[3D-09819$(WJ0313E)SAL38C2HV] A3横, 1/3

270
Reference drawing
240
20
* This drawing may be revised
without any advance notification.
30
0
a.
20
0
Di
a.
Di
Handle
(Dismount the handle
after installation)
59
Dia.
160
50
* When designing the equipment layout based on
this drawing, please confirm with JEL in advance.
2
108
208
Wafer contact level is the same.
(62)
4
1
53.5
390
Sectional view of suction pad
I/O
171
205
Parallel I/O connector
RS485
VAC.
LEAK
DC24V
1
2
RS232C
Vacuum supply port
Quick coupling Dia.6
Vacuum break port
Quick coupling Dia.6
10
Pressure sensor
Direction of exhaust
RS232C serial communication connector
RS485 serial communication connector (2 pcs.)
Power supply connector (24V DC)
MODEL
型式
本図の内容は、株式会社ジェーイーエルが所有権を有するもので機密扱いとなっております。許可なく複写したり、第三者にこれを公開することのないようにお願い致します。
This drawing and the information contained in it are confidential and property of JEL Corporation.
Thus cannot be copied or disclosed to a third party without the consent of JEL Corporation.
JEL CORPORATION
JEL Corporation
ISSUED NO.
管理番号
SAL38C2HV
WJ0313E
SCALE
尺度
1/3

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