Equipment Automation

Physical Interfaces and Carriers (PIC), Information&Control (I&C)
and Metrics [Equipment Automation] Technical Committees
SEMICON Europe
Wednesday, 8th October 2014
(10:00 – 13:00)
Alpexpo, Grenoble, France
AGENDA
Equipment Automation Co-chairs:
 Alfred Honold, InReCon (PIC, I&C, Metrics)
 Lothar Pfitzner, FhG-IISB (Metrics)
 Frank Petzold, Trustsec (PIC, I&C)
1.0
Welcome / Call to Order
1.1 Introductions
1.2 Meeting Reminders
1.3 Agenda Review
10:00
2.0
Review and Approval of Previous Meeting Minutes
10:15
3.0
Staff Report
10:25
4.0
Subcommittee & Task Force Reports
4.1 Process Control TF
4.2 International Reticle SMIF Pod and Loadport Interoperability TF
4.3 E48 Revision Activity
10:55
5.0
Liaison Reports
5.1 NA I&C Committee
5.2 Japan I&C Committee
5.3 Taiwan I&C Committee
5.4 Korea I&C Committee
5.5 NA Metrics Committee
5.6 Japan Metrics Committee
5.7 NA PIC Committee
5.8 Japan PIC Committee
11:30
6.0
Ballot Review
6.1 None
12:30
7.0
Old Business
12:35
8.0
New Business
12:45
9.0
Action Item Review
9.1 Open Action Items
9.2 New Action Items
12:50
EU Equipment Automation Committee
Agenda
1
8 October 2014
Grenoble, France
10.0
Next Meeting and Adjournment
10.1 The next meeting of the EU Equipment Automation committee is scheduled
for SEMICON Europa 2015. Check www.semi.org/standards for latest
schedule
EU Equipment Automation Committee
Agenda
2
12:55
8 October 2014
Grenoble, France

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