MSP HIGH THROUGHPUT BATCH SPUTTER TOOL FOR PRECISION OPTICAL COATINGS MSP ENABLE YOUR TECHNOLOGY ROADMAP IN HIGH PRECISION SPUTTERED OPTICAL COATINGS The MSP coater series delivers high precision, optical coatings on glass or polymeric substrates. Evatec “enhanced sputter technology” combined with new intelligent techniques for optical layer control enable high rate deposition, durable, shift free coatings and uniformities <±1% over the largest areas. Achieve thicker layers, better surface quality and tighter process tolerances than ever before. From smart consumer devices to the next generation automotive electronics, the MSP brings you new levels of precision and repeatability for true mass production. Choose MSP for — Combinations of sputter and ion sources opening up new possibilities in optical layer production — Deposition of high precision dielectrics, TCOs and metal layers — Simple adaptation between substrate sizes all the way up to 560 x 310mm without compromise in optical film quality — Direct deposition of fully oxidised films Typical multiple band pass filter application — Low processing temperatures for polymeric or cemented substrates — Temperature shift free coatings with edge repeatabilities <0.2% in mass production INCREASING PRODUCTION OUTPUT & LOWERING YOUR COSTS MSP’s combination of system architecture, cathode and process control technologies is designed for mass production. Swapping between different production processes is easy, with no set up time or test runs. Eliminating internal uniformity masks means no shedding and no particles, simplified maintenance and increased throughput, while Evatec’s Khan system and process controller gives you real time and historical trending run data from 25 user selected values for quality control. Tuneable uniformity technology delivers uniformity over very large areas over extended target lifetimes with simple hinged cathode access for rapid tuning and target exchange 2 Flexible substrate handling around a central drum with easy exchange segments means rapid swap of substrate size and shape Production Proven Khan system controller integrates all aspect of platform, pumping, source and process control seamlessly for 24/7 operation MSP ADVANCED PROCESS CONTROL (APC) FOR THE BEST OPTICAL LAYERS Evatec’s APC technologies for high precision optical coatings enable your technology roadmap. Whether its developing complete new complex processes, or enhancing production yields for lower production costs, MSP with “Optics Toolbox” at its heart keeps your processes on track. “Optics Toolbox” BAK Evaporator Office Thin Film Design Software Delivers fast track process development Optical Head Sender Thin Film Design Test Glass Changer Test glass Monitoring Strategy Generator Process File — Eliminate errors and accelerate development Calotte with Substrate KHAN Coating Process Controller — Integrate all steps from initial theoretical film design to final coating recipe generation Evaporation Sources Receiver GSM1100 Optical Monitoring System Optical Head Sender (in reflection) Coating Tool MSP Sputter Tool Broadband Optical Monitoring In situ reoptimisation Drum with substrates Broadband monitoring for layer termination Optical Head Sputter Sources Sender Receiver Process Start RADIANCE Cluster Tool 1. Layer deposition Sender The reoptimisation loop Deposition Source Receiver Plasma Emission Monitoring — Direct substrate measurement and control Automatic tuning of your thin film recipe during deposition increases your yields for even the most complex layers — Reduce process set up times 2. Check spectrum Optical Head Height Adjustment 3. Recalculate remaining layers or continue without changes — Complex stacks in UV, VIS and NIR — Achieve narrower process tolerances Process Table End with substrates — Recover from unexpected production errors eg power outages Precise control of film stoichiometry for the most repeatable optical properties — Closed loop control at high deposition rates — Full tool integration 100 95 90 85 60 80 75 55 65 60 Transmission [%] 70 50 55 50 45 45 40 35 30 530 540 25 20 15 10 5 0 460 470 480 490 500 510 520 530 540 550 560 570 580 590 600 610 620 630 640 650 660 670 680 Wavelength [nm] Batch 1 A typical triple bandpass filter application Batch 2 Batch 3 Batch 4 Batch 5 Batch 6 Design Process repeatability: T50 ± 0.18% overall, even with nonconsecutive runs. 3 MSP HIGH THROUGHPUT BATCH SPUTTER TOOL FOR PRECISION OPTICAL COATINGS TYPICAL LAYOUT 1 System dimension details on request 2 Door assembly relocates from position 1 to 2 for easy access during loading and maintenance operation CAPACITY Choose from the MSP 1001 or 1501 tools for the same precision in edge position over the whole coating drum Typical System Capacities MSP 1001 (usable area 1m2) MSP1501 (usable area 1.5m2) 100mm diameter 72 120 150mm diameter 36 54 200mm diameter 14 28 Sheet 150 x 180mm 36 54 Sheet 380 x 310mm 9 9 Sheet 560 x 310mm n/a 9 Substrate size Evatec Ltd. Lochrietstrasse 14 CH-8890 Flums Switzerland Tel: + 41 81 720 1080 Fax: + 41 81 720 1081 [email protected] www.evatecnet.com Product descriptions, photos and data are supplied within the brochure for general information only and may be superseded by any data contained within Evatec quotations, manuals or specifications.