⾗ᢱ㪎㪄㪈㪄㪈㪄㪘䋺䊒䊨䉳䉢䉪䊃䈱⚦⺑⾗ᢱ㩷 㩷 䊋䉟䉥᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷䋨㐿 䋩㩷 㐿 䇸⇣ಽ㊁Ⲣวဳᰴઍ䊂䊋䉟䉴ㅧᛛⴚ㐿⊒䊒䊨䉳䉢䉪䊃䇹㩷 㩷㩷 ᓟ⹏ଔಽ⑼ળ⾗ᢱ䋷䋭䋱䋭䋱㪘㩷 㩷 䊒䊨䉳䉢䉪䊃䈱⚦⺑⾗ᢱ㩷 䊋䉟䉥᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷㩷 㩷 ᐔᚑ䋲䋵ᐕ䋵䋲䋴ᣣ㩷 ⁛┙ⴕᴺੱ㩷 ᣂ䉣䊈䊦䉩䊷䊶↥ᬺᛛⴚ✚ว㐿⊒ᯏ᭴㩷 ᛛⴚ㐿⊒ផㅴㇱ㩷 ᬺේ★㩷 㸋㪄㽲㪄㪘㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷㩷 䋱㪆䋳䋳㩷 㐿 㪣㫀㪽㪼㪙㪜㪘㪥㪪䈏ᵈ⋡䈚䈢䊋䉟䉥䊶ᯏ᧚ᢱ㩷 㩿㪈㪀⢽⾰㪉㊀⤑㩷 㸢㩷 㜞ᗵᐲൻቇ㊂䉶䊮䉰䈻ᔕ↪㩷 㩷 㩷 㩿㪉㪀䊊䉟䊄䊨䉭䊦㩷 㸢㩷 ၒ䉄ㄟ䉂䊂䊋䉟䉴⇇㕙䈻↪㩷 㩷 㩷 㩷 㩿ⴊ♧୯䉶䊮䉰䈭䈬㪀㩷 㩷 㩿㪊㪀⚦⢩㩷 㸢㩷 ↢⚵❱䈱㪊ᰴరᒻᚑ㩷 㩷 㩷 㩷 േ‛ታ㛎䈏ⷐ䉌䈭䈇ഃ⮎䊒䊨䉶䉴㩷 ᬺේ★㩷 㸋㪄䋲㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 䋲㪆䋳䋳㩷 㐿 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷㩷 㪉㪇㪉㪌ᐕ䈱␠ળ䋨ᣣᧄቇⴚળ⼏䋩 䉦䊒䉶䊦㪈㍤䈪ኢ䈭䈏䉌ஜᐽ⸻ᢿ㩷㩷 䊶ಽሶ䉶䊮䉰 䊶ၒ䉄ㄟ䉂䊂䊋䉟䉴 䊶⤳ེ䊝䊂䊦 ኅᐸ䈮䈍䈔䉎ஜᐽ▤ℂ䈫⇣Ᏹᤨ䈱⸻ᢿ䉲䉴䊁䊛䋨㪉㪇㪈㪉ᐕ㪆㪉㪇㪈㪏ᐕ䋩㩷㩷 䊙䉟䉪䊨䊙䉲䊮䈮ၮ䈨䈒ዊဳஜᐽ▤ℂ䊂䊋䉟䉴䋨㪉㪇㪈㪌ᐕ㪆㪉㪇㪉㪌ᐕ䋩㩷㩷 㘩‛䈱ోᖱႎ䉕৻⋡䈪䉨䊞䉾䉼㩷㩷 䈏䉖䊶ᔃ╭᪪Ⴇ䊶⣖තਛ䉕స㩷㩷 ੱ䈱⾰䈮ว䈦䈢 ↪䈱ዋ䈭䈇䈏䉖ᴦ≮ 䋨㪉㪇㪈㪋ᐕ㪆㪉㪇㪉㪊ᐕ䋩㩷㩷 ↢㞲㘩ຠ䈱㞲ᐲ䈏ಽ䈎䉎㩷 ኅᐸ↪㞲ᐲᬌᩏེ䋨㪉㪇㪈㪉ᐕ㪆㪉㪇㪈㪏ᐕ䋩㩷㩷 ᬺේ★㩷 㸋㪄䋲㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷㩷 䋳㪆䋳䋳㩷 㐿 㪣㪠㪝㪜⎇ⓥ㗄⋡䈫⥄ਥ⋡ᮡ 㽲⢽⾰㪉㊀⤑ቯ⇇㕙ᒻᚑ䊒䊨䉶䉴 䇼⥄ਥ⋡ᮡ䇽㩷 䊶㪉㪋ᤨ㑆એቯ䈭⢽⾰⤑ᒻᚑ䊒䊨䉶䉴䈱⏕┙䋨ᦨ⚳䋩㩷 㩷 㩷 㽳䊊䉟䊄䊨䉭䊦ቯ⇇㕙ᒻᚑ䊒䊨䉶䉴㩷 䇼⥄ਥ⋡ᮡ䇽㩷 䊶㪊䊱એౝ䈪ቯ䈚䈩ᯏ⢻䈜䉎䋨ᦨ⚳䋩㩷 㩷 㩷 㽴⚦⢩䈱㪊ᰴర䈻䊁䊨⚵❱᭴ㅧᒻᚑ䊒䊨䉶䉴㩷 䇼⥄ਥ⋡ᮡ䇽㩷 䊶⢙▤䉕䊂䊋䉟䉴䈮ᒻᚑ䈚䇮⮎‛േᘒ⸘᷹䉕น⢻䈫䈜䉎䊒䊨䉶䉴䋨ᦨ⚳䋩㩷 ᬺේ★㩷 㸋㪄䋲㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 䋴㪆䋳䋳㩷 㐿 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩿㪈㪀䊋䉟䉥䊶䊅䊉⇇㕙Ⲣว䊒䊨䉶䉴ᛛⴚ㩷 ⤑䇮⤑䉺䊮䊌䉪⾰ Lipid membrane, 5nm Membrane protein (MP) cell ᬺේ★㩷 㸋㪄䋹㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩿㪈㪀䊋䉟䉥䊶䊅䊉⇇㕙Ⲣว䊒䊨䉶䉴ᛛⴚ㩷 㩷㩷 䋵㪆䋳䋳㩷 㐿 ᚢ䋺24ᤨ㑆ቯ䈚䈩ᯏ⢻䈜䉎⤑䉕䉎 Oil w/ lipid water ᬺේ★㩷 㸋㪄䋲㩷 water 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 䋶㪆䋳䋳㩷 㐿 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩿㪈㪀䊋䉟䉥䊶䊅䊉⇇㕙Ⲣว䊒䊨䉶䉴ᛛⴚ㩷 㩷㩷 䊙䉟䉪䊨ᵹ〝䈪⤑䉕ᄢ㊂䈮ቯᒻᚑ Step 2 Step 1 Step 3 Top veiw Chamber water oil w/ lipids water Main Channel ᬺේ★㩷 㸋㪄䋱䋱㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩿㪈㪀䊋䉟䉥䊶䊅䊉⇇㕙Ⲣว䊒䊨䉶䉴ᛛⴚ㩷 㩷㩷 䋷㪆䋳䋳㩷 㐿 䉧䊤䉴ၮ᧼ടᎿ䈮䉋䉍24ᤨ㑆ᒻᚑ䈮ᚑഞ䋣 ᬺේ★㩷 㸋㪄䋱䋱㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 䋸㪆䋳䋳㩷 㐿 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩿㪈㪀䊋䉟䉥䊶䊅䊉⇇㕙Ⲣว䊒䊨䉶䉴ᛛⴚ㩷 㩷㩷 ⤑䉺䊮䊌䉪⾰䉕ዉ䈚䇮㔚᳇⸘᷹䉅น⢻ ᬺේ★㩷 㸋㪄䋴䋰㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 㩷㪭㪄㪋㩷 㩷 㩷㽲䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷㩷 㩷 㩷 㩷 ᧪䋺䋱ಽሶ䈪䉅⼂䈪䈐䉎 䋹㪆䋳䋳㩷 㐿 㜞ᗵᐲ䊂䊋䉟䉴 䊶㜞ᗵᐲ䉧䊮䊙䊷䉦ᬌ䊂䊋䉟䉴 䊶ഃ⮎䉴䉪䊥䊷䊆䊮䉫䊂䊋䉟䉴 䊶㜞ᗵᐲ䇸ⅣႺ䇹䉶䊮䉰䊷䊂䊋䉟䉴 ᬺේ★㩷 㸋㪄䋵䋴㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 䋱䋰㪆䋳䋳㩷 㐿 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷㩷 㪣㫀㪽㪼㪙㪜㪘㪥㪪䈏ᵈ⋡䈚䈢䊋䉟䉥䊶ᯏ᧚ᢱ㩷 㩿㪈㪀⢽⾰㪉㊀⤑㩷 㸢㩷 㜞ᗵᐲൻቇ㊂䉶䊮䉰䈻ᔕ↪㩷 㩷 㩷 㩿㪉㪀䊊䉟䊄䊨䉭䊦㩷 㸢㩷 ၒ䉄ㄟ䉂䊂䊋䉟䉴⇇㕙䈻↪㩷 㩷 㩷 㩷 㩿ⴊ♧୯䉶䊮䉰䈭䈬㪀㩷 㩷 㩿㪊㪀⚦⢩㩷 㸢㩷 ↢⚵❱䈱㪊ᰴరᒻᚑ㩷 㩷 㩷 㩷 േ‛ታ㛎䈏ⷐ䉌䈭䈇ഃ⮎䊒䊨䉶䉴㩷 ᬺේ★㩷 㸋㪄䋵䋶㩷 䋱䋱㪆䋳䋳㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 㐿 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪉㪀䊋䉟䉥㜞ᰴ᭴ㅧᒻᚑ䊒䊨䉶䉴ᛛⴚ㩷 㩷㩷 ᘉኄ͌ȢȋǿȪȳǰ ᘉ෩ӕ ȇȐǤǹ̊. terumo Ҟ؈NJᡂLj ȇȐǤǹ̊. MiniMed ܦμ؈NJᡂLj ஓƷȇȐǤǹ ᡂ ؈NJᡂLjǻȳǵȸ ȇȐǤǹ ٳᚇ Ӗ̮ೞ ̛᙭᫁ࡇ 4᳸5 ᧓ (ᤆƷᧈƞ:13 mm, ࢲٳ:0.60 mm) 3~7 ଐƴ1ׅ ǻȳǵȸ ؈NJᡂLjƷLj ย᧓ܭᨠ 4᳸5 ᧓ 5Ў ࠝȢȋǿȪȳǰ ᬺේ★㩷 㸋㪄䋵䋶㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 䋱䋲㪆䋳䋳㩷 㐿 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪉㪀䊋䉟䉥㜞ᰴ᭴ㅧᒻᚑ䊒䊨䉶䉴ᛛⴚ㩷 㩷㩷 ᚢ䋺ౝၒ䉄ㄟ䉂ဳ㐳ᦼⴊ♧୯䊝䊆䉺䊥䊮䉫㩷 Glucose-responsive Fluorescent dye Glucose + Glucose - Glucose Glucose-responsive Fluorescent hydrogel beads ds Transdermal rmal detec detection ction Blood B lood vvessels essels Syringe Injection Inje ection PNAS 2010 ᬺේ★㩷 㸋㪄䋵䋹㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 㪪 䉶䊮䉺䊷 ᖩήDzȫȓȸǺٳᚇƱቩࢲЎࠋ 䋱䋳㪆䋳䋳㩷 䋱 䋳㪆䋳䋳 䋳 㐿 avg= 130Pm 100mm 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 䋱䋴㪆䋳䋳㩷 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪉㪀䊋䉟䉥㜞ᰴ᭴ㅧᒻᚑ䊒䊨䉶䉴ᛛⴚ㩷 㩷㩷 㐿 䉫䊦䉮䊷䉴ᔕ╵⢻ ᬺේ★㩷 㸋㪄䋶䋰㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪉㪀䊋䉟䉥㜞ᰴ᭴ㅧᒻᚑ䊒䊨䉶䉴ᛛⴚ㩷 㩷㩷 䋱䋵㪆䋳䋳㩷 㐿 ৻䊱ᓟ䈱⁁ᘒ ᬺේ★㩷 㸋㪄䋶䋰㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 䋱䋶㪆䋳䋳㩷 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪉㪀䊋䉟䉥㜞ᰴ᭴ㅧᒻᚑ䊒䊨䉶䉴ᛛⴚ㩷 㩷㩷 㐿 䊎䊷䉵䈎䉌䊐䉜䉟䊋䊷䈻 Excitation light Syringe Tweezers Injection Transdermal detection Removal Hydrogel fiber Glucose PNAS 2011 ᬺේ★㩷 㸋㪄䋵䋷㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪉㪀䊋䉟䉥㜞ᰴ᭴ㅧᒻᚑ䊒䊨䉶䉴ᛛⴚ㩷 㩷㩷 䋱䋷㪆䋳䋳㩷 㐿 䊐䉜䉟䊋䊷䈱ၒ䉄ㄟ䉂 PNAS 2011 ᬺේ★㩷 㸋㪄䋶䋵㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 䋱䋸㪆䋳䋳㩷 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪉㪀䊋䉟䉥㜞ᰴ᭴ㅧᒻᚑ䊒䊨䉶䉴ᛛⴚ㩷 㩷㩷 㐿 PNAS 2011 ᬺේ★㩷 㸋㪄䋶䋶㩷 PEG bonded PAM Blood glucose conc. Blood glucose conc. (mg/dL) Fluorescence intensity, ΔF/Fi (%) 㪈㪋㪇ᣣᓟ䉅⸘᷹䈮ᚑഞ䋣㩷 Time (min) 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪉㪀䊋䉟䉥㜞ᰴ᭴ㅧᒻᚑ䊒䊨䉶䉴ᛛⴚ㩷 㩷㩷 䋱䋹㪆䋳䋳㩷 㐿 ข䉍ᄖ䈚䉅◲න䋣 ᬺේ★㩷 㸋㪄䋶䋶㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 䋲䋰㪆䋳䋳㩷 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪉㪀䊋䉟䉥㜞ᰴ᭴ㅧᒻᚑ䊒䊨䉶䉴ᛛⴚ㩷 㩷㩷 㐿 ዊဳ⸘ེ᷹䈱㐿⊒ ᬺේ★㩷 㸋㪄䋸䋴㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪉㪀䊋䉟䉥㜞ᰴ᭴ㅧᒻᚑ䊒䊨䉶䉴ᛛⴚ㩷 㩷㩷 䋲䋱㪆䋳䋳㩷 㐿 䉪䊥䉾䊒ဳⰯశ᷹ቯ䊂䊋䉟䉴䈱㐿⊒ PC䈻䊂䊷䉺ォ ㅍ PD LED PD䋧LED䈱◲න䈭᭴ㅧ䈪䉅䇮᷹ቯน⢻䈪䉎䈖䈫䉕⏕䈎䉄䈢䇯 ᬺේ★㩷 㸋㪄䋸䋶㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 䋲䋲㪆䋳䋳㩷 㐿 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪉㪀䊋䉟䉥㜞ᰴ᭴ㅧᒻᚑ䊒䊨䉶䉴ᛛⴚ㩷 㩷㩷 䉪䊥䉾䊒ဳⰯశ᷹ቯ䊂䊋䉟䉴䈱᷹ቯ⚿ᨐ㩷 ♧⽶⩄⹜㛎䋨㪛㪸㫐㪇㪀㩷 500 705 450 695 㪠㫅㫊㫌㫃㫀㫅㩷 350 685 300 675 250 㪞㫃㫌㪺㫆㫊㪼㩷 200 Ⱟశᒝᐲ㩷 ⴊ♧୯㪲㫄㪾㪆㪻㫃㪴 400 665 655 150 25 45 65 85 105 ᤨ㑆㪲㫄㫀㫅㪴㩷 ᬺේ★㩷 㸋㪄䋹䋰㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 䋲䋳㪆䋳䋳㩷 㐿 㩷 㩷 㩷 㩷 㩷 㩷 ᧪䋺⺕䈪䉅◲න䋣㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷 㪉㪋ᤨ㑆⺞䊝䊆䉺䊥ング ⴊ♧୯䈭䈬䈱䊋䉟䉺䊦䉰䉟䊮䈱Ᏹᤨ⸘᷹ ⇇䈱♧ዩ∛Ꮢ႐㩷 䊶ᖚ⠪ᢙ䋺㪊ం㪍㪍㪇㪇ਁੱ㩷㩷 㩷 䊶ⴊ♧⸘Ꮢ႐ⷙᮨ䋺㪐㪍ం䊄䊦㩷 㩷 ᬺේ★㩷 㸋㪄䋹䋴㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 䋲䋴㪆䋳䋳㩷 㐿 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷㩷 㪣㫀㪽㪼㪙㪜㪘㪥㪪䈏ᵈ⋡䈚䈢䊋䉟䉥䊶ᯏ᧚ᢱ㩷 㩿㪈㪀⢽⾰㪉㊀⤑㩷 㸢㩷 㜞ᗵᐲൻቇ㊂䉶䊮䉰䈻ᔕ↪㩷 㩷 㩷 㩿㪉㪀䊊䉟䊄䊨䉭䊦㩷 㸢㩷 ၒ䉄ㄟ䉂䊂䊋䉟䉴⇇㕙䈻↪㩷 㩷 㩷 㩷 㩿ⴊ♧୯䉶䊮䉰䈭䈬㪀㩷 㩷 㩿㪊㪀⚦⢩㩷 㸢㩷 ↢⚵❱䈱㪊ᰴరᒻᚑ㩷 㩷 㩷 㩷 േ‛ታ㛎䈏ⷐ䉌䈭䈇ഃ⮎䊒䊨䉶䉴㩷 ᬺේ★㩷 㸋㪄䋹䋷㩷 䋲䋵㪆䋳䋳㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 㐿 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪉㪀䊋䉟䉥㜞ᰴ᭴ㅧᒻᚑ䊒䊨䉶䉴ᛛⴚ㩷 㩷㩷 േ‛ታ㛎䉕䈭䈒䈚䈢⮎‛േᘒ⸃ᨆታ㛎㩷 㪤㫌㪺㪿㩷㫋㫀㫄㪼㩷 㪤㫌㪺㪿㩷㪺㫆㫄㫇㫆㫌㫅㪻㫊㩷 㪥㫆㫋㩷㪿㫌㫄㪸㫅㩷 േ‛ታ㛎㩷 ᬺේ★㩷 㸋㪄䋹䋷㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 㪣㫆㫎㩷㪺㫆㫊㫋㩷 㪟㫌㫄㪸㫅㩷㪺㪼㫃㫃㫊㩷 ⚦⢩ታ㛎㩷 䋲䋶㪆䋳䋳㩷 㐿 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪉㪀䊋䉟䉥㜞ᰴ᭴ㅧᒻᚑ䊒䊨䉶䉴ᛛⴚ㩷 㩷㩷 ᚢ䋺䇸⢙▤䇹䉕ᚲᦸ䈱⟎䈮㈩⟎䈚䇮⢙᳝䉕࿁䈜䉎䇯㩷 СࣂẲềᣐፗ ẰủẺᏁኬᏘ Ằ ᣠእᡢᢅࣱᐏ ᬺේ★㩷 㸋㪄䋱䋰䋲 ኬᏘٳἰἚἼἁἋἄἽ ൗኬᏐሥ 䋲䋷㪆䋳䋳㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 㐿 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪉㪀䊋䉟䉥㜞ᰴ᭴ㅧᒻᚑ䊒䊨䉶䉴ᛛⴚ㩷 㩷㩷 ⢄⚦⢩䈱㪊ᰴరၭ㙃♽䉕䈧䈒䉎䋣㩷 PDMSἋἑὅἩ ᏁኬᏘ ἅἻὊἄὅ ᬺේ★㩷 㸋㪄䋱䋰䋲 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 ؕெ 䋲䋸㪆䋳䋳㩷 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪉㪀䊋䉟䉥㜞ᰴ᭴ㅧᒻᚑ䊒䊨䉶䉴ᛛⴚ㩷 㩷㩷 㐿 ⢄⚦⢩႙ౝㇱ䈮ᒻᚑ䈘䉏䈢⢙▤䈱᭴ㅧ㩷 ଢᙻᴾ ఋᴾ ᴾ ኬᏘᐏᴾ Ꮠሥᐏᴾ ᏁኬᏘجỉɶځỆᏐሥầ࢟ẰủẺᴾ ᬺේ★㩷 㸋㪄䋱䋰䋸 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪉㪀䊋䉟䉥㜞ᰴ᭴ㅧᒻᚑ䊒䊨䉶䉴ᛛⴚ㩷 㩷㩷 䋲䋹㪆䋳䋳㩷 㐿 ⢙᳝䉕࿁䈜䉎䋣㩷 ᬺේ★㩷 㸋㪄䋱䋱䋴 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 䋳䋰㪆䋳䋳㩷 㐿 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪉㪀䊋䉟䉥㜞ᰴ᭴ㅧᒻᚑ䊒䊨䉶䉴ᛛⴚ㩷 㩷㩷 䊍䊃䈱⢄⚦⢩䈎䉌⢙▤ᒻᚑ䈮ᚑഞ䋣䋣㩷 ዊ㊂䈎䈧⾆㊀䈭䇸䊍䊃䇹⢄⚦⢩ ᬺේ★㩷 㸋㪄䋱䋱䋴 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 ᧪䋺േ‛ታ㛎䉕䉒䈭䈇㩷 㜞ㅦ⮎‛േᘒ⸃ᨆ㩷 䋳䋱㪆䋳䋳㩷 㐿 ᵑഏΨἄἽϋỆᣐፗẰủẺ ᏁኬᏘኵጢᴾ ᏁኬᏘᴾ ˊᜓཋᴾ ᏁኬᏘኵጢؔἙἢỶἋᴾ ᬺේ★㩷 㸋㪄䋱䋲䋳 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 䋳䋲㪆䋳䋳㩷 㪭㪄㽲㪄㪘㩷㩷䊋䉟䉥䊶ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷㩷 㐿 㪣㪠㪝㪜⎇ⓥ㗄⋡䈫⥄ਥ⋡ᮡ 㽲⢽⾰㪉㊀⤑ቯ⇇㕙ᒻᚑ䊒䊨䉶䉴 䇼⥄ਥ⋡ᮡ䇽㩷 䊶㪉㪋ᤨ㑆એቯ䈭⢽⾰⤑ᒻᚑ䊒䊨䉶䉴䈱⏕┙㩷 㩷 㩷 㽳䊊䉟䊄䊨䉭䊦ቯ⇇㕙ᒻᚑ䊒䊨䉶䉴㩷 䇼⥄ਥ⋡ᮡ䇽㩷 䊶㪊䊱એౝ䈪ቯ䈚䈩ᯏ⢻䈜䉎⇇㕙ᒻᚑ䊒䊨䉶䉴䈱⏕┙ 㩷 㩷 㽴⚦⢩䈱㪊ᰴర䈻䊁䊨⚵❱᭴ㅧᒻᚑ䊒䊨䉶䉴㩷 䇼⥄ਥ⋡ᮡ䇽㩷 䊶⢙▤䉕䊂䊋䉟䉴䈮ᒻᚑ䈚䇮⮎‛േᘒ⸘᷹䉕㩷 㩷 น⢻䈭䊓䊁䊨⚵❱ᒻᚑ䊒䊨䉶䉴䈱⏕┙㩷 ᬺේ★㩷 㸋㪄䋱䋲䋳 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷㩷 䋳䋳㪆䋳䋳㩷 㐿 ⾗ᢱ㪎㪄㪈㪄㪈㪄㪙䋺䊒䊨䉳䉢䉪䊃䈱⚦⺑⾗ᢱ㩷 㩷 ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷䋨㐿 䋩㩷 䇸⇣ಽ㊁Ⲣวဳᰴઍ䊂䊋䉟䉴ㅧᛛⴚ㐿⊒䊒䊨䉳䉢䉪䊃䇹㩷 㩷㩷 ᓟ⹏ଔಽ⑼ળ⾗ᢱ㪎㪄㪈㪄㪈㪙㩷 㩷 䊒䊨䉳䉢䉪䊃䈱⚦⺑⾗ᢱ㩷 ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷㩷 㩷 ᐔᚑ䋲䋵ᐕ䋵䋲䋴ᣣ㩷 ⁛┙ⴕᴺੱ㩷 ᣂ䉣䊈䊦䉩䊷䊶↥ᬺᛛⴚ✚ว㐿⊒ᯏ᭴㩷 ᛛⴚ㐿⊒ផㅴㇱ㩷 ᬺේ★㩷 㸋㪄㽲㪄㪙㩷 䋱㪆䋱䋶㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷Ꮊᄢቇ㩷 㐿 㪭㪄㽲㪄㪙㩷㩷ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 ᯏ䊶䊅䊉⇇㕙Ⲣว㪆ᯏ㜞ᰴ᭴ㅧᒻᚑ㩷 ᵐᵎᴾᶌᶋ ᵏᴾPᶋ ᵎᴾᶌᶋ ಽሶ㈩ะᓮ㩷 䊅䊉䊄䉾䊃㩷 φ40nm 㜞⊒శല₸䈱ᯏ㪜㪣㩷 䊅䊉䊏䊤䊷㩷 䊅䊉䉫䊧䉟䊮㩷 䊅䊉䊘䉝㩷 䊅䊉䊘䊷䊤䉴㩷 φ80nm φ20䌾50nm φ30nm㬍100nm 㜞ല₸䈱ᯏ⭯⤑ᄥ㓁㔚ᳰ㩷 ᯏ䊶ήᯏᾲ㔚䊂䊋䉟䉴䈱ታ↪ൻ㩷 ᯏᄥ㓁㔚ᳰ ᾲ㔚䊂 䊋䉟 䉴 䊎䊦䊶ቛ䉧䊤䉴㩷 ᯏ㪜㪣ᾖ䋧䊂䉞䉴䊒䊧䉟㩷 ᯏᄥ㓁㔚ᳰ䉧䊤䉴㩷 䉡䉢䉝䊤䊑䊦䊂䊋䉟䉴㩷 ٽᨗỉ༏ίហٳዴὸểήίӧᙻήὸỉ ɲ૾ẦỤႆᩓẴỦٽᨗᩓ൷ἧỵἽἲ ɲ૾ ẦỤႆᩓẴỦٽᨗᩓ൷ἧỵἽἲ 䋨䊦䊷䊐䊶䊥䉝䉡䉞䊮䊄䉡䋩㩷 ⥄േゞ ἼỴỸỵὅἛỷỆờ̅ảỦ ἉὊἋἽὊἑỶἩ 䊐䊧䉨䉲䊑䊦ᄥ㓁㔚ᳰ㩷 䊐䊧䉨䉲䊑䊦䊂䉞䉴䊒䊧䉟㩷 ᬺේ★㩷 V́䋱䋵䋶 ਰѣửԈӓẲႆᩓẴỦᵫᵣᵫᵱ ༏ửМဇẴỦ༏ᩓႆᩓ 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷Ꮊᄢቇ㩷 䋲㪆䋱䋶㩷 㐿 㪭㪄㽲㪄㪙㩷㩷ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 ᯏ䊶䊅䊉⇇㕙Ⲣว㪆ᯏ㜞ᰴ᭴ㅧᒻᚑ㩷 ᵐᵎᴾᶌᶋ ᵏᴾPᶋ ᵎᴾᶌᶋ ಽሶ㈩ะᓮ㩷 䊅䊉䊄䉾䊃㩷 φ40nm 㜞⊒శല₸䈱ᯏ㪜㪣㩷 ⊒శല₸䈱ᯏ 䊅䊉䊏䊤䊷㩷 䊅䊉䉫䊧䉟䊮㩷 䊅䊉䊘䉝㩷 䊅䊉䊘䊷䊤䉴㩷 φ80nm φ20䌾50nm φ30nm㬍100nm 㜞ല₸䈱ᯏ⭯⤑ᄥ㓁㔚ᳰ㩷 㜞ല₸䈱ᯏ ᯏ⭯ ⭯⤑ᄥ㓁㔚ᳰ ᯏ䊶ήᯏᾲ㔚䊂䊋䉟䉴䈱ታ↪ ൻ㩷 ൻ ᯏᄥ㓁㔚 ᯏ ᯏ ᄥ 㔚ᳰ ᯏ䈱․㐳䈪䈅䉎㩷 ᄢ㕙Ⓧ䈎䈧ଔ䈭䊒䊨䉶䉴䈮䊐䉤䊷䉦䉴 ᾲ㔚䊂 䊋䉟 䉴 䊎䊦䊶ቛ䉧䊤䉴㩷 䊤䉴 䊤 ᯏ㪜㪣ᾖ䋧䊂䉞䉴䊒䊧䉟㩷 ᯏᄥ㓁㔚ᳰ䉧䊤䉴㩷 㔚ᳰ䉧 䉧䊤 䊤䉴 䉡䉢䉝䊤䊑䊦䊂䊋䉟䉴㩷 䉡䉢䉝 䉝䊤䊑䊦䊂䊋 䊋䉟䉴 䉟䉴 ٽᨗỉ༏ίហٳዴὸểήίӧᙻήὸỉ ɲ૾ẦỤႆᩓẴỦٽᨗᩓ൷ἧỵἽἲ ɲ૾ ẦỤႆᩓẴỦٽᨗᩓ൷ἧỵἽἲ 䋨䊦䊷䊐䊶䊥䉝䉡䉞䊮䊄䉡䋩㩷 ⥄േゞ ἼỴỸỵὅἛỷỆờ̅ảỦ ἉὊἋἽὊἑỶἩ 䊐䊧䉨䉲䊑䊦ᄥ㓁㔚ᳰ㩷 ਰѣửԈӓẲႆᩓẴỦᵫᵣᵫᵱ 䊐䊧䉨䉲䊑䊦䊂䉞䉴䊒䊧䉟㩷 ᬺේ★㩷 V́䋱䋵䋶 ༏ửМဇẴỦ༏ᩓႆᩓ 䋳㪆䋱䋶㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷Ꮊᄢቇ㩷 㐿 㪭㪄㽲㪄㪙㩷㩷ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱⎇ⓥផㅴ㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪Ꮊ㩷 㪙㪜㪘㪥㪪⎇ⓥᚲ㩷 ⎇㩷 ⓥ 㐿㩷 ⊒ 㗄㩷 ⋡㩷 ⎇ⓥ㐿⊒䊁䊷䊙㩷 ⎇ⓥ䊙䊈䉳䊜䊮䊃㩷 䋨䋱䌂䋩 ᯏ䊶䊅䊉 ⇇㕙Ⲣว 䊒䊨䉶䉴 ᛛⴚ㩷 䋨䋲䌂䋩 ᯏ㜞ᰴ ᭴ㅧᒻᚑ 䊒䊨䉶䉴 ᛛⴚ㩷 㪙㪜㪘㪥㪪㩷 ᚑᨐଦㅴ㩷 Ꮊ ᄢቇ㩷 䂾㩷 䋨䋱䌂䋩䋭䋲㩷 䊃䉾䊒䉻䉡䊮䊒䊨䉶䉴 䈮䉋䉎䊅䊉᭴ㅧᒻᚑ 䇼ᯏ⭯⤑䉣䉾䉼䊮䉫䇽㩷 䂾㩷 䋨䋲䌂䋩䋭䋱㩷 ᯏಽሶ䈱᭴ㅧ䊶⚿᥏ ᓮ䈮䉋䉎㜞ᰴ᭴ㅧᒻᚑ 䇼ᯏ㪜㪣䊂䊋䉟䉴䇽㩷 䂾㩷 䋨䋲䌂䋩䋭䋲㩷 䊅䊉䊘䊷䊤䉴᭴ㅧᒻᚑ䈫ᾲ 㔚․ᕈ⹏ଔ 䇼ᾲ㔚䊂䊋䉟䉴䇽 䂾㩷 ᬺේ★㩷 V́䋱䋵䋶 Ꮊ Ꮏᬺ ᄢቇ㩷 䋳㪛㩷 㪙㪜㪘㪥 㪪㩷 ᧲ർ㩷 ᄢቇ㩷 䊥䊮 䊁䉾䉪 䋨ᩣ䋩㩷 㩷 䊌䊅䉸 䊆䉾䉪 䋨ᩣ䋩㩷 ᄢ㔚 䋨ᩣ)㩷 ᧲੩㩷 ᄢቇ㩷 䉥䊥䊮 䊌䉴 㩿ᩣ㪀㩷 㩿ᩣ㪀㩷 䊂䊮 䉸䊷㩷 䂾㩷 䂾㩷 䋨䋱䌂䋩䋭䋱㩷 䊅䊉䊙䊷䉨䊮䉫䊶㈩ะ ᓮ䈮䉋䉎䊅䊉᭴ㅧᒻᚑ 䇼ᯏᄥ㓁㔚ᳰ䇽㩷 ⿒ᄖ✢㡆㩷 䉝䊮䊁䊅䈻䈱ㆡ↪㩷 䇼⿒ᄖ✢䉶䊮䉰䇽㩷 Ꮊ వ┵ ⑼ቇ ᛛⴚ ⎇ⓥᚲ㩷 䂾㩷 䂾㩷 䂾㩷 䂾㩷 䂾㩷 䂾㩷 䂾㩷 㩷 䂾㩷 䂾㩷 䂾㩷 䂾㩷 䂾㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷Ꮊᄢቇ㩷 䂾㩷 䂾㩷 䂾㩷 䋴㪆䋱䋶㩷 㐿 㪭㪄㽲㪄㪙㩷㩷ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪䉶䊮䉺䊷Ꮊ㩷 ⎇ⓥ㐿⊒⋡ᮡ䈱㆐ᚑ⁁ᴫ㩷 ⎇ⓥ 㐿⊒ 㗄⋡㩷 䋨䋱䌂䋩 ᯏ 䊶䊅䊉 ⇇㕙 Ⲣว 䊒䊨 䉶䉴 ᛛⴚ㩷 䋨䋲䌂䋩 ᯏ 㜞ᰴ ᭴ㅧ ᒻᚑ 䊒䊨 䉶䉴 ᛛⴚ㩷 㐿⊒⋡ᮡ ㆐ᚑ ⁁ᴫ㩷 ⚿㩷 ᨐ㩷 䊶200nm એਅ䈱㑆㓒䉕䈜䉎䊅䊉᭴ㅧ㕙䈻䈱㈩ะ䊶ⵍⷒ 䊒䊨䉶䉴䈱㐿⊒ 䊶ᯏ⭯⤑䈱ಽሶ㈩ะᓮ䊒䊨䉶䉴䈱㐿⊒䈫䇮శ㔚ᄌ឵䊂䊋 䉟䉴䈱ᄌ឵ല₸䈱20䋦ะ 䊶᧚ᢱ䊶䊂䊋䉟䉴᭴ㅧ䈱ᦨㆡൻ䈮䉋䉎䇮శ㔚ᄌ឵ല₸䉕30䋦ะ 䋨ല₸8%䋩 䊶䉺䊮䊂䊛ဳᯏ⭯⤑ᄥ㓁㔚ᳰ䈮䈍䈇䈩නጀ䉶䊦䈮ኻ䈚䇮2 એ䈱㔚䋨Voc)䇮䈶ല₸20䋦ะ䉕⋡ᜰ䈜 䊶䉶䊦䈱ା㗬ᕈ䉕⹏ଔ䈚䇮ታ↪ൻ䈻䈱⺖㗴㩷 䃁 䊶100nmએਅ䈱䊅䊉᭴ㅧ䈻䈱㈩ะ䊶 ⵍⷒ䈮ᚑഞ 䊶䊒䊨䉳䉢䉪䊃㐿ᆎᤨ䈎䉌ല₸䋲䋮䋲 䋨3.2%→7.0%䋩䉕㆐ᚑ 䊶᧚ᢱ䊶䊅䊉᭴ㅧ䈱ᦨㆡൻ䈮䉋䉍䋸䋦䈱 ㆐ᚑ䈱น⢻ᕈ䉕␜䈜 䊶ᄙጀൻ䈮䉋䉎6䈱Voc,䇮䉺䊮䊂䊛ൻ 䈮䉋䉍ല₸1.85䉕㆐ᚑ 䊶ല₸10%䉕㆐ᚑ䈻䈱㐿⊒⺖㗴䉕㩷 䋨䋱䌂䋩䋭䋲㩷 䊃䉾䊒䉻䉡䊮䈮䉋 䉎䊅䊉᭴ㅧᒻᚑ 㩷 䊶ᯏ⭯⤑䈱៊்䈮䉋䉎䊂䊋䉟䉴․ᕈ䈱ૐਅ䉕10䋦એਅ䈮ᛥ 䈋䉎ਛᕈ☸ሶ䊎䊷䊛䉣䉾䉼䊮䉫䊒䊨䉶䉴䈱㐿⊒㩷 䃁㩷 ․ᕈഠൻ䇮⚂䋷䋦䈮䈘䈋䉎䊒䊨䉶䉴 䉕㐿⊒㩷 䋨䋲䌂䋩䋭䋱㩷 ᯏಽሶ䈱᭴ ㅧ䊶⚿᥏ᓮ䈮 䉋䉎㜞ᰴ᭴ㅧᒻ ᚑ 䊶⥄Ꮖ⚵❱ൻ䊅䊉᭴ㅧ䈱ᒻᚑ䊒䊨䉶䉴䈱㐿⊒ 㩷 䊶ᓘ50 nmએਅ䈱ᯏ䊅䊉䊏䊤䊷᭴ㅧ 㩷 䊶100 nmએਅ䈱ဋ৻䊘䉝䉕䈜䉎ᯏ䊅䊉䊘䊷䊤䉴᭴ㅧ 㩷 䊶䊤䉟䊮䊶䉝䊮䊄䊶䉴䊕䊷䉴100 nmએਅ䈱✂⋡䉇⋥✢᭴ㅧ 䊶㒶ᭂ䈻䈱䊅䊉᭴ㅧᒻᚑ䈮䉋䉎⊒శ䊂䊋䉟䉴䈱శข䉍䈚 㩷 ല₸20䋦ะ 䊶ಽሶ㈩ะᕈ⊒శ᧚ᢱ䈱ᄙ⦡ൻ䇮䈶䌐䌌㊂ሶല₸80䋦䈱ታ 㩷 䃁 䊶ᓘ30nm, 㐳䈘100nm䈱䊅䊉䊏䊤䊷䇮 80nm䈱䊅䊉䊘䉝䇮100nmએਅ䈱䊅䊉 䊘䊷䊤䉴䉕ታ 䃁 䊶శข䉍䈚ല₸31%ะ 䃁 䊶㤛䇮✛䇮⿒䉕ታ 䊶PL㊂ሶല₸85%䉕ታ㩷 䊶ᯏඨዉ䊅䊉᭴ㅧ䉕ᾲ㔚ᄌ឵䊂䊋䉟 䉴䈮ㆡ↪䈚䇮ᾲ㔚․ ᕈ䋨䊌䊪䊷䊐䉜䉪䉺䊷䋩PF = 10μWm-1K-2એ䈱㆐ᚑ 䊶ᯏඨዉ᳓ᐔဳ䊂䊋䉟䉴䈱ᦝ䈭䉎㜞ᕈ⢻ൻ䇮䈶ု⋥ဳ 䈱䊂䊋䉟䉴᭴ㅧ䈪䈱᳓ᐔဳ䈫ห╬䈱䊌䊪䊷䊐䉜䉪䉺䊷䈱ታ 䊶䉲䊚䊠䊧䊷䉲䊢䊮ᛛⴚ䉕ᵴ↪䈚䈢ᾲ㔚․ᕈ⹏ଔᴺ䈱⏕┙ 䊶BCP䈮䉋䉎䊅䊉䊘䊷䊤䉴ᾲ㔚ඨዉ⤑ᒻᚑ䊒䊨䉶䉴ᦨㆡൻ䈮 䉋䉍䌚䌔=1.0䈱䊐䊧䉨䉲䊑䊦ᾲ㔚ඨዉ䊂䊋䉟䉴㩷 䃁 䊶PF =36μWm-1 K-2䉕㆐ᚑ 䊶ႣᏓ䊒䊨䉶䉴ኻᔕᛛⴚ㐿⊒ 䊶ု⋥ဳ䊂䊋䉟䉴䉕⹜䈜䉎䉅䇮䊥䊷䉪 ╬䈮䉋䉍․ᕈ䈲ᧂ⏕ 䊶㕙ౝᾲવዉ₸᷹ቯᴺ䉕⏕┙ 䊶p/n䈫䉅⚂ZT=1.5䉕㆐ᚑ䈚䇮䊐䊧䉨䉲䊑 䊦䊂䊋䉟䉴䉕㩷 ⎇ⓥ㐿⊒䊁䊷䊙 䋨䋱䌂䋩䋭䋱㩷 䊅䊉䊙䊷䉨䊮䉫䊶 ㈩ะᓮ䈮䉋䉎 䊅䊉᭴ㅧᒻᚑ㩷 䋨䋲䌂䋩䋭䋲㩷 䊅䊉䊘䊷䊤䉴᭴ ㅧᒻᚑ䈫ᾲ㔚․ ᕈ⹏ଔ 㩷 ̪㤥ᢥሼ䋺ᒰೋ⋡ᮡ䇮⿒ᢥሼ䋺ടㅦ⋡ᮡ ᬺේ★㩷 V́䋱䋵䋶 䃁 䇳 䃁 䃁㩷 䃢 䃁 䃁㩷 䋵㪆䋱䋶㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷Ꮊᄢቇ㩷 㐿 㪭㪄㽲㪄㪙㩷㩷ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 䊂䊋䉟䉴䈮䈍䈔䉎ᯏ᧚ᢱ䈱䊅䊉᭴ㅧᒻᚑ䈱㊀ⷐᕈ䋲䋺ᯏᄥ㓁㔚ᳰ㩷 ᯏ⭯⤑䈱䊅䊉᭴ㅧᓮ䈮䉋䉍ᯏᄥ㓁㔚ᳰ䈱ᕈ⢻䉕㘧べ⊛䈮ะ䈘䈞䉎㩷 䉣䊈䊦䉩䊷ᄌ឵ല₸㪉એ䋣㩷 䊅䊉䉫䊧䉟䊮ᓮ㩷 䊋䊦䉪䈻䊁䊨㩷 䉳䊞䊮䉪䉲䊢䊮ဳ䉶䊦᭴ㅧ㩷 Ⓧጀဳ䉶䊦᭴ㅧ㩷 ㅧ 㒶㩷 ᭂ 㔚㩷 ሶ 30nm 30nm ⚂100nm pဳ⚿วጀ ബሶ nဳ⚿วጀ ᯏᄥ㓁㔚ᳰ䉧䊤䉴㩷 ᱜ ᱜ㩷 ሹ 㓁 㓁㩷 ᭂ 䊐䊧䉨䉲䊑䊦ᄥ㓁㔚ᳰ㩷 ᬺේ★㩷 V́䋱䋶䋲 ᄖㇱశ 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷Ꮊᄢቇ㩷 䊅䊉䊏䊤䊷ဳ䉶䊦᭴ㅧ㩷 䊅䊉䊏䊤䊷ဳ䉶䊦᭴ㅧ 䋶㪆䋱䋶㩷 㐿 㪭㪄㽲㪄㪙㩷㩷ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 䊂䊋䉟䉴䈮䈍䈔䉎ᯏ᧚ᢱ䈱䊅䊉᭴ㅧᒻᚑ䈱㊀ⷐᕈ䋱䋺ᯏ䌅䌌㽲㩷 ㊄ዻ㔚ᭂ 䊷 㔚ሶャㅍጀ 䊷 ⊒శጀ ᯏඨዉ 䋨⚂䋱䋰䋰nm) ಽሶ㈩ะ䈮䉋䉍శข䉍䈚ല₸㪈㪅㪍䋣㩷 ⒖േᐲ㪈㪇એ䋣㩷 ⊒శ ᱜሹャㅍጀ 䋫 ㅘ㔚ᭂ䋨ITO) 䋫 䉝䊝䊦䊐䉜䉴䋨ၮ᧼䈮ᐔⴕ㈩ะ䋩 䉧䊤䉴ၮ᧼ ᯏಽሶ䈱㈩ะ䈏䊂䊋䉟䉴․ᕈ䈮ᓇ㗀 㔚⩄ᵈ/ャㅍᕈ⢻䋩 䋨⊒శല₸䊶㔚 ᯏ䌅䌌䈱⊒శේℂ㩷 ᯏ㪜㪣ᾖ䋧䊂䉞䉴䊒䊧䉟㩷 䉝䊝䊦䊐䉜䉴䋨㈩ะᕈή䈚䋩 䉝䊝䊦䊐 䉴䋨㈩ะᕈή䈚䋩 䊐䊧䉨䉲䊑䊦䊂䉞䉴䊒䊧䉟㩷 ಽሶ㈩ะ䈫ᯏ䌅䌌․ᕈ㩷 ᬺේ★㩷 V́䋱䋶䋲 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷Ꮊᄢቇ㩷 䋷㪆䋱䋶㩷 㐿 㪭㪄㽲㪄㪙㩷㩷ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 䊂䊋䉟䉴䈮䈍䈔䉎ᯏ᧚ᢱ䈱䊅䊉᭴ㅧᒻᚑ䈱㊀ⷐᕈ䋳䋺ᾲ㔚䊂䊋䉟䉴㩷 ૐ䉮䉴䊃䊶ᄢ㕙Ⓧ䊶䊐䊧䉨䉲䊑䊦䇮䈎䈧㜞ᕈ⢻ൻ䉕䉄䈙䈜㩷 ↢ᵴⓨ㑆䈮䈅䉎ᑄᾲ䉕㩷 ↪䈪䈐䉎໑৻䈱ᣇᴺ㩷 㩷 㜞ല₸ൻ㩷 ᄢ㕙Ⓧ䊶䊐䊧䉨䉲䊑䊦ൻ㩷 䊋䊦䉪᧚ᢱ䈱㪉એ䈱ᾲ㔚․ᕈ䉕㆐ᚑ䋣㩷 䊅䊉᭴ㅧዉ䈮䉋䉍䊋䊦䉪᧚ᢱ䈱㩷 ‛ᕈ䉕䈋䉎ᾲ㔚․ᕈ䉕ታ㩷 㪈㪇㪇㫅㫄એਅ䈱䊅䊉䊘䊷䊤䉴᭴ㅧ䈮䉋䉎㩷 㜞㔚᳇વዉᐲ䇮ૐᾲવዉᐲ䉕ਔ┙㩷 䊅䊉䊘䊷䊤䉴ൻ㩷 ⇇䊃䉾䊒䊧䊔䊦䈱ᯏᾲ㔚䊂䊋䉟䉴㩷 ᾲવዉᐲ䈱ዊ䈘䈇ᯏඨዉ䈱ᔕ↪㩷 䊅䊉䊧䊔䊦䈱⤑ෘᓮ䈫ᣂⷙ䊂䊋䉟䉴㩷 ᭴ㅧ䈮䉋䉎㜞䈇ᾲ㔚․ᕈ䈱㆐ᚑ㩷 (b) (a) 䊎䊦䊶ቛ䉧䊤䉴㩷 ࿑㽳-(2B)-2-3-2.1 (a) P3HT䇮 (b)F4-TCNQ 䈱ಽሶ᭴ㅧ ٽᨗỉ༏ίហٳዴὸểήίӧᙻήὸỉ ᨗỉ༏ίហٳዴὸểήίӧᙻήὸỉ ɲ૾ẦỤႆᩓẴỦٽᨗᩓ൷ἧỵἽἲ ɲ૾ẦỤႆᩓẴỦٽᨗᩓ൷ἧỵἽἲ ⥄േゞ䋨䊦䊷䊐䊶䊥䉝䉡䉞䊮䊄䉡䋩㩷 ἼỴỸỵὅἛỷỆờ̅ả ἼỴỸỵὅἛỷỆờ̅ảỦ ảỦ ἉὊἋἽὊἑỶἩ ਰѣửԈӓẲႆᩓẴỦᵫᵣᵫᵱ ༏ửМဇẴỦ༏ᩓႆᩓ ᬺේ★㩷 V́䋱䋷䋴 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷Ꮊᄢቇ㩷 䋸㪆䋱䋶㩷 㐿 㪭㪄㽲㪄㪙㩷㩷ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪈㪀ᯏ䊶䊅䊉⇇㕙Ⲣว䊒䊨䉶䉴ᛛⴚ㩷 䊅䊉䉫䊧䉟䊮䊶㈩ะᓮ䈮䉋䉎䊅䊉᭴ㅧᒻᚑ䈏㩷 ᯏᄥ㓁㔚ᳰ䈱శ㔚ᄌ឵․ᕈ䉕㘧べ⊛䈮ะ䋺ᓥ᧪Ყ㪉㪅㪉䉕㆐ᚑ㩷 ಽሶ㈩ะᕈᯏ⭯⤑ᄥ㓁㔚ᳰ䈱ၮᧄ᭴ㅧ ല₸䋺η䋽4.2䋦 䊅䊉᭴ㅧ䊶ಽሶ㈩ะᓮ䈮䉋䉍㩷 ല ᓥ శ㔚ᄌ឵ല₸䉕ᓥ᧪Ყ㪉㪅䋲㩷 ല₸䋺η 䋽㪌㪅㪊㩼㩷 䉧䊤 䉴ၮ᧼ TPTPA 㩷 䊂䊋䉟䉴᭴ㅧᦨㆡൻ㩷㸢㩷㪏㪅㪇㩼㩷 ᭴ㅧᦨㆡ 䉺䊮䊂䊛ൻ㩷㸢㩷㪈㪋㪅㪏㩼㩷 ㆐ᚑน⢻ᕈ䉕␜䈜㩷 㓁ᭂ ಽሶ㈩ะᕈബሶ䊑 䊨 䉾 䉨䊮 䉫 C70 䊄 䊅䊷 㔚ሶャㅍ ャ 䉝 䉪 䉶䊒 䉺 b-axis DBP ಽሶ㈩ะᕈᯏඨዉ ClAlPc ബሶ䊑 䊨 䉾 䉨䊮 䉫ጀ䈱᧦ઙ 㪈 㪅 㩷䊄 䊅 䊷䉋 䉍 ᐢ䈇䊋䊮 䊄 䉩䊞 䉾 䊒 㪉 㪅 㩷䊄 䊅 䊷䈫 ห䈛 㪟 㪦㪤 㪦䊧 䊔䊦 㪊 㪅 㩷䊄 䊅 䊷䈫 Ყ䈼㜞⒖േᐲ 㒶ᭂ 䊖䊷䊦ャㅍ BCP ല₸䋨䋦䋩㩷 ബሶ䊑 䊨 䉾 䉨䊮 䉫 㪈䋴㩷 䋺䊅䊉᭴ㅧᓮή䈚䈱ല₸ 㩷 䋨䊒䊨䉳䉢䉪䊃㐿ᆎᤨ䋩 㪈䋲㩷 䋺䊅䊉᭴ㅧᓮ䈮䉋䉎ല₸ 㩷 䋨䊒䊨䉳䉢䉪䊃ᚑᨐ䋩 㪈㪇㩷 䋺ታน⢻䈭ല₸ 㩷 䋨ታ᷹୯䈱⚵ว䈞䈎䉌⹜▚䋩 㪏㩷 (14.8) 7.0 㪍㩷 ല₸䋺㪈㪋㪅㪌䋦ะ㩷 㪎㪅㪇㬍㪈㪅㪈㪋㪌㪔㪏㪅㪇㩼㩷 Ag 10nm BCP DBP/C70: BHJ (5%, 50nm) 5nm MoO3 ITO Ag PTCBI / BCP DBP/C70: BHJ (5%, 50nm) 5nm MoO3 ITO 㽲䊅䊉䉫䊧䉟䊮ᓮ䋧⚿᥏ᕈ㪚㪎㪇㩷 㽳㒶ᭂ䊋䉾䊐䉜ጀ䈱ᦨㆡൻ㩷 (8.0) 5.3 Ag BCP C60-5%DBP䋺శ㔚ᄌ឵ጀ䋱㩷 4.2 㪋㩷 ല₸䋺η 䋽㪎㪅㪇㩼㩷 3.2 㪉㩷 䉺䊮䊂䊛ൻ䈮䉋䉍㩷 නጀ䉶䊦䈮Ყ䈼㩷 㪈㪅㪏㪌䈱ല₸䉕ታ㩷 CRZ䋺㔚⩄ౣ⚿วጀ㩷 䋰㩷 㪚㪎㪇㪆㪚㫃㪘 㫃㪧㪺㩷 䊅䊉㩷 䉫䊧䉟䊮㩷 㪚㪎㪇㪆㪚㫃㪘㫃㪧 㪺㩷 ಽሶ㈩ะ㩷 ബሶ㩷 䍪䍼䍹䍍䍕䍻䍖䍼㩷 ᬺේ★㩷 V́䋱䋶䋵 ⚿᥏ᕈ 㪚㪎㪇㩷 㪆㪛㪙㪧㩷㩷 㪙㪟㪡㩷 ⚿᥏ᕈ㪚㪎㪇㩷 㪆㪛㪙㪧㩷㪙㪟㪡㩷 㪙㪚㪧㪆㪧㪚㪫㪙㪠㩷 䉺䊮䊂䊛㩷 ⚿᥏ᕈ㪚㪎㪇㩷 㪆㪛㪙㪧㩷㪙㪟㪡㩷 㪙㪚㪧㪆㪧㪚㪫㪙㪠㩷 C60-5%DBP䋺శ㔚ᄌ឵ጀ䋲㩷 MoO3 ITO 䉧䊤䉴ၮ᧼ 㪊䈧䈱ᚻᴺ䉕หᤨ䈮ታᣉ㩷 㪎㪅㪇㬍㪈㪅㪈㪋㪌㬍㪈㪅㪏㪌㪔㪈㪋㪅㪏㩼㩷 㽴㪚㪩㪱䈮ᯏ㪜㪣↪㔚ሶャㅍ᧚ᢱ䉕ណ↪㩷 䋹㪆䋱䋶㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷Ꮊᄢቇ㩷 㐿 㪭㪄㽲㪄㪙㩷㩷ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪈㪀ᯏ䊶䊅䊉⇇㕙Ⲣว䊒䊨䉶䉴ᛛⴚ㩷 㩷 ᯏ䊅䊉䊏䊤䊷᭴ㅧᒻᚑ䈫ᯏᄥ㓁㔚ᳰ䈻䈱ᔕ↪㩷 䊅䊉䊏䊤䊷ᒻᚑᣇᴺ㩷 ℂᗐ⊛䈫䈘䉏䉎ᄥ㓁㔚ᳰ᭴ㅧ㩷 㒶㩷 ᭂ 㔚㩷 ሶ 30nm 30nm 㪚㫌㪧㪺㩷㩿㫇ဳᯏඨዉ㪀㩷 ⚂100nm pဳ⚿วጀ ബሶ nဳ⚿วጀ 㪧㪫㪚㪛㪘㩷㩿䊁䊮䊒䊧䊷䊃᧚ᢱ㪀㩷 䉲䊷䊄ጀᒻᚑ㩷 ⚿᥏ᚑ㐳㩷 ᱜ㩷 ሹ 㓁㩷 ᭂ ᄥ㓁㔚ᳰ․ᕈ䈱Ყセ㩷 ᄖㇱశ 㪫㪜㪤ⷰኤ㩷 㪚㫌㪧㪺䊅䊉䊏䊤䊷㩷 Φ 㪊㪇㫅㫄㪃㩷㐳䈘㪈㪇㪇㫅㫄 (mA/cm2) 㪠㪫㪦㩷 䉧䊤䉴ၮ᧼㩷 ᬺේ★㩷 V́䋱䋶䋴 (V) FF (%) ࣆ࣮ࣛ࡞ࡋ -1.77 0.61 0.43 0.47 ࣆ࣮ࣛ࠶ࡾ -1.61 0.56 0.37 0.33 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷Ꮊᄢቇ㩷 䋱䋰㪆䋱䋶㩷 㐿 㪭㪄㽲㪄㪙㩷㩷ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪈㪀ᯏ䊶䊅䊉⇇㕙Ⲣว䊒䊨䉶䉴ᛛⴚ㩷 㩷 ਛᕈ☸ሶ䊎䊷䊛䈮䉋䉎ᯏ⭯⤑䈱ૐ៊்䉣䉾䉼䊮䉫㩷 㩷 ਛᕈ☸ሶ䊎䊷䊛䉣䉾䉼䊮䉫ⵝ⟎䈱ⷐ㩷 Neutral Beam Source 㪛㪚 High Density Plasma e 䋭 + 䋭 + 䋭 13.56MHz ਛᕈ☸ሶ䊎䊷䊛䈮䉋䉎ᯏ⭯⤑䉣䉾䉼䊮䉫⚿ᨐ㩷 pGG uGG |} CllGG + 䋭 + P 䋭 + 㪘㫃㪑 㪈 㪇 㪇 㫅 㫄 㪣㫀㪝㪑 㪇 㪅 㪌 㫅 㫄 㪘㫃㪑 㪈 㪇 㪇 㫅 㫄 㪣㫀㪝㪑 㪇 㪅 㪌 㫅 㫄 Alq3 :50nm α-NPD:50nm Alq3 :50nm α-NPD:50nm Alq3 :50nm α-NPD:50nm 㪠 㪫㪦㪂 㫊㫌 㪹 㫊㫋㫉㪸 㫋㪼 㪠 㪫㪦㪂 㫊㫌 㪹 㫊㫋㫉㪸 㫋㪼 㪠 㪫㪦㪂 㫊㫌 㪹 㫊㫋㫉㪸 㫋㪼 + 䋭 + 䋭 + 䋭 䋭 䋭 + 䋭 + + + 䋭 + 䋭 + 䋭 䋭 䋭 䋭 䋭 䋭 X Quartz Tube Metal Electrodes Organic Layers ITO + Substrate XWG hG Before Irradiation After 30min Irradiation Metal Electrodes Metal Electrodes Process Chamber Cl (1eV䌾) uG G Carbon Plate Organic Layers Metal Electrodes Organic Layers Below Electrode Organic Layers Metal Electrodes ITO Metal Electrodes Metal Electrodes Halfway Etched Organic Layers ITO (a) MgAg/Ag(200nm) 䋨Organic Layers Etched䋩 Organic Layers Below Electrodes Organic Layers ਛᕈ☸ሶ䊎䊷䊛䈮䉋䉎⋚ᒻᯏ㪜㪣䊂䊋䉟䉴㩷 After 60min Irradiation 䋨40~45nm etched䋩 㪛㪚 Neutral Beam 㪘㫃㪑 㪈 㪇 㪇 㫅 㫄 㪣㫀㪝㪑 㪇 㪅 㪌 㫅 㫄 (b) (c) ਛᕈ☸ሶ䊎䊷䊛䈮䈍䈇䈩․ᕈഠൻ䋷䋦䋺⋡ᮡ䉕㆐ᚑ㩷 Alq3䋨50nm䋩 α-NPD䋨50nm䋩 ITO 8 VJ 8 Q NVC I G ਛᕈ☸ሶ䊎䊷䊛䋨O2, N2, Ar䋩 ਛᕈ☸ሶ ࡆࡓᾖ 4 G H 0 0 $ 4 G H ⇼ૃࡊ࠭ࡑ ᾖ 0 2 NC UO C ᬺේ★㩷 V́䋱䋵䋶 8 " O # EO 4 G Hߣ ߩ Ყセ 8 Q NVC I G 4 G Hߣߩ Ყセ 䋱䋱㪆䋱䋶㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷Ꮊᄢቇ㩷 㐿 㪭㪄㽲㪄㪙㩷㩷ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷㩷 㩷㩿㪉㪀ᯏ㜞ᰴ᭴ㅧᒻᚑ䊒䊨䉶䉴ᛛⴚ㩷 ಽሶ㈩ะ䇮䈶䊅䊉᭴ㅧ䈮䉋䉎ᯏ㪜㪣శข䉍䈚ല₸䈱ะ㩷 శ䈱㪉㪇ޯ㪉㪌䋦䈚䈎ᚒ䇱䈱⋡䈮ዯ䈎䈭䈇㩷 ಽሶ㈩ะ䋧䊅䊉᭴ㅧ䈪శข䉍䈚䉝䉾䊒㩷 ౝㇱ㊂ሶല₸䋺㪌㪇䋦㩷 ᄖㇱ㊂ሶല₸䋺㪈㪍䋦㩷 ⁁䈱ಽሶ䉕⸳⸘㩷 శข䉍䈚ല₸䋺䋳䋲䋦㩷 ᓥ᧪Ყ䋺㪈㪅㪍䈱䉝䉾䊒㩷 External quantum efficiency (%) 102 101 100 10-1 10-2 mA/cm2 (3.8 V) KEQE = 15.8% 6wt%-e1Pt/mCP (20 nm) 10-2 10-3 10-2 10-1 100 101 102 103 Current density (mA/cm2) ᬺේ★㩷 V́䋱䋷䋲 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷Ꮊᄢቇ㩷 䋱䋲㪆䋱䋶㩷 㐿 㪭㪄㽲㪄㪙㩷㩷ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪉㪀ᯏ㜞ᰴ᭴ㅧᒻᚑ䊒䊨䉶䉴ᛛⴚ㩷 ಽሶ㈩ะ䇮䈶䊅䊉᭴ㅧ䈮䉋䉎ᯏ㪜㪣శข䉍䈚ല₸䈱ะ㩷 ЇІؕெỉཎࣉể˺ᙌἩἿἍἋ ஊೞἜἠἦἻὊ ἻὅἒἲễࣇኬЇІ ˺ᙌ᧓ầ᩿ᆢỆ̔܍Ẳễẟ ᵡᶓᵮᵡ ᵮᵲᵡᵢᵟ ನᡯᾉᵥᶊᵿᶑᶑᵍᵮᵲᵡᵢᵟᵆᵑᶌᶋᵇᵍᵡᶓᵮᵡᵆᵑᶌᶋᵇᵍᵡᶓᵮᵡᵆᵑᵎᶌᶋᵇ ࠘ᩓ᧸ഥд ἾἊἋἚ Ἂ ᵥᶊ ᵥᶊᵿᶑᶑ ᾔᾑༀݧ ᙹЩႎễࣇኬЇІ ˺ᙌ᧓ầ᩿ᆢỆ̔܍ ᵥᶊᵿᶑᶑ ᵥᶊ ʑ༞ ྵ෩ ྵ 㪈㪅㪊㪈㩷 㪈㪅㪉㪊 㪈㪅㪉 ᯏ㪜㪣శข䉍䈚ല₸㩷 㩷 ಽሶ㈩ะ䈪㪈㪅㪍㩷 ㈩ะ ะ䈪 䊅䊉᭴ㅧዉ䈪㪈㪅㪊㩷 㩷 ⚵䉂ว䉒䈞䈮䉋䉍 ᦝ䈭䉎ല₸䉝䉾䊒䈏น⢻㩷 㪈㪅㪋㪈㩼㩷 㪈㪅㪊㪊㩼㩷 㪈㪅㪋 㪜㪨㪜㪲㩼㪴 ᶕᵿᶒᶃᶐ ࠘ᩓ᧸ഥдỉᨊӊ శข䉍䈚ല₸䈱ะ㪊㪈䋦䉕㆐ᚑ㩷 㪈㪅㪍 ITO(155nm) MoO3(30nm) NPD (90nm) Alq3(X nm) DYETM(20nm) Al(100nm) Nano structure Glass ᶑᶓᶀᶑᶒᶐᵿᶒᶃ ᶑᶓᶀᶑᶒᶐᵿᶒᶃ ᵣᵠἼἏἂἻἧỵὊ 㪈㪅㪇 㪈㪅㪇㪏㩼㩷 㪇㪅㪏 㪇㪅㪍 ᐔမ㒶ᭂ㩿ታ᷹㪀 㪇㪅㪋 ಳಲ㒶ᭂ䋨ታ᷹䋩 㪇㪅㪉 ᐔမ㒶ᭂ䋨⸃ᨆ୯䋩 㪇㪅㪇 㪉㪇 㪊㪇 㪋㪇 㪌㪇 㪍㪇 㪎㪇 㪏㪇 㪐㪇 㪘㫃㫈㪊 ⤑ෘ㪲㫅㫄㪴 ᬺේ★㩷 V́䋱䋷䋲 䋱䋳㪆䋱䋶㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷Ꮊᄢቇ㩷 㐿 㪭㪄㽲㪄㪙㩷㩷ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪉㪀ᯏ㜞ᰴ᭴ㅧᒻᚑ䊒䊨䉶䉴ᛛⴚ㩷 䊐䊧䉨䉲䊑䊦ᾲ㔚䊂䊋䉟䉴㐿⊒䈮䉋䉎ታ↪ൻ䈻䈱น⢻ᕈ䉕␜䈜㩷 ᯏ䊶ήᯏ䊊䉟䊑䊥䉾䊄ᾲ㔚⚛ሶ䈪㫇ဳ䋺㪱㪫㪈㪅䋳䇮㫅ဳ䋺㪱㪫㪈㪅㪌䉕ታ㩷 ⁓䈇䋺㪈㪇㪇㫅㫄એਅ䈱ဋ⾰䈭䊅䊉䊘䉝᭴ㅧ䉕䊁䊮䊒䊧䊷䊃䈫䈚䈩䊅䊉䊘䊷䊤䉴ᾲ㔚ඨዉ䉕ᒻᚑ㩷 䊑䊨䉾䉪䉮䊘䊥䊙䊷䋨㪙㪚㪧䋩䉕䊁䊮䊒䊧䊷䊃䈫䈜䉎㩷 ᯏ㪄ήᯏ䊊䉟䊑䊥䉾䊄᧚ᢱ䈱ᾲ㔚䊂䊋䉟䉴㩷 䊅䊉䊚䉴䊃ᴺ䋺㪏㪇㫅㫄䈱䊅䊉䊘䉝᭴ㅧ䈮ᚑഞ㩷 䈚䈎䈚䇮⤑ෘ䈮㒢䈏䈅䉍䊂䊋䉟䉴ൻ䈏࿎㔍㩷 㪙㪚㪧䈮䉋䉎䊁䊮䊒䊧䊷䊃㩷 Mn㧦52100g/mol Mw㧦54700g/mol 䊅䊉䊘䊷䊤䉴ᾲ㔚⚛ሶ㩷 㪱㪫㩷㪔㩷㪈㪅㪌㩷 PDI㧦1.05 ⹜䈚䈢䊐䊧䉨䉲䊑䊦ᾲ㔚䊂䊋䉟䉴䈫䊂䊝䊮䉴䊃䊧䊷䉲䊢䊮㩷 䉶䊮䉲䊮䉫䊡䊆䉾䊃㩷 㓁ᭂ㉄ൻ䉝䊦䊚䊅䉕䊁䊮䊒䊧䊷䊃䈮㪱㪫㪈㪅㪏䉕㆐ᚑ㩷 䈚䈎䈚䇮⥄┙⤑䈫䈭䉌䈭䈇䈢䉄䊂䊋䉟䉴ൻ䈏࿎㔍㩷 㪱㪫㪔㪈㪅㪏 䃨⇇䊃䉾䊒䊧䊔䊦䃨 䊘䊷䊤䉴䉝䊦䊚䊅 㪙㫀㪉㪫㪼㪊䉕⫳⌕ 䉷䊷䊔䉾䉪ଥᢙ 㔚᳇વዉᐲ ᾲવዉ₸ 䋺㪈㪐㪎㪅㪌㩷μ 㪭㪆㪢 䋺㪋㪇㪇㪪㪆㪺㫄 䋺㪇㪅㪉㪌㩷㪮㪆㩿㫄䍃㪢㪀䊋䊦䉪‛ᕈ୯䈱㪈㪆㪌 ᬺේ★㩷 V́䋱䋷䋴 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷Ꮊᄢቇ㩷 䋱䋴㪆䋱䋶㩷 㐿 㪭㪄㽲㪄㪙㩷㩷ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪉㪀ᯏ㜞ᰴ᭴ㅧᒻᚑ䊒䊨䉶䉴ᛛⴚ㩷 ᯏඨዉᔕ↪ᾲ㔚䊂䊋䉟䉴㩷 ᾲ㔚․ᕈ䋨䊌䊪䊷䊐䉜䉪䉺䊷䋩ᓥ᧪Ყ㪉ᩴ䉝䉾䊒㩷 ᯏ⢻ಽ㔌Ⓧጀဳᯏ⭯⤑ᾲ㔚⚛ሶ䈪⇇䊃䉾䊒䊧䊔䊦䈱䊌䊪䊷䊐䉜䉪䉺䊷䉕㆐ᚑ㩷 pဳ䋨F4-TCNQ/P3HT/HMDS䋩 nဳ䋨Cs2CO3/ C60 / DPhBDT䋩 PF= 27 Ag PF= 20 μW/mK2 μW/mK2 Ag Ag 䉨䊞䊥䉝↢ᚑጀ Cs2CO3 Ag F4-TCNQ 䉨䊞䊥䉝ャㅍጀ C60 P3HT 㕙ᡷ⾰ጀ DPh-BDT㩷 Substrate HMDS Substrate ⋥ᯏ⭯⤑ᾲ㔚䊂䊋䉟䉴䉕⹜䋺ታ↪ൻ䈻䈱น⢻ᕈ䉕␜䈜㩷 ᬺේ★㩷 V́䋱䋷䋷 䋱䋵㪆䋱䋶㩷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷Ꮊᄢቇ㩷 㐿 㪭㪄㽲㪄㪙㩷㩷ᯏ᧚ᢱⲢว䊒䊨䉶䉴ᛛⴚ䈱㐿⊒㩷 㩷㩿㪉㪀ᯏ㜞ᰴ᭴ㅧᒻᚑ䊒䊨䉶䉴ᛛⴚ㩷 ᚑᨐଦㅴ䋺䊒䊤䉵䊝䊮㡆䉝䊮䊁䊅᭴ㅧ䉕ᜬ䈧⿒ᄖ✢䉶䊮䉰㩷 䊃䉾䊒䉻䉡䊮᭴ㅧ䈮䉋䉎䉝䊮䊁䊅䉝䊧䉟䈫ᯏ䊅䊉䊏䊤䊷䈱ㆡ↪䈮䉋䉎ലᨐ䉕⏕㩷 㪚㫌㪧㪺䊅䊉䊏䊤䊷㩷 Φ 㪊㪇㫅㫄㪃㩷㐳䈘㪈㪇㪇㫅㫄㩷 ᯏ䊅䊉䊏䊤䊷䉕㩷 㪘㫌⫳⌕䈮䉋䉍䊂䊋䉟䉴ൻ㩷 ⌀ⓨ⫳⌕䈮䉋䉎㪪㫀ၮ᧼䈻䈱㩷 㪚㫌㪧㪺䊅䊉䊏䊤䊷ᒻᚑ䈮ᚑഞ㩷 ⚂Φ 㪌㪇㫅㫄䈱ಳಲ᭴ㅧ㩷 䊒䊤䉵䊝䊮㡆䈮䉋䉍⿒⦡ൻ㩷 㪠㪫㪦㩷 㪠㪩㗔ၞ䈮䈍䈔䉎ๆჇᄢ㩷 䉧䊤䉴ၮ᧼㩷 20 䊃䉾䊒䉻䉡䊮䈮䉋䉎㩷 㪘㫌䉫䊧䉟䊁䉞䊮䉫᭴ㅧᒻᚑ䈫䉝䊧䉟ൻ㩷 ࿁᛬శ䈏䈋䉎㩷 ▎ᚲ䈏㪥㪠㪩ᬌㇱ 䋨㪋㬍㪋䉝䊧䉟䋩㩷 FP 㪚㪸㫋㪿㫆㪻㪼㩷 b) a) 16 㪚㫌㪧㪺䊅䊉䊏䊤䊷↪㩷 㪘㫌䊅䊉䉫䊧䉟䊁䉞䊮䉫㩷 Responsivity[mA/W] ข䉍䈚㈩✢㩷 18 14 b)) b 12 b) 10 a) 8 6 ෳᾖ䉻䉟䉥䊷䊄 (Au/n-Si Schottky diode) 4 㪘㫅㫆㪻㪼㩷 䊃䊧䊮䉼㩷 䊅䊉᭴ㅧᬌ䉹䊷䊮㩷 㩷 ⛘✼ಽ㔌㩷 2 0 1000 㪪㪦㪠ၮ᧼㩷 ᬺේ★㩷 V́䋴䋲䋷 㪙㪜㪘㪥㪪㩷㪣㪸㪹㫆㫉㪸㫋㫆㫉㫐㩷 㪣㫀㪽㪼㩷㪙㪜㪘㪥㪪㩷䉶䊮䉺䊷Ꮊᄢቇ㩷 ⚂㪈㪇䈱㩷 ᗵᐲ䉕⏕㩷 1100 1200 1300 1400 1500 Wavelength[nm] 䋱䋶㪆䋱䋶㩷
© Copyright 2024 ExpyDoc
