垂直磁化型磁気トンネル接合素子に向けた bcc型反強磁性薄膜の開発

垂直磁化型磁気トンネル接合素子に向けた
bcc 型反強磁性薄膜の開発
169
!25"5/*7# "'5)<;@1 垂直磁化型磁気トンネル接合素子に向けた
bcc 型反強磁性薄膜の開発
İ Ñ ¬ƅ * *
白 土 優
Bcc-based antiferromagnetic thin film
toward perpendicularly magnetized tunnel junctions
ƅ
Bcc-based antiferromagnetic thin film toward
perpendicularly
magnetized tunnel junctions
Yu Shiratsuchi
*
*
Shiratsuchiand high integration spintronic devices, we
Toward the development of low powerYuconsumption
investigated the bcc-based antiferromagnetic thin film. In this scholarship, we focused on the Cr3Al(001)
thin film possessing the X-phase. Based on the characteristics of the X-phase; the electrical resistivity and
Toward the development of spintronic devices with low power consumption and high integration, we
the X-ray diffraction, the formation of the X-phase was investigated for the several growth temperatures.
investigated the bcc-based antiferromagnetic thin film. In this scholarship, we focused on the Cr3Al(001)
When the growth temperature was below 673 K, the characteristics of the X-phase were observed. For the
thin film possessing the X-phase. Based on the characteristics of the X-phase; the electrical resistivity
growth temperatures of 773 K and 873 K, the C11b phase was detected by the X-ray diffraction. By using
and the lattice spacing, the formation of the X-phase was investigated for the several growth temperatures. the synchrotron X-ray radiation measurements, it was revealed that the X-phase grown at 573 K was single
When the growth temperature was below 673 K, the characteristics of the X-phase were observed. For
crystalline and the lattice parameter and the axial angle were similar to those of the bulk value.
the growth temperatures of 773 K and 873 K, the C11b phase was detected by the X-ray diffraction. By
using the synchrotron X-ray radiation measurements, it was revealed that the X-phase grown at 573 K was
single crystalline and the lattice parameter and the axial angle were similar to those of the bulk value.
CB46:,
y…”q’u€“‚uy\ƆźÜ[źŐXy…”XÆčZ¶ĬOjÞËŽÕWCiƆy…”€“‚uy„py\Ɔô
Ĕ[½è¦„pyl²ƁOjƂùŋùlĐOjLXIđòMkVDjƇ°¦ıZ\ƆƂŹĽ•ƂŪ•¥ġţź¹•ƂŊ
œùlÆčZáīWJjĺĝ”}‹nuzyŒƃ!(.4,:0* $(4+53 **,99 3,358> !$!Ƅfy…” % IQ[¨
WCjƇĺĝÿý»Ėƃ!(.4,:58,909:(4*, !$ »ĖƄłÜ\Ɔ!$! [śųłÜfÛãűĺĝśûŔň[ú׺³Nˆ
~ZĬDhkj¡œıYy…”€“‚uyłÜWCjƇ!$ łÜ[ÖĒęü\ƆðĺùêƈŻĺùêƈðĺùêƈÃð
ĺùêWCiƆL[łÜW\Ɔ
U[ðĺùê[ĺ¼[ÇJ[ĴæıYŮDZgiƆłÜ[źĝÿýIÚ¼OjƇ
U[
ðĺùê[ĺ¼[ĴæřïlÚ¼MPjSdZƆÃðĺùêZŸĂOjðĺùê[ĺ¼[ÇJ\Ɔžă„pnyXÉ]k
j»ĖZgTVÐàMkVDjƇŨîƆy…”€“‚uy„py[Ƃäï¼Ɔ¥ġţź¹¼[SdZƆðĺùê[ĺ¼
ĊÇlƆôĔ„py[Ōż±ĊÇHhŌżÔijĊÇXOjLXIøŖXMkƆL[SdƆžă„pnyeŌżÔijĊÇ
[»ĖlĐOjÔijžă„pnyIøŖXMkjƇôĔ[ !$ łÜW\ƆƂžă„pnyƆ¥ōĭŌÀƆƂŊƀùĿ[Ř
ĦHhƆÃðĺùêXNV !48 ÅŲIĬDhkVJSIƆQ[—ĊWƆƂ !$ ĜĿ[ŘĦHhƆ)**f -**[
ż±ÁÜ۵lĐOj 5,!."5, ŀĺĝ€”ƒ‘ĂÅŌl‰–yXNS„pyŵįIŬdhkVDjƇ!4 ŀÃ
ðĺùÅŲ\Ɔ-**ŰÇZGDVƂDžă„pnylĐOjSdƆšʼnZ\ņĎŰÇùZŮDICiƆĭżėÜćÅ
ZŠžlĐOjƇbSƆ!48ƈðĺù¦ĭżZ\ƆÔijĺ¼lŶâOjŌż±ĊÇ[ĭżĺĝĮĊùIŝťMkjLX
eŠžXYjƇL[SdƆ)**XÆĚ[ÁÜ۵lĐNƆŌżÔijĊÇ[ƂDžăĺĝĮĊùlŝťWJjĉNDÃ
ðĺù¦[ŵįIĞdhkjƇĒĹľW\Ɔ)** ęūl‰–yXOj 8 ÖÃðĺùÅŲZĶIJNƆĨZƆ82 ÅŲZī
kj & ĴXÉ]kjĨ÷ıYņĎęūZĶIJNƆ& Ĵ 82ÅŲőŌl§ŕOjLXlIJıXNSƇ 82
­ŀÅŲW\Ɔ2 Ņü Ƌ
(:Ɔ ¢™
ZGDVƆ& ĴXÉ]kjŗ¸ęūIÝÒOj ƃƄƇ&
Ĵ 82 [ņĎęūlƆÏ ZĻOƇ& Ĵ 82 \Ɔ
8/53)5/,+8(2 ŀņĎęūlĐOjIƆÏ ZĻOgEZ
)** Xſ¤NSÁÜ۵lĐOjƇ& Ĵ 82 ±WƆ8 y
…”\Ɔ)**ZíŒYćÅy…”äïĠlñüNƆ8
ÁÜŧi[ĺĝ–Œ”€\Ɔ82 ŀÅŲ[›WďÛ[
XYjLXIģMkVDj
Ƈƒ–‘ĢïI ¢˜WCjLXHhƆƂDħßàùeđòWJjƇ 2015 年 3 月 15 日受理
*豊田理研スカラー
(大阪大学大学院工学研究科マテリアル生産科学専攻)
3 =?#> 垂直磁化型磁気トンネル接合素子に向けた bcc 型反強磁性薄膜の開発
DB $A+0 ŜĈ§ŕZ\Ɔ´ÜŇq…|tx–ƃ!52,*;2(8 ,(3 60:(=> !ƄğlĬDSƇÖĕXNVƆ!."¾ņĎÖĕ
lĬDƆ!."Öĕ˜Z 43 ÀM[ 82 ÅŲőŌl§ŕNSƇ82 Ņü\Ɔ8 X 2 [QkRk[ŕŌŪïZg
i·õNSƇbSƆŕŌč[ÖĕĢïl Hh WÚ¼MPƆÖĕĢïlÚ¼MPSŷ[ 82 őŌ[ņĎęū
ZUDVĘŚNSƇ & Ĵ 82 \ƆņĎÞıYŗ¸ęūXÃðĺùZgiƆĨ÷ıYźĝ£èùlĻOƇũì[ŲéW\ƆźĝÿýIě[
Ģï©ÝùlĻOƃĢï˜ċZXeYDƆźĝÿýI˜ċOjƄLXZæNVƆ& Ĵ 82 W\ƆźĝÿýI½è¦ıY
Ţ[Ģï©ÝùlĻOƃĢï˜ċZXeYDƆźĝÿýI¥™OjƄLXIĸhkVDjƃ
ƄƇĒĹľW\Ɔ& ŇÍþğ
XeZƆźĝÿý[Ģï©Ýùlš_jLXWƆ& Ĵ 82 [ñüZUDVĘŚNSƇ§ŕNSőŌ[źĝÿýģàZ\Ɔ
†r€{v†o–ğX 8 ps”Š”vZgTV (22 łÜñĩZöńºëMkSłÜlĬDSƇ EB8.9% (a)
1010
109
X¯ZƆ82
ƃĀĆ K\Ɔ)** ęūÖĤXNSƄZťÎO
108
xŽ‘üŴNSØÅƆÏ ZĻNSņĎęūZæOjġĥ¸HhƆ )** ÖĤW[
ƆZťÎOjÍþ…–u[cIŘģMkj
LXIģMkƆÏ ZĻNSņĖ\Ɔ& Ĵ[ñüXķĵNYDƇ
bSƆL[ņĖ\ƆőŌ§ŕŭļWŒTS $ Řå[ņĖXe—
ŎOjƇ—ĊƆüŴĢïl XOjXƆ82
Zť
\Ɔ2 wp€l 8 X 2 I”}‹Z¿dSņĖƆ) 88 2
lñüNSņĖXNVŞČMkVDj
Ƈ Ï )ZƆ§ŕNSőŌ[ ZGKjźĝÿý«XƆźĝÿ
ý[ĢïªĆƃ+r+%ƄlĻOƇüŴĢï ¢™ZGDVƆ& Ĵ
る,
BA*3 [ƂD
82 [Ĩ÷WCiƆŢ[Ģï©ÝùX¯ZƆŁ
źĝÿý«IŘģMkVGiƆÏ (ZĻNS &$ ģà[ņĖXć
ÅOjƇMhZƆąç®lĬDS & ŇÍþģàZgiƆüŴĢïl
XNV§ŕNS & Ĵ 82 őŌ\¾ņĎüŴNVGiƆQ[
ėÜàĆXŦřï\ƆQkRkƆ
@Ɔ?XYiƆ„‘u
ZGDV×ÈMkVDj«X ¢™[«W—ŎOjƇLkh[ņ
ĖHhƆüŴĢï ¢™ZGDVƆŏŤY & Ĵ 82 őŌ[§
ŕIÄŋWCjLXI´HTSƇ 873 K
106
773 K
105
673 K
104
103
573 K
473 K
102
373 K
323 K
100
15
kjƇLk\Ɔ) ZgTVĀĆ KOjLXI³ĔƆL
ŅüĜlĐOjŗ¸ęūWCjIƆ82
Cr3Al ZGKj ) ęū[ñü
107
101
ÎOjÍþ…–uZºFVƆ
q ? ŨZÍþ…–uIŘģM
[ņĖ\ƆŭÂ[×ÈX—ŎNVDjƇYGƆ) ęū\Ɔ
[
C11b(002)
30
45
60
75
Diffraction Angle, 2θ/ϖ / degree
(b)
0.4
1600
1400
0.0
1200
-0.4
1000
-0.8
800
600
-1.2
dρ/dT at 80 K
jÍþ…–uIŘģMkjƇ& Ĵ 82 őŌI !."Xq…|t
Intensity / arb. unit
‘lĻOƇüŴĢïI ¢™W\ƆÖĕZťÎOjÍþ…–u
X phase(002)*
bcc-based index
C11b(00 2/3)
Ï (ZƆüŴĢïlÚ¼MPV§ŕNSőŌ[ &$ ‡“†mp
Resistivity ρ at 80 K / µΩ⋅cm
る
170
400
-1.6
200
0
300
400
500
600
700
800
-2.0
900
Growth Temperature / K
DB(a) XRD ‡“†mp‘Gg^(b)źĝÿýĪXźĝÿ
ý[ĢïªĆ[üŴĢïZgjÚ¼
FB(&- üŴĢï Ƌ ZGDVƆ!."œż˜Z & Ĵ 82 őŌlq…|txŽ‘üŴWJjLXI´HTSƇź
ĝÿý«[Ģï©ÝùlÖZƆüŴĢï[ÙºX¯Z & Ĵ[ņĎù\ĄÌMkƆüŴĢï IďůĢïWCjLXI
ĻÊMkjƇ§ŕNSőŌ\Ɔ¾ņĎüŴNVGiƆėÜàĆƆŦřï\¯Z„‘u«Ó`a—ŎNSƇŸó\Ɔ§ŕN
SőŌ˜ZÔijĺ¼lĻOðĺùēĈ[āŃX¯ZƆŌżÔijĊÇ[žă„pny[įīlIJĀOƇ REFERENCES
ƃƉƄ !;88(> 7;020) ƃƊƄ' 5,1,2/,0+, #/>9 $,<