QW demonstrated a record frequency for RTD oscillators. We show that back injection does not degrade THz performance of RTD oscillators and offers an additional degree of freedom for optimization of the performance of THz RTD oscillators. REFERENCES [1]. M. Feiginov, ”Effect of the Coulomb Interaction on the Response Time and Impedance of the Resonant-Tunneling Diodes,” Appl. Phys. Lett., vol. 76, pp. 2904-2906, 2000. [2] M. Feiginov, ”Displacement currents and the real part of high-frequency conductance of the resonant-tunneling diode”, Appl. Phys. Lett., vol.78, pp. 3301-3303, 2001. [3] M. Feiginov, H. Kanaya, S. Suzuki, and M. Asada, ”Operation of resonanttunneling diodes with strong back injection from the collector at frequencies up to 1.46 THz”, Appl. Phys. Lett., vol.104, pp. 243509, 2014.
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