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2.45 GHz Microplasma Technology at
the FH Aachen
Holger Heuermann
FH Aachen
University of Applied Sciences
Institute of Microwave and
Plasma Technology
Overview
Contents:
08.2006:
- Comparison:
Laser / MW-Plasma
First microplasma spark plug
from the FH Aachen driven
with a magnetron with 600W
- Introduction Microplasma
- Technology to Generate
Microplasmas
- Other Applications
- Lamps
- Jets and more
- 2.45GHz Spark Plugs
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 2
Status Laser
- First laser from 1960
- First hardware was very expensive
- 1980: Breakthrough with cheap semiconductor lasers
- Meanwhile in a lot of applications: e.g. DVD, laser printers,
pointer, cutting, welding, eye and shin treatment,
spectroscopy
- In Europe: Maybe 5 lasers
per household
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 3
Status Atmospheric Plasma
- Arc discharge (or Corona discharge)
- Very long history and the first hardware was cheap
- Meanwhile very much applications: e.g. lamps, spark plugs,
plasma TV, welding, melting, jets for activation, coating and
other industry processes
- In Europe: Maybe 30 plasma sources
per household
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 4
Introduction Microplasma
- Microplasma: Microwave driven plasma
- FH Aachen: large plasmas at 2.45 GHz driven with cheap
semiconductor technology
- In contrast to an arc plasma:
Microplasmas does not need a
ground electrode
- The plasma temperature is higher
than the electrode temperature
2010:
First microplasma jet from the
FH Aachen driven with a
transistor-circuit at 100W
- At higher pressure, plasma volume
reduces as energy density increases
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
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Technology to Generate Microplasmas:
Theory of High Voltage Generation
Simplified
electrical circuit
of the three stage
impedance
transformer
Realization of the
impedance
transformation using
distributed elements
in coaxial technique
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
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Technology to Generate Microplasmas
Theory of High Voltage Generation
This concept is based on a three stage transformation network. The
first and third transformation are realized by a gamma-transformer and
the second stage by an autotransformer.
 Input impedance Z0 = 50 Ω
 Output impedance Zout ≈ 0.5 MΩ
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
The full mathematical derivation is
presented in other papers. The
results to calculate the elements are
given in the following equations:
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Technology to Generate Microplasmas
Theory of High Voltage Generation
All mechanical
components of
our first
microplasma
spark plug
Impedance
transformer
(in simple
form)
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
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Technology to Generate Microplasmas
Theory of High Voltage Generation
Matching
for ignition
 Matching = 6 dB
(25% of the energy
is reflected)
Reflection coefficient of the impedance transformator for ignition
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
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Technology to Generate Microplasmas
Theory of High Voltage Generation
Calculated
ignition
voltage
 Voltage = 10,000V
Output voltage of the realized impedance transformator for ignition
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 10
Technology to Generate Microplasmas
Theory of High Voltage Generation and Operation
Bi-static matching
 Optimization for both states:
- Ignition (matching and high voltage)
- Operation of a microwave plasma (matching)
 Frequency shift between the two stages:
- 40 MHz in the 2.45 GHz ISM-Band
 40 MHz jump is only possible with semiconductors
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
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Technology to Generate Microplasmas
Microwave Generator and Control Loop
Block diagram
VCO
Amplifier
Variable
Dämpfung
PA
Detector 1
Coupler 1
Plasma
Coupler 2
Detector 2
Low pass filter
Difference
(~ S11)
Amplitudediscriminator
external
MVG-IC
Inner circuit to control the bi-static matching in a control loop
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
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Technology to Generate Microplasmas
Microwave Generator and Control Loop
m2
freq= 2.440GHz
dB(S(1,1))=-2.973
2
dB(S(1,1))
0
m2
m3
-2
-4
m4
freq=2.450GHz
dB(S(1,1))=-5.959
Min
m4
-6
m3
freq= 2.460GHz
dB(S(1,1))=-3.664
-8
-10
2.2
Ref
2.3
-10
dBm
2.4
2.5
2.6
1
* RBW
0
MHz
* VBW
1
MHz
SWT
5
ms
freq, GHz
* Att
dB
2.7
Marker
1
[T1
]
-48.18
dBm
2.458000000
GHz
-10
A
-20
SGL
1 AP
CLRWR
-30
-40
1
-50
PRN
-60
-70
-80
-90
-100
-110
Start
2.2
GHz
50
MHz/
Stop
2.7
GHz
SMD-realization to control our generators including
automatical locked loop for bi-static matching (replaced
by MVG-IC)
Date:
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
25.OCT.2010
09:29:22
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Technology to Generate Microplasmas
Microwave Generator and Control Loop
New circuit
for 15Wapplication
MVG-IC
Pre-amplifier
Main-amplifier
Highly integrated generator electronic with LDMOS transistor for an
energy saver lamp, http://3ppbulb.com
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 14
Technology to Generate Microplasmas
Microwave Generator and Control Loop
Laboratory
generator
for ignition
Portable development environment to generator the microwave power
(up to 100W) and to monitor the matching during operation
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
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Other Applications
Lamps and more
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 16
Just presented on the Light and Building
Lamps
for
general
lighting
Mercuryfree!!
First electrode-less low pressure discharge lamp called 3ppBulb
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
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Just presented on the Light + Building: Beamer Lamp
Future: low power
Actual research work at FH
Aachen:
1.: 10W-lamps based on this
beamer lamp for general lighting:
2016: lamps with best spectrum
2.: head lamps for car:
Project with Osram, Hella,
supported by NXP
Novel 120W single-sided beamer
lamp driven by an 2.45 GHz signal
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 18
Just presented on the Light + Building: Beamer Lamp
Innerer Aufbau der ersten HF-Beamerlampe
50 
- Zuleitung
Ckoppel
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
Lg
Lt
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Just presented on the Light + Building: Beamer Lamp
Erster Aufbau HF-Beamerlampe (Diplomarbeit)
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
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Just presented on the Light + Building: Beamer Lamp
Ein Entwicklung der HF-Beamer-Lampe
80
50 W UHP
120 W PVIP
lamp efficacy lm/W
70
60
50
57,2*2
From Philips
45,3*2
40
48,9*2
30
20
10
19,1*1
From KIT
9,9*1
0
2009
2010
• Verbesserungen innerhalb des nur einjährigen Projektes
• Potential für 80 lm/W vorhanden
*1 Measured at Philips Research Aachen
*2 Measured at LTI Karlsruhe
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
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Just presented on the Light + Building: Beamer Lamp
Innerer Aufbau der ersten HF-Beamerlampe
Eigenschaften
Referenzlampe: Philips
TOP
120 W / 132 W 1.0
Lichtstrom [lm]
7825
Mikroplasma-Lampe:
OSRAM PVIP
120 W / 132 W 1.0
modifiziert
8521
Lampenleistung [W]
132
149
Lampeneffizienz [lm/W]
60,2
57,2
Leuchtdichte [Gcd/m2]
2,59
2,79
Farbwiedergabeindex Ra [%]
Anlaufzeit bei Kaltzündung
[s]
Wieder-Zündung nach
Betrieb [s]
62,5
66,8
55
16
ca. 120
ca. 0 – 40
Aktivitäten:
• Vertrieb dieser Beamer-HF-Lampen
• F+E-Projekt mit 2,5 Mitarbeitern über 3 Jahre:
Thema UHP-Lampen bis 35W
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
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Future: Low Power High Pressure Lamps
Arc attachments of microwave driven HID-lamps
• Diffuse MW-mode appears
only in MW operation
MW @ 15W
• Low global tip temperature
of the electrode
• Low electron emission
of the electrode
 Displacement current
• Spot-mode appears in
MW and AC operation
MW @ 25W
• High local tip temperature
of the electrode
• high electron emission
of the electrode
 Conduction current
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 23
Future: Low Power High Pressure Lamps
„Electrode“ configurations for microwave operation
Non-metal „electrodes“
(e.g. ceramic)
Metal electrodes
(tungsten)
Vessel
Electrode-less
Plasma arc
(quartz or ceramic)
Capacitive coupling of the
plasma arc:
 Non-metal electrode/(-less)
 High lifetime
 Higher variety of the salts
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 24
Other Applications: Plasma Jets
FH Aachen research work microwave scalpel
Status
> Patient on metall plane
> Arc and current at 400W
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
Our project:
> Jet similar to short range
laser
> No current flow
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Other Applications: Plasma Jets
Products of Heuermann HF-Technik GmbH:
Generator with 200W
Plasma jet with cannula for high power applications
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 26
Other Applications: Plasma Jets
Products of Heuermann HF-Technik GmbH:
Mini plasma jet with
10W for health
applications (in medical
qualification) and
activation
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 27
Other Applications: Many
- Low emission heating (drives burner!)
- Clean air (hospitals, clean rooms)
- Ultrasonic up to the um-range for a lot of applications
- Welding, melting, ….
The expensive part is
the power amplifier!
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
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1. Generation
Runs in a standard engine
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 29
1. Generation of 2.45GHz Spark Plugs
Advantages of our spark
plugs:
09.2006:
RF spark plug driven with 20W
- Cheap and small electronic
- High voltage only in the
spark plug
- Best plasma generation
conditions by signal with a
rise time of only 0.1 ns
- No electrode-material in the
plasma – low wear
- Free in time of ignition
- Free in the number of
ignitions
- Free in duration of ignition
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 30
1. Generation of 2.45GHz Spark Plugs
ca. 5,000,000 V/m
ca. 500 V/m
Highest voltage
only at the
electrode
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 31
1. Generation of
2.45GHz Spark
Plugs
Test motor at the
Aachen University
of Applied
Sciences
This engine run
with our spark
plug!
1. Generation of 2.45GHz Spark Plugs
Operation under atmosphere 2009
1. Generation of 2.45GHz Spark Plugs
Operation under pressure
1bar
15bar
5bar
20bar
10bar
30bar (Filter)
2. Generation - Design
Design of 2. Generation
2.45GHz Spark Plug
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
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2. Generation of 2.45GHz Spark Plugs
New design for higher pressure applications
Novel inner
construction
Peek
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 36
2. Generation of 2.45GHz Spark Plugs
Easy to manufacture
Explosion view of the novel inner construction
Peek
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 37
2. Generation of 2.45GHz Spark Plugs
New design
Cross section of the full spark plug
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
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2. Generation of 2.45GHz Spark Plugs
Full finite element design: meshing
Full finite element-model for simulation
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 39
2. Generation of 2.45GHz Spark Plugs
Electromagnetic results for the ignition
E Field
ca. 5,000,000 V/m
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 40
2. Generation of 2.45GHz Spark Plugs
Results ignition
Matching S11
- 18 dB
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 41
2. Generation of 2.45GHz Spark Plugs
Results operation
E Field
ca. 1,000,000 V/m
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 42
2. Generation of 2.45GHz Spark Plugs
Results operation
Matching S11
- 5 dB
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 43
2. Generation of 2.45GHz Spark Plugs
Multi physic design: strength simulation
Numerical investigation of the spark plug ceramics
with regard to strength at high-pressure conditions
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 44
2. Generation of 2.45GHz Spark Plugs
Results ignition
Temperature simulation
294 °C
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 45
2. Generation of 2.45GHz Spark Plugs
Results ignition
Temperature simulation
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 46
2. Generation of 2.45GHz Spark Plugs
Results operation
Temperature simulation
1830 °C
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 47
2. Generation of 2.45GHz Spark Plugs
Results operation
Temperature simulation
1830 °C
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 48
2. Generation – Hardware
and first Tests
1. Tests of the New
2.45GHz Spark Plugs
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 49
2. Generation of 2.45GHz Spark Plugs
First hardware of the second generation
Measurement
adaptor
Peak capacitor
Microwave spark plug out of 7 components
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 50
2. Generation of 2.45GHz Spark Plugs
First tests: 1. problem
Ground electrodes melted
Replaced by external electrodes
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 51
2. Generation of 2.45GHz Spark Plugs
First tests: 2. problem
Series-C melted
Replacement is
on-going:
cost actual 50%
performance in
operation mode
(reflected power
is 50% of
incident power)
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 52
2. Generation of 2.45GHz Spark Plugs
First tests: under atmosphere
Sparks between center electrode and ground electrodes
at ca. 50W-puls with <100mJ (target: 100W-puls with 400mJ)
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 53
2. Generation of 2.45GHz Spark Plugs
First flow tube measurements at the IAV
IAV-flow tube for first charge motion test
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 54
2. Generation of 2.45GHz Spark Plugs
First flow tube measurements at the IAV
Position 1
T = 1 ms / v = 0 m/s
T = 1 ms / v = 25 m/s
T = 5 ms / v = 25 m/s
Position 2
T = 1 ms / v = 0 m/s
T = 1 ms / v = 25 m/s
T = 5 ms / v = 25 m/s
Flow tube results for two views (pressure 1 bar)
© FH AACHEN UNIVERSITY OF APPLIED SCIENCES
14. November 2016 | 55
Summary
- Introduction Microplasma
- Theory of High Voltage Generation
- Microwave Generator and Control Loop
- Other Applications: Lamps, Jets und
much more
- 1. Spark Plug Generation with
2.45GHz Microplasma
- Design of 2. Spark Plug Generation
with 2.45GHz Microplasma
- 1. Tests of 2. Spark Plug Generation
Thank you
Have a good discussion

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