http://support.spring8.or.jp/Report_JSR/PDF_IAe_ALL/IAe_10B1945.pdf 2010B1945 BL14B2 XAFS ᐃࡼࡿ a-Se ⭷୰ࡢ⣧≀ࡢᙳ㡪ㄪᰝ XAFS Study on Effects of Impurity Atoms in Amorphous Selenium Films ྂ ┿ᝅ, ᳃⏣ ㅍ, Ώ㇂ ᾈྖ, ᅵᒱ ㈗ᘯ, బ⸨ ᩄᖾ Shingo Furui, Satoru Morita, Koji Watadani, Takahiro Doki, Toshiyuki Sato 㻔ᰴ㻕ᓥὠ〇సᡤ ᇶ┙ᢏ⾡◊✲ᡤ Shimadzu Corporation a-Se ࢆ⏝࠸ࡓ X ⥺᳨ฟჾ࡛Ⓨ⏕ࡍࡿᬯ㟁ὶࡢቑຍせᅉࡘ࠸࡚㸪⣧≀㓟⣲ࡢᙳ㡪ࡀࢃࢀ࡚ ࠸ࡿ[1]㸬ࡇࢀࡲ࡛ᵝࠎ࡞ศᯒᡭἲࢆ⏝࠸࡚ࡁࡓࡀ㸪ࡑࡢ୍➃ࢆ᫂☜ࡍࡿࡇࡀฟ᮶࡚࠸࡞࠸㸬 ᅇ㸪a-Se ࡢᵓ㐀ゎᯒࢆࡋࡓศᯒࢆᐇࡋ㸪ࡇࡢ⣧≀ࡢᏑᅾࢆᥗࡴࡇࢆ┠ⓗࡋࡓ㸬㟁 Ẽ≉ᛶຎࡢཎᅉ࡞ࡿࢹ࣮ࢱࢆᚓࡿࡇࡣ࡛ࡁ࡞ࡗࡓࡀ㸪ᡂ⭷ࡢྛẁ㝵࠾ࡅࡿヨᩱࡽ㸪 ⭷㐣⛬ࢆ᫂ࡽࡍࡿࡢᚲせ࡞ࢹ࣮ࢱࡀᚓࡽࢀࡓ㸬 ࣮࣮࢟࣡ࢻ㸸 a-Se㸪⣧≀㸪X ⥺᳨ฟჾ㸪ᬯ㟁ὶ ⫼ᬒ◊✲┠ⓗ㸸 ᡃࠎࡣ་⒪⏝ X ⥺デ᩿⨨ᦚ㍕ࡍࡿ X ⥺᳨ฟჾࢆ㛤Ⓨࡋ࡚࠸ࡿ㸬᳨ฟჾࡢ X ⥺㟁Ⲵኚᮦᩱ ࡣ㸪ධᑕ X ⥺ࢆ┤᥋㟁Ⲵኚ࡛ࡁ㸪㧗✵㛫ศゎ⬟࡛㧗⢭⣽࡞⏬ീࡀྲྀᚓ࡛ࡁࡿ a-Se ⭷ࢆ⏝ ࡋ࡚࠸ࡿ㸬ࡋࡋ㸪ཌࡉ 1 mm ࡢ⭷ࢆ╔ࡼࡾ㛗㛫࡛ᙧᡂࡍࡿࡓࡵ㸪ࡑࡢᡂ⭷㐣⛬㉳ᅉࡋ ࡓᵝࠎ࡞ၥ㢟㻔ᬯ㟁ὶࡢኚື㸪ᛂ⟅ᛶࡢⰋ࡞㻕ࡀᏑᅾࡍࡿ㸬TEM-EELS ࡼࡾ Se-K ྾➃ࡢㄪ ᰝࢆヨࡳࡓࡀ㸪㟁Ꮚ⥺ࡼࡿ a-Se ࡢࢲ࣓࣮ࢪࡀࡁࡃ㸪ᚤᙅ࡞ಙྕࡋ᳨ฟ࡛ࡁ࡞ࡗࡓ㸬 ᅇ㸪ၥ㢟ࡢ୍ࡘ࡛࠶ࡿᬯ㟁ὶቑຍࡼࡿ㟁Ẽ≉ᛶຎࡢཎᅉ✲᫂ࡢࡓࡵ㸪ࢲ࣓࣮ࢪࡢᑡ࡞࠸ XAFS ࡼࡿゎᯒࢆᐇࡋ㸪⭷୰ྵࡲࢀࡿ⣧≀㻔㓟⣲╔┠㻕ࡢᙳ㡪ࡘ࠸࡚ㄪᰝࡍࡿ㸬 ᐇ㦂㸸 ⣧≀㓟⣲ࡀ a-Se ࡢᵓ㐀࠼ࡿᙳ㡪ࢆㄪᰝࡍࡿࡓࡵ㸪௨ୗࡢ 2 ✀㢮ࡢࢧࣥࣉࣝࢆ⏝ពࡋࡓ㸬 ձ⢊ᮎࢧࣥࣉࣝ㸸ཎᩱ㉳ᅉ࡛࠶ࡿࡢぢᴟࡵࢆࡍࡿࡓࡵ㸪≉ᛶⰋࡢཎᩱⰋዲ࡛࠶ࡗࡓཎᩱࢆ 3 ࣟࢵࢺࡎࡘ⏝ពࡋࡓ㸬ࡲࡓ㸪ᐇ㝿㟁Ẽ≉ᛶⰋⰋࡢ⭷ࡑࢀࡒࢀࢆ⢊ᮎࡋࡓࢧࣥࣉࣝࡶ⏝ព ࡋࡓ㸬a-Se ヨᩱࡣ BN173.5 mg ᑐࡋ Se ⢊ᮎ 5.56 mg ࢆΰྜ㸪SeO2 ヨᩱࡣ BN173.5 mg ᑐࡋ SeO2 ⢊ᮎ 7.82 mg ࢆΰྜࡋ㸪ࣉࣞࢫᶵ࡛࣌ࣞࢵࢺࢧࣥࣉࣝࡋࡓ㸬 ࣌ࣞࢵࢺࢧࣥࣉࣝࡣ PP ⿄ᑒධࡋ㸪 ࢫࣛࢻ࣐࢘ࣥࢺࢭࢵࢺࡋࡓ㸬ղⷧ⭷ࢧࣥࣉࣝ㸸⭷ཌ౫Ꮡࡋ࡚㟁Ẽ≉ᛶࡀࡁࡃኚࡍࡿࡇ ࡀศࡗ࡚࠾ࡾ㸪1 mm ᡂ⭷ึᮇ࠾ࡅࡿⷧ⭷㸪୰ᮇ࠾ࡅࡿⷧ⭷㸪⤊ᮇ࠾ࡅࡿⷧ⭷ࢆ⏝ពࡋ㸪 ᡂ⭷㐣⛬ࡢኚࢆᤊ࠼ࡿࡇࢆヨࡳࡓ㸬ⷧ⭷ࡣ࢝ࣉࢺࣥࢩ࣮ࢺୖᡂ⭷ࡋ㸪⭷ཌࡣ 30㹼40 μm ࡛ ࠶ࡗࡓ㸬㏱㐣ἲࡼࡿ ᐃ௨እ㸪⭷⾲㠃㏆ഐࡢሗࢆᚓࡿࡓࡵ㸪㌿㟁Ꮚ㔞ἲࢆ⾜ࡗࡓ㸬 XAFS ᐃࡢྛࣃ࣓࣮ࣛࢱࢆ⾲ 1 ♧ࡍ㸬 ⾲ 1㸬XAFS ᐃࡢྛ✀タᐃ್ ᐃࡣࢧࣥࣉ࣮ࣝ࢜ࢺࢳ࢙ࣥࢪ࣮ࣕࢆ⏝ࡋ㸪⮬ື࡛⾜ࡗࡓ㸬 ྛ✀ࣃ࣓࣮ࣛࢱࡣ௨ୗࡢ㏻ࡾ࡛࠶ࡿ㸬 ࣜࣥࢢ࣮ࣔࢻ ᐃ࣮ࣔࢻ ᳨ฟ࢞ࢫ ගᏛ⣔ 11bunch train*29 㻔C-mode㻕 ㏱㐣ἲཬࡧ㌿㟁Ꮚ㔞ἲ㸪Quick Scan N2㻔75%㻕㸩Ar㻔25%㻕㸸ධᑕഃ Ar㻔100%㻕㸸᳨ฟഃ 2 ⤖ᬗ Si㻔111㻕㠃㸪࣑࣮ࣛ3.5mrad㸪ș8.62deg 4DSlit:㸸1.0 㻔H㻕 X 5.0 㻔W㻕 mm2 ᐃ⣔ Scan start㸸9.3deg㸪end㸸8.0deg㸪step㸸㸫0.00026deg Dwell time㸸50msec㸪total point㸸5000points㸪Theta speed㸸425pulse/sec ⤖ᯝ࠾ࡼࡧ⪃ᐹ㸸 ㌿㟁Ꮚ㔞ἲ࡛ࡣ㸪ఱࢀࡢ⤖ᯝࡶ࡚ྠࡌ࡞ࡾ㸪ᕪࡀࡃぢฟࡏ࡞ࡗࡓ㸬௨ୗ㏱㐣ἲ ࡼࡿ ᐃ⤖ᯝࡘ࠸࡚㏙ࡿ㸬 ᅗ 1 ཎᩱ⢊ᮎヨᩱ㸪≉ᛶࡢⰋྰࢆุᐃࡋࡓ⭷ࡽస〇ࡋࡓ⢊ᮎヨᩱࡢ Se-K ྾➃㏆ഐ࠾ ࡅࡿ ᐃ⤖ᯝࢆ♧ࡍ㸬ࣜࣇࣞࣥࢫࡋ࡚ SeO2 ࢆ ᐃࡋࡓ㸬㓟⣲ࡼࡿᙳ㡪ࡀᏑᅾࡍࡿሙྜ㸪 ྾➃ࡢ࢚ࢿࣝࢠ࣮ࢩࣇࢺࡀほ ࡉࢀࡿࡇࡀணࡉࢀࡿࡀ㸪᪉ࡶࢩࣇࢺࡣぢࡽࢀࡎ㸪XAFS ᐃ࡛ࡢཎᩱࣟࢵࢺཬࡧ⭷ࡢⰋྰぢᴟࡵࡣᅔ㞴࡛࠶ࡿุ᩿ࡋࡓ㸬 Ⰻ⭷ 4 Normalized Absorbance䠄a.u.䠅 Normalized Absorbance 䠄a.u.䠅 Ⰻཎᩱ 3 Ⰻཎᩱ 2 Ⰻཎᩱ 1 Ⰻရཎᩱ 3 Ⰻရཎᩱ 2 Ⰻရཎᩱ 1 Ⰻ⭷ 3 Ⰻ⭷ 2 Ⰻ⭷ 1 Ⰻရ⭷ 2 Ⰻရ⭷ 1 SeO2 SeO2 12640 12645 12650 12655 12660 12640 12645 12650 Excitation Energy䠄eV䠅 12655 12660 Excitation Energy䠄eV䠅 ᅗ 1㸬ཎᩱ⢊ᮎヨᩱ⭷ࡽస〇ࡋࡓ⢊ᮎヨᩱࡢ XAFS ᐃ⤖ᯝ Normalized Absorbance ȝ䠄E䠅 ᅗ 2 ᡂ⭷ึᮇࡽ୰ᮇ㸪⤊ᮇ࠾࠸࡚㸪30㹼40 μm ⛬ᗘᢳฟࡋ࡚ᡂ⭷ࡋࡓࢧࣥࣉࣝࡢ ᐃ⤖ ᯝࢆ♧ࡍ㸬㠀ᖖᚤᑠ࡛࠶ࡿࡀ㸪ཎᩱࡸ⭷యࡢ⢊ᮎࡢ ᐃ᳨࡛ฟࡉࢀ࡞ࡗࡓ࢚ࢿࣝࢠ࣮ࢩࣇ ࢺࢆ᳨ฟࡍࡿࡇࡀ࡛ࡁࡓ㸬ᡂ⭷ึᮇࡽ୰ᮇ㸪⤊ᮇࡅ࡚㸪Se-K ྾➃ࡢ࢚ࢿࣝࢠ࣮ࡀᚎࠎ 㧗࢚ࢿࣝࢠ࣮ഃࢩࣇࢺࡋ࡚࠾ࡾ㸪Se ࡢ౯ᩘࡀቑຍࡍࡿ᪉ྥ㸪ࡍ࡞ࢃࡕ㓟ࡀᚎࠎ㐍⾜ࡋ࡚ ࠸ࡿࡇࡀࢃࢀࡿ㸬ࡇࡢ⤖ᯝࡣ㸪㟁Ẽ≉ᛶࡀ⭷ཌ౫Ꮡࡋ࡚ຎࡍࡿ⤖ᯝ୍⮴ࡋ࡚࠾ࡾ㸪㓟 ⣲ࡢᙳ㡪ࢆࡗ࡚࠸ࡿูࡢᩥ⊩[2]ෆᐜࡶ୍⮴ࡍࡿ㸬ᅗ 2 ࡢྑᅗ♧ࡉࢀࡓࡼ࠺Ⰻ⭷࡛ࡣ୰ ᮇ࡛ࡼࡾ㧗࢚ࢿࣝࢠ࣮ഃࢩࣇࢺࡋ࡚࠾ࡾ㸪ᡂ⭷㐣⛬࡛⭷㉁ࡀᚎࠎኚࡋ࡚࠸ࡿ⪃࠼ࡽࢀࡿ㸬 Normalized Absorbance ȝ䠄E䠅 Ⰻ⤊ᮇ Ⰻ୰ᮇ Ⰻึᮇ Ⰻရ⤊ᮇ Ⰻရ୰ᮇ Ⰻရึᮇ SeO2 SeO2 12640 12645 12650 Excitation Energy䠄eV䠅 12655 12660 Ⰻရึᮇ Ⰻရ୰ᮇ Ⰻရ⤊ᮇ Ⰻึᮇ Ⰻ୰ᮇ Ⰻ⤊ᮇ SeO2 12650 12651 12652 12653 12654 12655 Excitation Energy䠄eV䠅 ᅗ 2㸬ᡂ⭷ึᮇ㸪୰ᮇ㸪⤊ᮇᙧᡂ⭷࠾ࡅࡿ XAFS ᐃ⤖ᯝ ᚋࡢㄢ㢟㸸 ᅇࡢ ᐃࡼࡾ㸪⢊ᮎࢧࣥࣉ࡛ࣝࡣ࡞ࡃ㸪ᡂ⭷ࡢྛẁ㝵ࢆᢳฟࡋࡓⷧ⭷ࢧࣥࣉࣝࡢศᯒࡀ᭷ ຠ࡛࠶ࡿࡇࡀศࡗࡓ㸬ᅇ☜ㄆࡉࢀࡓᡂ⭷୰ᮇࡢ࢚ࢿࣝࢠ࣮ࢩࣇࢺࡢᕪࡀ≉ᛶࡢⰋྰࢆ⌧ࡋ ࡚࠸ࡿࡢࢆ᫂ࡽࡍࡿࡓࡵ㸪ྠᵝࡢࢧࣥࣉࣝࢆస〇ࡋ㸪ᗘ XAFS ᐃࢆヨࡳࡿ㸬ࡲࡓ㸪ู ศᯒࡶά⏝ࡍࡿࡇ࡛ Se-K ྾➃࡛ࡢ࢚ࢿࣝࢠ࣮ࢩࣇࢺࡢཎᅉࢆ᫂ࡽࡋ㸪ᡂ⭷㐣⛬ࡢ࣓࢝ࢽ ࢬ࣒ཬࡧⰋཎᅉࢆゎ᫂ࡋ࡚࠸ࡃணᐃ࡛࠶ࡿ㸬 ཧ⪃ᩥ⊩㸸 [1] Ọ┠ᏹ, Ricoh Technical Report NO.10, DECEMBER, 23-29, 㻔1983㻕. [2] ┿, ≉㛤 2008-227036
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