MM-16 Spectroscopic Ellipsometer Specifications

TN06
MM-16 Spectroscopic Ellipsometer Specifications
Standard Configuration
Light source
Halogen & LED lamp
Spectral range
430 – 850 nm
Spot size
1 x 3 mm
Detector
CCD – Resolution: 2 nm
Sample stage
150 mm, manual height (20 mm), tilt, theta adjustment
Goniometer
Manually adjustable angle from 55° to 90° by step of 5°
Mueller Matrix capability
All 16 elements in a few seconds
Software
Integrated DeltaPsi2 spectroscopic ellipsometry software package
System Performance
Measurement speed
Adjustable from 2 to 15 s
Accuracy
Repeatability
Stability
Thickness: ± 4 Å
Refractive index (632.8nm): ± 0.002
± 0.2 Å – Tested on NIST 150 Å SiO2/Si
± 0.3 Å – Tested on NIST 130 Å SiO2/Si
Accuracy on fused silica sample
Refractive index: ± 0.004
Tested on NIST 1000 Å SiO2/Si
Automatic XY sample stage
Temperature controlled stage
Rotation stage
Automatic goniometer
Microspot
CCD camera
Pattern recognition system
In-situ configuration
200 mm, manual height (4 mm) and tilt adjustment
Range: -196°C to 600°C
150 mm, automated 360° rotation, manual height (20 mm) and tilt
adjustment
Automatically adjustable angle from 40° to 90° by step of 0.01°
200 µm
For real-time imaging of the sample
Cognex® software
Adapter kit and strain free windows
Facility Requirements
Dimension (w x d x h in mm)
Weight (kg)
Voltage
USB port
Ellipsometer: 650 x 470 x 600 – Control Unit: 520 x 500 x 220
Ellipsometer: 24 kg – Control Unit: 35 kg
110/220 VAC – 50/60 Hz
Available from the front panel
Worldwide Customer Support
HORIBA Jobin Yvon manufactures state-of-the-art thin film characterization and optical instrumentation, and is today
the leading supplier of thin film metrology and optical solutions to original equipment manufacturers (OEMs). Our instruments are manufactured under a strict quality assurance program and are supported by a worldwide network of strategically located facilities in the United States, Europe and Asia that are ready to provide assistance when and where it
is needed.
This commitment to product excellence and continued support is part of the HORIBA Jobin Yvon culture.
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This document is not contractually binding under any circumstances - Printed in France - 05/2005
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