11/14/2014 Curriculum Vitae Public Slide 2 13-Nov-2014 Education Work 1989-1994 2000-2002 M.Sc. Solid State Chemistry Post-doc Physics 1995-2000 2002- Ph.D. Applied Sciences Materials specialist µm coatings for nm precision Maarten ter Heerdt Dag van de Oppervlaktetechnologie, Maarssen, 13-Nov-2014 1 11/14/2014 Public Public Slide 3 13-Nov-2014 Slide 4 13-Nov-2014 Contents Short introduction ASML Surface treatments @ ASML Short introduction ASML Special topic: NiP Challenge 2 11/14/2014 Faster, smaller, greener Public Open innovation from design to manufacturing Slide 5 13-Nov-2014 Public Slide 6 13-Nov-2014 Customers Semiconductor producers Co-solution network Mask, Resist Wafer track Wafer processing Supplier and partner network Optics, measurement systems, parts, subsystems Virtual innovation network Academia, technology providers, research institutes 3 11/14/2014 Open innovation from design to manufacturing Customers Public Public Slide 7 13-Nov-2014 Slide 8 13-Nov-2014 Suppliers Co-solution partners Surface treatments @ ASML Technology partners Academia Advanced Research Center for Nanolithography 4 11/14/2014 Surface treatments in use at ASML Public Purpose of coatings Public Slide 9 13-Nov-2014 Slide 10 13-Nov-2014 Prevent Provide • Particle shedding • Cleanliness • Anodization • Corrosion • NiP, passivation • Wear • DLC, Cr, hard anodizing • Galling • Inchromizing, Kolsterizing • Electropolishing • Electrical conductivity • Chromate • Low friction • NiP-PTFE, opalization • Low reflectivity • Black Cr, Black Ni, Bilatal • Color • Lacquer, powder coat 5 11/14/2014 Mirrors: polished to nanometer accuracy Public Public Slide 11 13-Nov-2014 Slide 12 13-Nov-2014 The 30-cm mirrors used in our EUV lithography systems must be flat to less than 2 nm. So if they had the same diameter as the Earth, their tallest mountain would be just 9 cm! Special topic: NiP 6 11/14/2014 NiP, an ASML work-horse Public Specifying electroless Nickel Slide 13 13-Nov-2014 Electroless Nickel is, probably after anodization, the most commonly used surface treatment at ASML. Public Slide 14 13-Nov-2014 Specification of a NiP coating can be done on many levels. • Phosphorous content (low, middle, high) • Coating house Advantages • Availability • Too many to mention ;) • Coating chemistry • Design freedom (no dog-bone effect) • MacDermid • Sufficient corrosion protection @ 12 µm • Atotech • Thicker layers possible (if needed) • Enthone • Etc. So what does ASML do? 7 11/14/2014 ASML specification of electroless Nickel Public Slide 15 13-Nov-2014 Apparently, it is sufficient Public Slide 16 13-Nov-2014 Maybe surprisingly… We hardly specify anything! 8 11/14/2014 But sometimes… Public Slide 17 13-Nov-2014 And then we dive in… Public Slide 18 13-Nov-2014 9 11/14/2014 How far do we go? Public Example 1: outgassing of water Slide 19 13-Nov-2014 Public Slide 20 13-Nov-2014 Problem: for application in vacuum, water outgassing is a critical parameter. • Quite randomly, some products outgas more than others. Possible cause: porosity of NiP-layers (function of supplier / P-content?). Goal of the investigation: find out if P-content matters. spec mid-P high-P mid-P high-P mid-P mid-P high-P high-P 10 11/14/2014 Example 2: adhesive bonding Public Can cleaning before bonding have an effect? Slide 21 13-Nov-2014 Problem: sometimes adhesive bonds fail. Public Slide 22 13-Nov-2014 Yes, it can! Possible cause: oxidation of NiP. Goal of the investigation: find out if P-content matters. This investigation led to the introduction of ASML cleaning standards. 11 11/14/2014 Example 3: more adhesive bonding Public Test results Public Slide 23 13-Nov-2014 Slide 24 13-Nov-2014 Problem: random bond failure under hydrogen exposure. Possible causes: reduction of natural oxide, quality of NiP-layer, Pcontent. Goal of the investigation: find safe design margin and coating spec. S1N S1Y S2N S2Y S3N S3Y SxN = Supplier x, no hydrogen exposure SxY = Supplier x, hydrogen exposure 12 11/14/2014 Test results Public Now what? Slide 25 13-Nov-2014 Public Slide 26 13-Nov-2014 We will do another test, varying: • P-content (check with SEM/EDX) • MTO • Supplier • Hydrogen exposure And do this, again, statistically sound. S1N S1Y S2N S2Y S3N S3Y SxN = Supplier x, no hydrogen exposure SxY = Supplier x, hydrogen exposure 13 11/14/2014 Public Can you help? Slide 27 13-Nov-2014 Public Slide 28 13-Nov-2014 We are looking for the answers to all questions discussed. Why does adhesion on NiP fail? What is the root-cause? Challenge to the audience Why can’t we find this cause (yet)? What do we do wrong? 14 11/14/2014 15
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