ionization technology that works in a vacuum

TECHNICAL INFORMATION
IONIZATION TECHNOLOGY THAT WORKS IN A VACUUM
— VUV IONIZER —
This unique system eliminates static charges by using vacuum ultraviolet light (VUV).
Conventional ionizers cannot neutralize static electricity in a depressurized (vacuum) state because of their mechanism. However,
our VUV ionizer works by directly ionizing residual molecules with
vacuum ultraviolet light and so can eliminate static charges even
in a depressurized environment. Moreover, this VUV ionizer is also effective in removing electrostatic charges from inert gas environments.
Features of this VUV ionizer include no need for air flow and zero
residual voltage potential, and so it delivers a clean and completely static-free environment.
■APPLICATIONS
●Dechucking of electrostatic chucks
●Devices utilizing electron beams (SEM, etc.)
●LCD manufacturing equipment
●Organic EL manufacturing equipment
●Hard disk manufacturing equipment
●Film manufacturing equipment
■SEM IMAGE: COMPARISON OF ELECTROSTATIC CHARGE REMOVAL EFFECT
Before irradiation
After irradiation
■INSTALLATION EXAMPLE
(APPLICATION TO SEM)
L11798
ICF-70
ROTATING
FLANGE
L10706
VACUUM FLANGE
MgF2 LENS
VACUUM
CHAMBER
VACUUM
CHAMBER
LIGHT SOURCE
HEAD HOLDER
SAMPLE
VUV MIRROR
SAMPLE
TLSZC0012EB
■ELECTROSTATIC CHARGE REMOVAL EFFECT
Neutralization time vs. distance
0.7
Measurement conditions
Charged plate: 25 mm
Charged voltage: 1 kV / 100 V
Vacuum level: 1 × 10-2 Pa
Light source: L12542
4.5
NEUTRALIZATION TIME (s)
Neutralization time vs. vacuum level
TLSZB0113EA
4
3.5
3
Positive charged
Negative charged
2.5
TLSZB0114EA
Measurement conditions
Charged plate: 25 mm
Charged voltage: 1 kV / 100 V
Distance between light source output
window and charged plate: 300 mm
Light source: L12542
0.6
NEUTRALIZATION TIME (s)
5
2
1.5
1
0.5
0.4
Positive charged
Negative charged
0.3
0.2
0.1
0.5
0
0
200
400
600
800
1000
1200
0
0.0001
1400
0.001
DISTANCE BETWEEN LIGHT SOURCE OUTPUT WINDOW AND CHARGED PLATE (mm)
0.01
0.1
1
10
VACUUM LEVEL (Pa)
■PRODUCT LINEUP
L12542
L11798
Wide angle irradiation type
L10706
High output type
Close irradiation type
●SPECIFICATIONS
●SPECTRAL DISTRIBUTION
TLSOB0079EB
L12542
L11798
L10706
Approx. 110 W
Approx. 6 W
Approx. 35 W
20 times
10 times
1
Light intensity
(compared to L10706) (compared to L10706)
Cooling method Air cooling by cooling fan Air cooling by cooling fan High-pressure air cooling
Guaranteed life*
2000 hours
1000 hours
1000 hours
Installation
In the air
In the air
In vacuum (in the air)
environment
100
RELATIVE IRRADIANCE (%)
Items
Lamp rating
80
60
40
20
* End of service life is defined as the time when light intensity at 230 nm falls bellow 50 %
of its initial value.
0
100
120
140
160
●DIRECTIVITY (LIGHT DISTRIBUTION)
L12542
L11798
RELATIVE IRRADIANCE (%)
L10706
RELATIVE IRADIANCE (%)
100
80
80
80
60
60
30°
10°
0
0°
-20
-40
-60
40
20°
20
ANGLE
-20°
0°
20
ANGLE
-10°
TLSZB0150EA
HAMAMATSU PHOTONICS K.K.
-100
0
-20
-20°
-40
-30°
240
400
20°
10°
0° ANGLE
-10°
-20°
-60
-80
-80
-80
-100
0
-60
40
20°
10°
-40
-30°
220
60
30°
20
-20
-10°
200
RELATIVE IRADIANCE (%)
100
100
40
180
WAVELENGTH (nm)
TLSZB0099EB
-100
TLSZB0097EB
www.hamamatsu.com
HAMAMATSU PHOTONICS K.K., Electron Tube Division
314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater. N.J. 08807-0910, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218 E-mail: [email protected]
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658 E-mail: [email protected]
France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10 E-mail: [email protected]
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44)1707-294888, Fax: (44)1707-325777 E-mail: [email protected]
North Europe: Hamamatsu Photonics Norden AB: Torshamnsgatan 35 SE-164 40 Kista, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01 E-mail: [email protected]
TLSZ9001E02
Italy: Hamamatsu Photonics Italia S.r.l.: Strada della Moia, 1 int. 6, 20020 Arese (Milano), Italy, Telephone: (39)02-93581733, Fax: (39)02-93581741 E-mail: [email protected]
China: Hamamatsu Photonics (China) Co., Ltd.: B1201 Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 100020, China, Telephone: (86)10-6586-6006, Fax: (86)10-6586-2866 E-mail: [email protected]
NOV. 2014 IP