垂直磁化型磁気トンネル接合素子に向けた bcc 型反強磁性薄膜の開発 169 !25"5/*7# "'5)<;@1 垂直磁化型磁気トンネル接合素子に向けた bcc 型反強磁性薄膜の開発 İ Ñ ¬ƅ * * 白 土 優 Bcc-based antiferromagnetic thin film toward perpendicularly magnetized tunnel junctions ƅ Bcc-based antiferromagnetic thin film toward perpendicularly magnetized tunnel junctions Yu Shiratsuchi * * Shiratsuchiand high integration spintronic devices, we Toward the development of low powerYuconsumption investigated the bcc-based antiferromagnetic thin film. In this scholarship, we focused on the Cr3Al(001) thin film possessing the X-phase. Based on the characteristics of the X-phase; the electrical resistivity and Toward the development of spintronic devices with low power consumption and high integration, we the X-ray diffraction, the formation of the X-phase was investigated for the several growth temperatures. investigated the bcc-based antiferromagnetic thin film. In this scholarship, we focused on the Cr3Al(001) When the growth temperature was below 673 K, the characteristics of the X-phase were observed. For the thin film possessing the X-phase. Based on the characteristics of the X-phase; the electrical resistivity growth temperatures of 773 K and 873 K, the C11b phase was detected by the X-ray diffraction. By using and the lattice spacing, the formation of the X-phase was investigated for the several growth temperatures. the synchrotron X-ray radiation measurements, it was revealed that the X-phase grown at 573 K was single When the growth temperature was below 673 K, the characteristics of the X-phase were observed. For crystalline and the lattice parameter and the axial angle were similar to those of the bulk value. the growth temperatures of 773 K and 873 K, the C11b phase was detected by the X-ray diffraction. By using the synchrotron X-ray radiation measurements, it was revealed that the X-phase grown at 573 K was single crystalline and the lattice parameter and the axial angle were similar to those of the bulk value. CB46:, y quuy\ƆźÜ[źŐXy XÆčZ¶ĬOjÞËŽÕWCiƆy uypy\Ɔô Ĕ[½è¦pyl²ƁOjƂùŋùlĐOjLXIđòMkVDjƇ°¦ıZ\ƆƂŹĽƂŪ¥ġţź¹ƂŊ ùlÆčZáīWJjĺĝ}nuzyƃ!(.4,:0* $(4+53 **,99 3,358> !$!Ƅfy % IQ[¨ WCjƇĺĝÿý»Ėƃ!(.4,:58,909:(4*, !$ »ĖƄłÜ\Ɔ!$! [śųłÜfÛãűĺĝśûŔň[ú׺³N ~ZĬDhkj¡œıYy uyłÜWCjƇ!$ łÜ[ÖĒęü\ƆðĺùêƈŻĺùêƈðĺùêƈÃð ĺùêWCiƆL[łÜW\Ɔ U[ðĺùê[ĺ¼[ÇJ[ĴæıYŮDZgiƆłÜ[źĝÿýIÚ¼OjƇ U[ ðĺùê[ĺ¼[ĴæřïlÚ¼MPjSdZƆÃðĺùêZŸĂOjðĺùê[ĺ¼[ÇJ\ƆăpnyXÉ]k j»ĖZgTVÐàMkVDjƇŨîƆy uypy[Ƃäï¼Ɔ¥ġţź¹¼[SdZƆðĺùê[ĺ¼ ĊÇlƆôĔpy[Ōż±ĊÇHhŌżÔijĊÇXOjLXIøŖXMkƆL[SdƆăpnyeŌżÔijĊÇ [»ĖlĐOjÔijăpnyIøŖXMkjƇôĔ[ !$ łÜW\ƆƂăpnyƆ¥ōĭŌÀƆƂŊƀùĿ[Ř ĦHhƆÃðĺùêXNV !48 ÅŲIĬDhkVJSIƆQ[ĊWƆƂ !$ ĜĿ[ŘĦHhƆ)**f -**[ ż±ÁÜ۵lĐOj 5,!."5, ŀĺĝĂÅŌlyXNSpyŵįIŬdhkVDjƇ!4 ŀà ðĺùÅŲ\Ɔ-**ŰÇZGDVƂDăpnylĐOjSdƆʼnZ\ņĎŰÇùZŮDICiƆĭżėÜćÅ ZŠžlĐOjƇbSƆ!48ƈðĺù¦ĭżZ\ƆÔijĺ¼lŶâOjŌż±ĊÇ[ĭżĺĝĮĊùIŝťMkjLX eŠžXYjƇL[SdƆ)**XÆĚ[ÁÜ۵lĐNƆŌżÔijĊÇ[ƂDăĺĝĮĊùlŝťWJjĉNDà ðĺù¦[ŵįIĞdhkjƇĒĹľW\Ɔ)** ęūlyXOj 8 ÖÃðĺùÅŲZĶIJNƆĨZƆ82 ÅŲZī kj & ĴXÉ]kjĨ÷ıYņĎęūZĶIJNƆ& Ĵ 82ÅŲőŌl§ŕOjLXlIJıXNSƇ 82 ŀÅŲW\Ɔ2 Ņü Ƌ (:Ɔ ¢ ZGDVƆ& ĴXÉ]kjŗ¸ęūIÝÒOj ƃƄƇ& Ĵ 82 [ņĎęūlƆÏ ZĻOƇ& Ĵ 82 \Ɔ 8/53)5/,+8(2 ŀņĎęūlĐOjIƆÏ ZĻOgEZ )** Xſ¤NSÁÜ۵lĐOjƇ& Ĵ 82 ±WƆ8 y \Ɔ)**ZíŒYćÅy äïĠlñüNƆ8 ÁÜŧi[ĺĝ\Ɔ82 ŀÅŲ[WďÛ[ XYjLXIģMkVDj ƇĢïI ¢WCjLXHhƆƂDħßàùeđòWJjƇ 2015 年 3 月 15 日受理 *豊田理研スカラー (大阪大学大学院工学研究科マテリアル生産科学専攻) 3 =?#> 垂直磁化型磁気トンネル接合素子に向けた bcc 型反強磁性薄膜の開発 DB $A+0 ŜĈ§ŕZ\Ɔ´ÜŇq |txƃ!52,*;2(8 ,(3 60:(=> !ƄğlĬDSƇÖĕXNVƆ!."¾ņĎÖĕ lĬDƆ!."ÖĕZ 43 ÀM[ 82 ÅŲőŌl§ŕNSƇ82 Ņü\Ɔ8 X 2 [QkRk[ŕŌŪïZg i·õNSƇbSƆŕŌč[ÖĕĢïl Hh WÚ¼MPƆÖĕĢïlÚ¼MPSŷ[ 82 őŌ[ņĎęū ZUDVĘŚNSƇ & Ĵ 82 \ƆņĎÞıYŗ¸ęūXÃðĺùZgiƆĨ÷ıYźĝ£èùlĻOƇũì[ŲéW\ƆźĝÿýIě[ Ģï©ÝùlĻOƃĢïċZXeYDƆźĝÿýIċOjƄLXZæNVƆ& Ĵ 82 W\ƆźĝÿýI½è¦ıY Ţ[Ģï©ÝùlĻOƃĢïċZXeYDƆźĝÿýI¥OjƄLXIĸhkVDjƃ ƄƇĒĹľW\Ɔ& ŇÍþğ XeZƆźĝÿý[Ģï©Ýùlš_jLXWƆ& Ĵ 82 [ñüZUDVĘŚNSƇ§ŕNSőŌ[źĝÿýģàZ\Ɔ r{voğX 8 psvZgTV (22 łÜñĩZöńºëMkSłÜlĬDSƇ EB8.9% (a) 1010 109 X¯ZƆ82 ƃĀĆ K\Ɔ)** ęūÖĤXNSƄZťÎO 108 xüŴNSØÅƆÏ ZĻNSņĎęūZæOjġĥ¸HhƆ )** ÖĤW[ ƆZťÎOjÍþ u[cIŘģMkj LXIģMkƆÏ ZĻNSņĖ\Ɔ& Ĵ[ñüXķĵNYDƇ bSƆL[ņĖ\ƆőŌ§ŕŭļWŒTS $ Řå[ņĖXe ŎOjƇĊƆüŴĢïl XOjXƆ82 Zť \Ɔ2 wpl 8 X 2 I}Z¿dSņĖƆ) 88 2 lñüNSņĖXNVŞČMkVDj Ƈ Ï )ZƆ§ŕNSőŌ[ ZGKjźĝÿý«XƆźĝÿ ý[ĢïªĆƃ+r+%ƄlĻOƇüŴĢï ¢ZGDVƆ& Ĵ る, BA*3 [ƂD 82 [Ĩ÷WCiƆŢ[Ģï©ÝùX¯ZƆŁ źĝÿý«IŘģMkVGiƆÏ (ZĻNS &$ ģà[ņĖXć ÅOjƇMhZƆąç®lĬDS & ŇÍþģàZgiƆüŴĢïl XNV§ŕNS & Ĵ 82 őŌ\¾ņĎüŴNVGiƆQ[ ėÜàĆXŦřï\ƆQkRkƆ @Ɔ?XYiƆu ZGDV×ÈMkVDj«X ¢[«WŎOjƇLkh[ņ ĖHhƆüŴĢï ¢ZGDVƆŏŤY & Ĵ 82 őŌ[§ ŕIÄŋWCjLXI´HTSƇ 873 K 106 773 K 105 673 K 104 103 573 K 473 K 102 373 K 323 K 100 15 kjƇLk\Ɔ) ZgTVĀĆ KOjLXI³ĔƆL ŅüĜlĐOjŗ¸ęūWCjIƆ82 Cr3Al ZGKj ) ęū[ñü 107 101 ÎOjÍþ uZºFVƆ q ? ŨZÍþ uIŘģM [ņĖ\ƆŭÂ[×ÈXŎNVDjƇYGƆ) ęū\Ɔ [ C11b(002) 30 45 60 75 Diffraction Angle, 2θ/ϖ / degree (b) 0.4 1600 1400 0.0 1200 -0.4 1000 -0.8 800 600 -1.2 dρ/dT at 80 K jÍþ uIŘģMkjƇ& Ĵ 82 őŌI !."Xq |t Intensity / arb. unit lĻOƇüŴĢïI ¢W\ƆÖĕZťÎOjÍþ u X phase(002)* bcc-based index C11b(00 2/3) Ï (ZƆüŴĢïlÚ¼MPV§ŕNSőŌ[ &$ mp Resistivity ρ at 80 K / µΩ⋅cm る 170 400 -1.6 200 0 300 400 500 600 700 800 -2.0 900 Growth Temperature / K DB(a) XRD mpGg^(b)źĝÿýĪXźĝÿ ý[ĢïªĆ[üŴĢïZgjÚ¼ FB(&- üŴĢï Ƌ ZGDVƆ!."œżZ & Ĵ 82 őŌlq |txüŴWJjLXI´HTSƇź ĝÿý«[Ģï©ÝùlÖZƆüŴĢï[ÙºX¯Z & Ĵ[ņĎù\ĄÌMkƆüŴĢï IďůĢïWCjLXI ĻÊMkjƇ§ŕNSőŌ\Ɔ¾ņĎüŴNVGiƆėÜàĆƆŦřï\¯Zu«Ó`aŎNSƇó\Ɔ§ŕN SőŌZÔijĺ¼lĻOðĺùēĈ[āŃX¯ZƆŌżÔijĊÇ[ăpny[įīlIJĀOƇ REFERENCES ƃƉƄ !;88(> 7;020) ƃƊƄ' 5,1,2/,0+, #/>9 $,<
© Copyright 2024 ExpyDoc