PicoBlade® Picosecond Micromachining Laser Precision

PicoBlade® Picosecond Micromachining Laser
Precision and flexibility for optimized processes—a fully featured,
machine-ready system
The PicoBlade laser system is a versatile tool for processing virtually
any material with the highest precision and reliability.
Many of today’s picosecond lasers generate an excessively high fixed pulse energy for
applications that cannot be adjusted without reducing the average power overall. This
limitation results in poor production throughput, even for high-power laser systems. In
contrast, the PicoBlade laser system lets you adjust the pulse energy to meet specific
application values—at full average power and maximum process speed. This is the most
flexible high-precision, high-speed picosecond laser on the market.
Features
• Industrial, rugged, unibody design
• Easy integration
• Horizontal or vertical mounting
• Fully detachable umbilical
• Cost-effective, on-site maintenance
• High productivity:
–– Wide range of PRF
–– A/D modulation capability
–– FlexBurst™ technology
Options
• 532 nm, 355 nm, and auto-switching
• Lower-power, lower-cost configurations
• High pulse energy
• Super-sync for high-speed line scanners
• Process shutter
• Customized umbilical length
Applications
• High-speed precision machining
• Glass cutting, welding, scribing
• Processing hard materials (diamond, sapphire,
carbide, ceramics, and CVD)
Application photography courtesy of Lightmotif
• Semiconductor dicing
• Drilling of multiple materials
• Selective thin-film ablation
www.jdsu.com
Data Sheet
PicoBlade Picosecond Micromachining Laser
50
1064 nm
Power (W)
40
30
532 nm
20
355 nm
10
0
100
1000
10000
Repetition rate (kHz)
High-power PicoBlade typical power versus
repetition rate for 1064, 532, and 355 nm*
High-power PicoBlade typical pulse energy versus
repetition rate for 1064, 532, and 355 nm*
Medium-power PicoBlade typical output power
versus repetition rate for 1064, 532, and 355 nm
Medium-power PicoBlade typical pulse energy versus
repetition rate for 1064, 532, and 355 nm
Low-power PicoBlade typical output power
versus repetition rate for 1064, 532, and 355 nm
Low-power PicoBlade typical pulse energy versus
repetition rate for 1064, 532, and 355 nm
Output Beam Profile
High-power PicoBlade output beam
Medium-power PicoBlade output beam
Low-power PicoBlade output beam
* The PicoBlade system's optimum power output for green and UV wavelengths can be engineered to the customer's optimal repetition rate.
www.jdsu.com
2
PicoBlade Picosecond Micromachining Laser
Dimensions Diagram for IR Version
137.59
150
9.2
86.4
Beam Exit
1064 nm
590
71
753
306
42.5
(1139.2)
162.5
162.5
min 100
55
min 100
410
Clearance area for better service and installation
Clearance area for better service and installation
Dimensions Diagram for theSingle NLO G or UV Version
146.1
137.59
86,4
Beam Exit
355 nm
min100
9.2
42.5
590
753
(1279.2)
211
Clearance area for better service and installation
A2
B1
B2
Clearance area for better service and installation
min200
min100
410
A1
162.5
(205)
162.5
205
Clearance area for umbilical
Dimensions Diagram for the autoNLO IR, G, and UV Versions
358.7
281.3
55
Beam Exit Beam Exit
532 nm
355 nm
Beam Exit
1064 nm
146.1
86.4
9.2
590
753
(1375.24)
395
322
A1
306
42.5
162.5
162.5
Clearance area for better service and installation
A2
B2
Clearance area for better service and installation
min200
B1
200,04
min100
410
min100
14
Clearance area for umbilical
www.jdsu.com
3
PicoBlade Picosecond Micromachining Laser
Specifications
Parameter
Output power
1064 nm
532 nm
355 nm
High-power PicoBlade with
Pulse-on-Demand (PoD)
Up to 50 W
Up to 25 W
Up to 15 W
Medium-power PicoBlade with PoD
Up to 12 W
Up to 6 W
Up to 3 W
Low-power with PicoBlade with PoD
Up to 4.4 W
Up to 0.9 W
Up to 0.4 W
Repetition rate
Single shot to 8 MHz
Pulse energy
Up to 200 μJ
Pulse energy stability (>1 kHz)
Spatial mode
10 ps
20.0 MW
12.5 MW
7.5 MW
High-power PicoBlade with PoD
TEM00, M2<1.2
TEM00, M2<1.2
TEM00, M2<1.3
Medium-power PicoBlade with PoD
TEM00, M2<1.2
TEM00, M2<1.2
TEM00, M2<1.3
Low-power with PicoBlade with PoD
TEM00, M2<1.2
TEM00, M2<1.2
TEM00, M2<1.3
Pointing stability
<40 μrad/C
Turn-on time
<15 min
Voltage (single phase)
100 – 240 V AC
Frequency
50 – 60 Hz
Input power (single phase)
Laser head
(L x W x H, weight)
Up to75 μJ
<0.5% rms
Pulse width measured at 1064 nm
Peak power
Up to 125 μJ
V1 (1 output: IR)
V2 (1 output: G or UV)
V3 (3 outputs: IR, G, UV)
2100 VA
1139 x 410 x 138 mm, 80 kg
N/A
N/A
N/A
1279 x 410 x 138 mm, 80 kg
1279 x 410 x 138 mm, 80 kg
1375 x 410 x 138 mm, 80 kg
Power supply (fits 19-in rack)
(L x W x H, weight)
435 x 139 (3 RU) x 483 mm, 26 kg
Chiller (fits 19-in rack)
(L x W x H, weight)
640 x 267 (6 RU) x 483 mm, 42 kg
Laser Safety
www.jdsu.com
4
PicoBlade Picosecond Micromachining Laser
Ordering Information
For more information on this or other products and their availability, please contact your local JDSU account manager or JDSU directly at
1-800-498-JDSU (5378) in North America and +800-5378-JDSU worldwide or via e-mail at [email protected].
Laser Head
PB-
-
-
-
-
- 00
Power Level
Code
NLO
Code
Sync 1
High
H
1064 nm
0R
No options
0
Medium
M
Single NLO 532 nm
sG
CLX1
C
Low
L
Single NLO 355 nm
sV
Energy
E
Auto NLO 1064+532 nm
aRG
Auto NLO 1064+355 nm
aRV
Sync 2
Code
Auto NLO 532+355 nm
aGV
PoD
Code
No PoD
0
PoD
P
PRF
Auto NLO 1064+535+355 nm aRGV
Code
50 kHz
0050
200 kHz
0200
Shutter
Code
No options
0
Shutter
S
Product Code
Description
Code
No options
0
Sync2
T
Power Monitor
Code
No options
0
(Power) monitor
M
Accessories
Description
Product Code
Chiller Hoses
Controller
Controller without shutter electronics
PB-PS-H-0-00
3 m chiller hoses
PB-CH-A30S
Controller with shutter electronics
PB-PS-H-S-00
5 m chiller hoses
PB-CH-A50S
3 m chiller hoses for NLO module
PB-CH-A30A
PB-CH-A50A
Chiller
Water-water, US with 110 V AC
CH-M-W110
5 m chiller hoses for NLO module
Water-water, European with 220 V AC
CH-M-W220
Other Accessories
Air-water, US with 110 V AC
CH-M-A110
ZeroAir generator (only for autoNLO including UV)
PB-ZA
Air-water, European with 220 V AC
CH-M-A220
Vertical mounting
PB-VER
Umbilical Cable
3 m standard, right orientation
PB-PS-A30R
5 m standard, right orientation
PB-PS-A50R
3 m standard, left orientation
PB-PS-A30L
5 m standard, left orientation
PB-PS-A50L
Notes:
1. CLX-110 phase-locked clock synchronizer to synchronize the repetition rate of a laser system to a
reference clock signal.
2. Sync enables control of the timing of the output pulses in nanoseconds.
Example of a Complete Order
PB-H-P-0200-aRGV-000M-00 (high power, PoD, autoNLO with all three
wavelengths, and a power monitor as option)
CH-M-A220 (chiller, air-water, European with 220 V AC)
PB-CH-A30A (3 m chiller hoses for UV NLO module)
PB-PS-H-0-00 (controller without shutter electronics)
PB-PS-A30R (3 m umbilical cable, right orientation)
PB-ZA (ZeroAir generator for UV)
North America Worldwide
www.jdsu.com
Toll Free: 800 498-JDSU (5378)
Tel: +800 5378-JDSU
© 2014 JDS Uniphase Corporation Product specifications and descriptions in this document subject to change without notice.
30175857 501 1014 PICOBLADEPMLASER.DS.CL.AE October 2014