2015 TSMC CyberShuttle Service Plan Version: 1.2 Oct. 24, 2014 Tape-In Date (TWN Time)/ TM # / Fab / Captain / Technology Availability Shuttle Type (Technology) 20 nm Logic, SoC (0.9/1.8V) 28 nm Logic, HPM (0.9/1.8V, 0.9/2.5V) Logic, HPC (0.9/1.8V, 0.9/2.5V) Logic, HP (0.85/1.8V, 0.85/2.5V) Logic, LP (1.05/1.8V, 1.05/2.5V) Logic, LP Plus (1.05/1.8V, 1.05/1.05/1.8V ) Logic, LP-RF (1.05V/1.8V) Logic, ULP (0.7/1.8V) Logic, HPL (1.0&1.8V, 1.0/2.5V) Logic, HPL-RF (1.0&1.8V, 1.0/2.5V) 40nm LP & 45nm GS (45GS = 40G) Logic, 40LP (1.1/1.8V, 1.1/2.5V) Logic, 40LP Plus (1.1/2.5V) Mixed-Signal/RF, 40LP (1.1/1.8V, 1.1/2.5V) Logic, 45GS (45GS = 40G) (0.9/1.8V, 0.9/2.5V) 55 nm Logic, G Plus (1.0/1.8V, 1.0/2.5V) Logic, LP (1.2/1.8V ,1.2/2.5V) Logic, Mixed Signal/RF, ULP(0.9V/1.8V, 0.9V/2.5V) Mixed-Signal/RF, LP(1.2/1.8V, 1.2/ 2.5V) EmbFlash (1.2/2.5V) High Voltage (1.2/6/32V) 65 nm (Part 1) Logic, LP/DGO (1.2/2.5V,1.2/3.3V) Logic, G Plus/DGO (1.0/1.8V, 1.0/2.5V, 1.0/3.3V) Logic, LP-based TGO (1.0/1.2/2.5V) Logic, ULP (1.0/2.5V) Mixed-Signal/RF, GP(1.0/ 2.5V) Mixed-Signal/RF, LP(1.2/ 2.5V) 65 nm (Part 2) Logic, LP/DGO (1.2/2.5V,1.2/3.3V) Logic, G Plus/DGO (1.0/1.8V, 1.0/2.5V, 1.0/3.3V) Logic, LP-based TGO (1.0/1.2/2.5V) Logic, ULP (1.0/2.5V) Mixed-Signal/RF, GP(1.0/ 2.5V) Mixed-Signal/RF, LP(1.2/ 2.5V) 80 nm Logic, GC (1.0/2.5V, 1.0/3.3V) Logic, High Performance (1.2/2.5V) Mixed-Signal, GC (1.0/2.5V, 1.0/3.3V) High Voltage (1.2/5/6/32V) 85 nm Logic, G (1.0/1.8V, 1.0/2.5V, 1.0/3.3V) Logic, LP (1.2/2.5V, 1.2/3.3V) Logic, ULP (1.0/2.5V) Mixed-Signal/RF, LP (1.2/3.3V) Jan Feb Mar Jan-14 TMFG61 Fab15 Vincent V V V V V V V V V Jan-7 TMFG81 Fab14 Jeff V V V V Jan-28 TMGI01 Fab14 FK V V V V Feb-4 TMFG62 Fab15 Francis V V V V V V Mar-18 TMFG63 Fab15 ZY V V V V V V V V V Mar-4 TMFG83 Fab14 CC V V V V Mar-11 TMGI03 Fab14 FK V V V V V Jan-14 TMGI21 Fab14 ZY V V V V V Jan-28 TMGI41 Fab12 ZY V V V V V V V V Feb-3 TMFG82 Fab12 Lynn V V V V Feb-4 TMGI02 Fab12 FK V V V V Feb-4 TMGI22 Fab12 Vincent V V V V V V Feb-25 TMGI42 Fab14 Vincent V V V V V Feb-3 TMFG93 Fab12 CC V V V V Apr Apr-21 TMGI79 Fab14 CC V Apr-15 TMFG64 Fab15 FK V V V V V V V V Apr-8 TMFG84 Fab14 Lynn V V V V Apr-7 TMGI04 Fab14 Francis V V V V Mar-11 TMGI23 Fab14 Vincent V V Apr-7 TMGI24 Fab14 ZY V V V V V Mar-25 TMGI43 Fab14 Francis V V V V V Apr-22 TMGI44 Fab12 Vincent V V V V V V V V V Mar-4 TMFG73 Fab12 Howard V V V V May Jun May-20 TMFG65 Fab15 Vincent V V V V V V V V V May-6 TMFG85 Fab12 Shirley V V V V May-13 TMGI05 Fab12 Francis V V Jun-16 TMFG66 Fab15 Francis V V V V V V V V May-13 TMGI25 Fab12 ZY V V V V V V May-27 TMGI45 Fab14 Francis V V V V V May-20 TMFG94 Fab14 Lynn V V V V V Jun-2 TMFG86 Fab14 Lynn V V V V Jun-10 TMGI06 Fab14 ZY V V V V V Jun-10 TMGI26 Fab14 FK V V V V V Jun-24 TMGI46 Fab14 FK V V V V V 90 nm Logic, G (1.0/1.8V, 1.0/2.5V, 1.0/3.3V, 1.0/1.8/3.3V) Logic, LP (1.2/2.5V, 1.2/3.3V) Logic, GT (High Performance) (1.2/2.5V) Mixed-Signal/RF,G(1.0/1.8V, 1.0/2.5V, 1.0/3.3V, 1.0/1.8/3.3V) Mixed-Signal/RF, LP (1.2/2.5V, 1.2/3.3V) EmbFlash, LP (1.2/3.3V) 0.11 um Logic, G (1.2/3.3V), FSG Mixed-Signal, G (1.2/3.3V), FSG Mixed-Signal, G (1.2/3.3V), FSG, Hybrid Mixed-Signal, LP (1.2/3.3V), FSG, Hybrid 0.12 um Logic, G (1.2/3.3V), FSG 0.13 um Logic, G (1.2/2.5V,1.2/3.3V); FSG Logic, LP (1.5/2.5V,1.5/3.3V); FSG Logic, LV (1.0/2.5V,1.0/3.3V); FSG Mixed-Signal/RF, G (1.2/2.5V,1.2/3.3V); FSG Mixed-Signal, LP (1.5/3.3V); FSG High Voltage, BCD (1.5/5/10/20/28/36V) High Voltage, BCD (1.5/3.3/5/10/20/28/36V) 0.152um Logic, G (1.8/3.3V) Mixed-Signal, LP (1.8/3.3V) Mixed-Signal, G (1.8/3.3V) 0.15/0.16 um 0.15um Logic, G (1.5/3.3V) 0.15um Logic, LV (1.2/3.3V) 0.16um Logic, G (1.8/3.3V) 0.16um Logic, G (1.8/3.3V), Embedded OTP 0.16um Mixed-Signal, G (1.8/3.3V) 0.16um Mixed-Signal, G (1.8/3.3V), Embedded OTP 0.16um Mixed-Signal, LP (1.8/3.3V) 0.16um Mixed-Signal/RF, G (1.8/3.3V) 0.18 um: Part 1 Mixed-Signal/RF, G (1.8/3.3V) Mixed-signal/RF, G (1.8/3.3V) embedded MTP Mixed-signal/RF, G (1.8/3.3V) embedded OTP (Kilopass/eMemory) Mixed Signal, G, (1.8/5V) Logic, G (1.8/3.3V) Logic, G (1.8/3.3V), Embedded OTP/ MTP Logic, LV (1.5/3.3V) Logic, LP (1.8/3.3V) SiGe BiCMOS, G (1.8/3.3V) CMOS Image Sensor (1.8/3.3V) EmbFlash(1K,20K) (1.8/3.3V) EmbFlash Enhanced (1.8/3.3V) EmbFlash Enhanced (1.8/5V) EmbFlash HDR (1.8/3.3V) High Voltage (1.8/3.3/32V) High Voltage (1.8/5/32V) High Voltage (1.8/5/18/24/32/40V), BCD High Voltage (1.8/5/60/Vg1.8/5V), BCD High Voltage, BCD (Generation-2) 0.18 um: Part 2 Jan-21 TMGI61 Fab14 CC V V V V V V Jan-6 TMFG75 Fab12 Vincent V V Feb-3 TMGI62 Fab12 Jeff V V V V V Mar-18 TMGI63 Fab14 Shirley V V V V V V Apr-15 TMGI64 Fab12 ZR V V V V V May-20 TMGI65 Fab14 Jeff V V V V V V Jun-16 TMGI66 Fab12 Howard V V V V V May-26 TMGI85 Fab14 FK V V V V V Jun-16 TMGI86 Fab14 Vincent V V V V V Apr-8 TMFG76 Fab6 Vincent V V Jan-21 TMGI81 Fab12 Francis V V V V Feb-25 TMFG79 Fab14 FK V Feb-25 TMGI82 Fab14 FK V V V V V V V Jan-14 TMFG97 SSMC Lynn V V V Mar-25 TMGI83 Fab6 Vincent V V V V V V V Mar-18 TMFG98 Fab10 CC V V Apr-29 TMGI84 Fab12 Francis V V V V V V May-27 TMFG99 Fab5 ZR V V Mar-25 TMGI13 Fab10 Lynn V V V Jan-7 TMGJ01 Fab8 Howard V V V V V V Feb-3 TMGJ02 Fab3 Howard V V V V V V V Mar-4 TMGJ03 Fab11 ZR V V V Apr-8 TMGJ04 Fab8 Jeff V V V V V V V V May-13 TMGJ05 Fab3 ZR V V V V V V Jun-10 TMGJ06 Fab11 CC V V V V V V V V V V V V Jan-14 Feb-24 Mar-11 V V V V V V V V V Apr-15 May-20 Jun-16 Mixed-Signal/RF, G (1.8/3.3V) Mixed-signal/RF, G (1.8/3.3V) embedded MTP Mixed-signal/RF, G (1.8/3.3V) embedded OTP (Kilopass/eMemory) Mixed Signal, G, (1.8/5V) Logic, G (1.8/3.3V) Logic, G (1.8/3.3V), Embedded OTP/ MTP Logic, LV (1.5/3.3V) Logic, LP (1.8/3.3V) EmbFlash(1K, 20K) (1.8/3.3V) EmbFlash Enhanced (1.8/3.3V) EmbFlash Enhanced (1.8/5V) EmbFlash HDR (1.8/3.3V) EmbFlash eLL(1.8/3.3V) High Voltage (1.8/3.3/32V) High Voltage (1.8/5/32V) High Voltage (1.8/5/18/24/32/40V), BCD High Voltage (1.8/5/60/Vg1.8/5V), BCD High Voltage, BCD (Generation-2) 0.18 um: Part 3 Mixed-Signal/RF, G (1.8/3.3V) Logic, G (1.8/3.3V) Logic, LV (1.5/3.3V) Logic, LP (1.8/3.3V, 1.8/5V) Mixed-signal/RF, G (1.8/3.3V) EmbFlash(1K, 20K) (1.8/3.3V) EmbFlash Enhanced (1.8/3.3V) 0.25 um: Part 1 Logic, G (2.5/3.3V, 2.5/5V) Logic, G (2.5/3.3V, 2.5/5V), Embedded OTP Logic, G (2.5/3.3V), Embedded MTP Mixed-Signal/RF, G (2.5/3.3V, 2.5/5V) Mixed-Signal, G (2.5/3.3V, 2.5/5V), Embedded OTP Mixed-Signal/RF, G (2.5/3.3V), Embedded MTP 0.25 um: Part 2 TMGJ21 Fab3 Shirley V V V V V V V High Voltage, (5/20/450/600/700/800V) * the calendar is Taiwan time TMGJ23 Fab5 Lynn V TMGJ24 Fab3 Shirley V V V V V V V V V V V V V V V Jan-21 TMGJ41 Fab6 Howard V V V V V Mar-18 TMGJ43 SSMC ZR V V V Jan-6 TMGI15 Fab10 Francis V V Mar-10 TMGI16 Fab3 Francis V V V V V V Mar-25 TMGI75 Fab10 YW V V V V Apr-22 TMGJ44 Fab10 Jeff V V V V Jan-21 TMGI73 Fab10 YW V V V V TMGJ25 Fab8 Shirley V V V V V TMGJ26 SSMC Jeff V V V V V V V V May-27 TMGJ45 Fab6 CC V V V V V V V V Jun-24 TMGJ46 Fab5 CC V V V V V V V V V V V V V V V V V Logic, G (2.5/3.3V, 2.5/5V) Mixed-Signal/RF, G (2.5/3.3V, 2.5/5V) High Voltage, BCD (2.5/5/12/24/40V/Vg2.5/5V) High Voltage, BCD (2.5/5/12/24/40/Vg2.5/5/12V) High Voltage, BCD (2.5/5/60V/Vg 2.5/5V) High Voltage, BCD (2.5/5/12/24/40/60/Vg2.5/5/12V) High Voltage, Gen-2 BCD (2.5/5/7/12/20/24/40/45/60V/Vg 2.5/5/12V) 0.35 um: Part 1 Jan-7 TMGI53 Fab10 YW Logic, G, Polycide/Silicide (3.3/5V) V Mixed-Signal, G (3.3/5V) V High Voltage, G, DDD (3.3/12/13.5) V High Voltage, DDD (3.3/12/13.5/15/18V) V High Voltage, BCD (3.3/20/23/Vg3.3V) High Voltage, BCD (3.3/5/12/15/20/40/Vg3.3/5/12V) 0.35 um: Part 2 SiGe BiCMOS, G (3.3V) 0.5 um TMGJ22 Fab8 Shirley V V V V V V Feb-4 TMGI74 Fab8 YW V V V V V V V Mar-4 TMGI54 Fab3 YW V V V V V Apr-22 TMGI76 Fab8 YW V V V V V V V V May-6 TMGI37 Fab3 FK V V V V V V May-20 TMGI77 Fab10 YW V V V V V Jun-16 TMGI78 Fab8 YW V V V V V V V May-6 TMGI55 Fab10 YW V V V V V V Feb-25 TMGI33 Fab3 ZY V May-27 TMGI34 Fab3 ZY V Mar-25 TMGI20 Fab3 Jeff V Jun-24 TMGI40 Fab3 Shirley V
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