Summary of Standard Photoresists Available

Chapter 4.1
Summary of Standard Photoresists Available
Standardized Photoresists at the Marvell Nanofabrication Laboratory
Producer
Wavelength
Dispense
Location
Type
Standard
Thicknesses
Developer
Stripper
UV210-0.6
Dow Chemical
DUV
UV26-3.0
Dow Chemical
DUV
OiR-906-12
FujiFilm
i-line **
SPR-220-7.0
Dow Chemical
i-line **
S1818
Dow Chemical
g-line *
OCG 825 35CS
FujiFilm
g-line *
(svgcoat6)
Positive
(svgcoat6)
Positive
(svgcoat 1 & 2)
Positive
(svgcoat 1 & 2)
Positive
(headway 1 & 2)
Positive
(svgcoat 1 & 2)
Positive
3.3, 4.7 µm
1.2, 1.7, 2.1,
2.8 µm
10.0 µm
1.3, 2.3 µm
OPD-4262
PRS-3000
MF-26A
PRS-3000
1.65 µm
Microposit MF319
PRS-3000
0.42, 0.90 µm
MF-26A
MF-26A
PRS-3000
PRS-3000
* May also be used with i-line
** May also be used with g-line
OCG 934 3:2
PRS-3000

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